DE8420715U1 - Schleuse einer Zweikammerhochvakuumanlage - Google Patents
Schleuse einer ZweikammerhochvakuumanlageInfo
- Publication number
- DE8420715U1 DE8420715U1 DE19848420715 DE8420715U DE8420715U1 DE 8420715 U1 DE8420715 U1 DE 8420715U1 DE 19848420715 DE19848420715 DE 19848420715 DE 8420715 U DE8420715 U DE 8420715U DE 8420715 U1 DE8420715 U1 DE 8420715U1
- Authority
- DE
- Germany
- Prior art keywords
- chamber
- lock
- flange ring
- high vacuum
- vacuum system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 40
- 238000007789 sealing Methods 0.000 claims description 12
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 238000004380 ashing Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000032258 transport Effects 0.000 description 5
- 238000005086 pumping Methods 0.000 description 4
- 244000309464 bull Species 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 238000006424 Flood reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19848420715 DE8420715U1 (de) | 1984-07-11 | 1984-07-11 | Schleuse einer Zweikammerhochvakuumanlage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19848420715 DE8420715U1 (de) | 1984-07-11 | 1984-07-11 | Schleuse einer Zweikammerhochvakuumanlage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE8420715U1 true DE8420715U1 (de) | 1987-08-20 |
Family
ID=6768743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19848420715 Expired DE8420715U1 (de) | 1984-07-11 | 1984-07-11 | Schleuse einer Zweikammerhochvakuumanlage |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE8420715U1 (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4408947A1 (de) * | 1994-03-16 | 1995-09-21 | Balzers Hochvakuum | Vakuumbehandlungsanlage und Ventilanordnung |
-
1984
- 1984-07-11 DE DE19848420715 patent/DE8420715U1/de not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4408947A1 (de) * | 1994-03-16 | 1995-09-21 | Balzers Hochvakuum | Vakuumbehandlungsanlage und Ventilanordnung |
| US5571331A (en) * | 1994-03-16 | 1996-11-05 | Balzers Aktiengesellschaft | Vacuum treatment apparatus |
| CH688043A5 (de) * | 1994-03-16 | 1997-04-30 | Balzers Hochvakuum | Vakuumbehandlungsanlage und Ventilanordnung. |
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