DE8432775U1 - Vorrichtung zum Temperieren integrierter elektronischer Bauteile - Google Patents
Vorrichtung zum Temperieren integrierter elektronischer BauteileInfo
- Publication number
- DE8432775U1 DE8432775U1 DE19848432775 DE8432775U DE8432775U1 DE 8432775 U1 DE8432775 U1 DE 8432775U1 DE 19848432775 DE19848432775 DE 19848432775 DE 8432775 U DE8432775 U DE 8432775U DE 8432775 U1 DE8432775 U1 DE 8432775U1
- Authority
- DE
- Germany
- Prior art keywords
- rails
- components
- heat
- conducting medium
- electronic components
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005496 tempering Methods 0.000 title claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 6
- 239000011796 hollow space material Substances 0.000 claims description 2
- 238000012360 testing method Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19848432775 DE8432775U1 (de) | 1984-11-09 | 1984-11-09 | Vorrichtung zum Temperieren integrierter elektronischer Bauteile |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19848432775 DE8432775U1 (de) | 1984-11-09 | 1984-11-09 | Vorrichtung zum Temperieren integrierter elektronischer Bauteile |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE8432775U1 true DE8432775U1 (de) | 1991-04-04 |
Family
ID=6772500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19848432775 Expired DE8432775U1 (de) | 1984-11-09 | 1984-11-09 | Vorrichtung zum Temperieren integrierter elektronischer Bauteile |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE8432775U1 (da) |
-
1984
- 1984-11-09 DE DE19848432775 patent/DE8432775U1/de not_active Expired
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