DE8409910U1 - Fehlerfeststellungsvorrichtung - Google Patents
FehlerfeststellungsvorrichtungInfo
- Publication number
- DE8409910U1 DE8409910U1 DE19848409910 DE8409910U DE8409910U1 DE 8409910 U1 DE8409910 U1 DE 8409910U1 DE 19848409910 DE19848409910 DE 19848409910 DE 8409910 U DE8409910 U DE 8409910U DE 8409910 U1 DE8409910 U1 DE 8409910U1
- Authority
- DE
- Germany
- Prior art keywords
- diffraction
- light
- igr
- eegr
- munich
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 title claims description 7
- 230000000737 periodic effect Effects 0.000 claims description 13
- 108091008695 photoreceptors Proteins 0.000 claims description 6
- 239000012141 concentrate Substances 0.000 claims description 3
- 230000007547 defect Effects 0.000 description 6
- 244000309464 bull Species 0.000 description 4
- 230000002999 depolarising effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19848409910 DE8409910U1 (de) | 1984-03-30 | 1984-03-30 | Fehlerfeststellungsvorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19848409910 DE8409910U1 (de) | 1984-03-30 | 1984-03-30 | Fehlerfeststellungsvorrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE8409910U1 true DE8409910U1 (de) | 1987-07-16 |
Family
ID=6765367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19848409910 Expired DE8409910U1 (de) | 1984-03-30 | 1984-03-30 | Fehlerfeststellungsvorrichtung |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE8409910U1 (el) |
-
1984
- 1984-03-30 DE DE19848409910 patent/DE8409910U1/de not_active Expired
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