DK0468886T3 - Indretning til frembringelse af en plasma - Google Patents

Indretning til frembringelse af en plasma

Info

Publication number
DK0468886T3
DK0468886T3 DK91402057T DK91402057T DK0468886T3 DK 0468886 T3 DK0468886 T3 DK 0468886T3 DK 91402057 T DK91402057 T DK 91402057T DK 91402057 T DK91402057 T DK 91402057T DK 0468886 T3 DK0468886 T3 DK 0468886T3
Authority
DK
Denmark
Prior art keywords
cavity
interior
discharge tube
plasma
waveguide
Prior art date
Application number
DK91402057T
Other languages
Danish (da)
English (en)
Inventor
Odile Dessaux
Christian Dupret
Pierre Goudmand
Christophe Hoyez
Original Assignee
Atea
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atea filed Critical Atea
Application granted granted Critical
Publication of DK0468886T3 publication Critical patent/DK0468886T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/3222—Antennas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32357—Generation remote from the workpiece, e.g. down-stream
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Physical Vapour Deposition (AREA)
DK91402057T 1990-07-27 1991-07-24 Indretning til frembringelse af en plasma DK0468886T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9009618A FR2665323B1 (fr) 1990-07-27 1990-07-27 Dispositif de production d'un plasma.

Publications (1)

Publication Number Publication Date
DK0468886T3 true DK0468886T3 (da) 1999-05-31

Family

ID=9399170

Family Applications (1)

Application Number Title Priority Date Filing Date
DK91402057T DK0468886T3 (da) 1990-07-27 1991-07-24 Indretning til frembringelse af en plasma

Country Status (6)

Country Link
EP (1) EP0468886B1 (de)
AT (1) ATE170701T1 (de)
DE (1) DE69130094T2 (de)
DK (1) DK0468886T3 (de)
ES (1) ES2122969T3 (de)
FR (1) FR2665323B1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2702328B1 (fr) * 1993-03-05 1995-05-12 Univ Lille Sciences Tech Dispositif de production d'un plasma.
FR2714789B1 (fr) * 1993-12-30 1996-03-22 Plasmion Dispositif pour former un plasma par application de micro-ondes.
US6034346A (en) * 1995-05-19 2000-03-07 Hitachi, Ltd. Method and apparatus for plasma processing apparatus
FR2746249B1 (fr) * 1996-03-13 1998-06-12 Dispositif d'excitation d'un plasma par energie micro-ondes repartie, procede de fabrication, et application au depot de revetements minces
US6039834A (en) * 1997-03-05 2000-03-21 Applied Materials, Inc. Apparatus and methods for upgraded substrate processing system with microwave plasma source
DE19856307C1 (de) * 1998-12-07 2000-01-13 Bosch Gmbh Robert Vorrichtung zur Erzeugung eines freien kalten Plasmastrahles

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2074715A7 (de) * 1970-01-19 1971-10-08 Dupret Christian
FR2290126A1 (fr) * 1974-10-31 1976-05-28 Anvar Perfectionnements apportes aux dispositifs d'excitation, par des ondes hf, d'une colonne de gaz enfermee dans une enveloppe
IT206683Z2 (it) * 1985-11-20 1987-10-01 Gte Telecom Spa Cavita' risonante a microonde con dielettrico metallizato.
FR2616030A1 (fr) * 1987-06-01 1988-12-02 Commissariat Energie Atomique Procede de gravure ou de depot par plasma et dispositif pour la mise en oeuvre du procede
US4866346A (en) * 1987-06-22 1989-09-12 Applied Science & Technology, Inc. Microwave plasma generator
EP0321792A3 (de) * 1987-12-23 1991-03-20 Hewlett-Packard Company Mikrowellenresonanz Hohlraum

Also Published As

Publication number Publication date
EP0468886A3 (en) 1992-03-04
FR2665323B1 (fr) 1996-09-27
EP0468886A2 (de) 1992-01-29
DE69130094D1 (de) 1998-10-08
ATE170701T1 (de) 1998-09-15
DE69130094T2 (de) 1999-04-15
ES2122969T3 (es) 1999-01-01
EP0468886B1 (de) 1998-09-02
FR2665323A1 (fr) 1992-01-31

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