DK0648154T3 - Anvendelse af Fresnel-zone plader til materialebearbejdning - Google Patents

Anvendelse af Fresnel-zone plader til materialebearbejdning

Info

Publication number
DK0648154T3
DK0648154T3 DK92915314T DK92915314T DK0648154T3 DK 0648154 T3 DK0648154 T3 DK 0648154T3 DK 92915314 T DK92915314 T DK 92915314T DK 92915314 T DK92915314 T DK 92915314T DK 0648154 T3 DK0648154 T3 DK 0648154T3
Authority
DK
Denmark
Prior art keywords
fresnel zone
fzp
workpiece
hole
deflection
Prior art date
Application number
DK92915314T
Other languages
English (en)
Inventor
Bruce G Macdonald
Robert O Hunter Jr
Adlai H Smith
Clark C Guest
Original Assignee
Litel Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litel Instr Inc filed Critical Litel Instr Inc
Application granted granted Critical
Publication of DK0648154T3 publication Critical patent/DK0648154T3/da

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042Automatically aligning the laser beam
    • B23K26/043Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Liquid Crystal (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Polymerisation Methods In General (AREA)
  • Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
DK92915314T 1992-07-01 1992-07-01 Anvendelse af Fresnel-zone plader til materialebearbejdning DK0648154T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1992/005555 WO1994001240A1 (en) 1992-07-01 1992-07-01 Use of fresnel zone plates for material processing

Publications (1)

Publication Number Publication Date
DK0648154T3 true DK0648154T3 (da) 1998-09-23

Family

ID=22231213

Family Applications (1)

Application Number Title Priority Date Filing Date
DK92915314T DK0648154T3 (da) 1992-07-01 1992-07-01 Anvendelse af Fresnel-zone plader til materialebearbejdning

Country Status (7)

Country Link
EP (1) EP0648154B1 (da)
JP (1) JPH08504132A (da)
AT (1) ATE163381T1 (da)
DE (1) DE69224536T2 (da)
DK (1) DK0648154T3 (da)
ES (1) ES2114943T3 (da)
WO (1) WO1994001240A1 (da)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110303244A (zh) * 2019-07-25 2019-10-08 中国工程物理研究院激光聚变研究中心 一种快速制备表面周期结构方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9601049D0 (en) 1996-01-18 1996-03-20 Xaar Ltd Methods of and apparatus for forming nozzles
FR2748412B1 (fr) * 1996-05-07 1998-06-19 Solaic Sa Procede de decoupe d'une plaque en matiere plastique
WO2001015861A1 (fr) * 1999-08-27 2001-03-08 Asahi Kasei Kabushiki Kaisha Tampon de polissage et dispositif de polissage
GB9922082D0 (en) * 1999-09-17 1999-11-17 Isis Innovation Laser apparatus for use in material processing
CN113345619B (zh) * 2021-06-16 2022-07-12 中国工程物理研究院激光聚变研究中心 一维x射线折射闪耀波带片
JP2023021574A (ja) * 2021-08-02 2023-02-14 株式会社Screenホールディングス 光照射装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5223693A (en) * 1990-04-28 1993-06-29 Mitsubishi Denki Kabushiki Kaisha Optical machining apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110303244A (zh) * 2019-07-25 2019-10-08 中国工程物理研究院激光聚变研究中心 一种快速制备表面周期结构方法

Also Published As

Publication number Publication date
EP0648154A1 (en) 1995-04-19
JPH08504132A (ja) 1996-05-07
EP0648154B1 (en) 1998-02-25
ATE163381T1 (de) 1998-03-15
DE69224536T2 (de) 1998-09-10
ES2114943T3 (es) 1998-06-16
WO1994001240A1 (en) 1994-01-20
DE69224536D1 (de) 1998-04-02

Similar Documents

Publication Publication Date Title
US5362940A (en) Use of Fresnel zone plates for material processing
US4156124A (en) Image transfer laser engraving
US5296673A (en) Laser machining
US5482801A (en) High power phase masks for imaging systems
ES2146620T3 (es) Proceso y aparato de soldadura y otros tratamientos termicos.
US3617702A (en) Apparatus and method for perforating sheet material
CA2390781A1 (en) Line generator optical apparatus
DE102004033151A1 (de) Bearbeitungsvorrichtung unter Verwendung eines Laserstrahls
WO2001009665A8 (en) Optical beam shaper
DE3063065D1 (en) Device for the treatment of a workpiece with a laser beam
DE69115716D1 (de) Vorrichtung zum eingravieren mit einem laserstrahl
CA2037063A1 (en) Optical Machining Apparatus
KR950028856A (ko) 레이저 전사 기계 가공 장치
DK0648154T3 (da) Anvendelse af Fresnel-zone plader til materialebearbejdning
KR900019162A (ko) 리니어 프레스넬 존 플레이트(Linear Fresnel Zone Plate)를 사용한 마스크와 반도체 웨이퍼의 위치맞춤 시스템 및 방법
KR960033636A (ko) 레이저각인장치
JPH01286478A (ja) ビーム均一化光学系おゆび製造法
TW375547B (en) Laser beam dividing apparatus
WO1997006016A1 (en) Monitoring of covert marks
KR930017251A (ko) 표면 방출 분산 피드백 반도체 레이저 다이오드 장치에 춰엎드 회절격자를 제조하기 위한장치
JPS57181537A (en) Light pattern projector
JP3216987B2 (ja) レーザ転写加工装置およびレーザ転写加工方法
KR970013535A (ko) 레이저마커
JPS57142785A (en) Automatic marking device
EP0325103A3 (en) Method for constructing an optical head by varying a hologram pattern