DE69224536D1 - Verwendung von fresnelschen zonenplatten für materialbearbeitung - Google Patents

Verwendung von fresnelschen zonenplatten für materialbearbeitung

Info

Publication number
DE69224536D1
DE69224536D1 DE69224536T DE69224536T DE69224536D1 DE 69224536 D1 DE69224536 D1 DE 69224536D1 DE 69224536 T DE69224536 T DE 69224536T DE 69224536 T DE69224536 T DE 69224536T DE 69224536 D1 DE69224536 D1 DE 69224536D1
Authority
DE
Germany
Prior art keywords
fresnel zone
fzp
workpiece
hole
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69224536T
Other languages
English (en)
Other versions
DE69224536T2 (de
Inventor
Bruce Macdonald
Robert Hunter
Adlai Smith
Clark Guest
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LITEL INSTRUMENTS SAN DIEGO CALIF US
Litel Instruments Inc
Original Assignee
LITEL INSTRUMENTS SAN DIEGO CALIF US
Litel Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LITEL INSTRUMENTS SAN DIEGO CALIF US, Litel Instruments Inc filed Critical LITEL INSTRUMENTS SAN DIEGO CALIF US
Publication of DE69224536D1 publication Critical patent/DE69224536D1/de
Application granted granted Critical
Publication of DE69224536T2 publication Critical patent/DE69224536T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Liquid Crystal (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Polymerisation Methods In General (AREA)
  • Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
DE69224536T 1992-07-01 1992-07-01 Verwendung von fresnelschen zonenplatten für materialbearbeitung Expired - Fee Related DE69224536T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1992/005555 WO1994001240A1 (en) 1992-07-01 1992-07-01 Use of fresnel zone plates for material processing

Publications (2)

Publication Number Publication Date
DE69224536D1 true DE69224536D1 (de) 1998-04-02
DE69224536T2 DE69224536T2 (de) 1998-09-10

Family

ID=22231213

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69224536T Expired - Fee Related DE69224536T2 (de) 1992-07-01 1992-07-01 Verwendung von fresnelschen zonenplatten für materialbearbeitung

Country Status (7)

Country Link
EP (1) EP0648154B1 (de)
JP (1) JPH08504132A (de)
AT (1) ATE163381T1 (de)
DE (1) DE69224536T2 (de)
DK (1) DK0648154T3 (de)
ES (1) ES2114943T3 (de)
WO (1) WO1994001240A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9601049D0 (en) 1996-01-18 1996-03-20 Xaar Ltd Methods of and apparatus for forming nozzles
FR2748412B1 (fr) * 1996-05-07 1998-06-19 Solaic Sa Procede de decoupe d'une plaque en matiere plastique
US6544104B1 (en) * 1999-08-27 2003-04-08 Asahi Kasei Kabushiki Kaisha Polishing pad and polisher
GB9922082D0 (en) * 1999-09-17 1999-11-17 Isis Innovation Laser apparatus for use in material processing
CN110303244B (zh) * 2019-07-25 2020-11-27 中国工程物理研究院激光聚变研究中心 一种快速制备表面周期结构方法
CN113345619B (zh) * 2021-06-16 2022-07-12 中国工程物理研究院激光聚变研究中心 一维x射线折射闪耀波带片
JP2023021574A (ja) * 2021-08-02 2023-02-14 株式会社Ｓｃｒｅｅｎホールディングス 光照射装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5223693A (en) * 1990-04-28 1993-06-29 Mitsubishi Denki Kabushiki Kaisha Optical machining apparatus

Also Published As

Publication number Publication date
ATE163381T1 (de) 1998-03-15
ES2114943T3 (es) 1998-06-16
EP0648154A1 (de) 1995-04-19
DK0648154T3 (da) 1998-09-23
DE69224536T2 (de) 1998-09-10
EP0648154B1 (de) 1998-02-25
WO1994001240A1 (en) 1994-01-20
JPH08504132A (ja) 1996-05-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee
8370 Indication related to discontinuation of the patent is to be deleted
8339 Ceased/non-payment of the annual fee