DE8409910U1 - Fehlerfeststellungsvorrichtung - Google Patents

Fehlerfeststellungsvorrichtung

Info

Publication number
DE8409910U1
DE8409910U1 DE19848409910 DE8409910U DE8409910U1 DE 8409910 U1 DE8409910 U1 DE 8409910U1 DE 19848409910 DE19848409910 DE 19848409910 DE 8409910 U DE8409910 U DE 8409910U DE 8409910 U1 DE8409910 U1 DE 8409910U1
Authority
DE
Germany
Prior art keywords
diffraction
light
igr
eegr
munich
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE19848409910
Other languages
German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Erwin Sick GmbH Optik Elektronik
Original Assignee
Erwin Sick GmbH Optik Elektronik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Erwin Sick GmbH Optik Elektronik filed Critical Erwin Sick GmbH Optik Elektronik
Priority to DE19848409910 priority Critical patent/DE8409910U1/de
Publication of DE8409910U1 publication Critical patent/DE8409910U1/de
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95623Inspecting patterns on the surface of objects using a spatial filtering method
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506Optical discs

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
DE19848409910 1984-03-30 1984-03-30 Fehlerfeststellungsvorrichtung Expired DE8409910U1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19848409910 DE8409910U1 (de) 1984-03-30 1984-03-30 Fehlerfeststellungsvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19848409910 DE8409910U1 (de) 1984-03-30 1984-03-30 Fehlerfeststellungsvorrichtung

Publications (1)

Publication Number Publication Date
DE8409910U1 true DE8409910U1 (de) 1987-07-16

Family

ID=6765367

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19848409910 Expired DE8409910U1 (de) 1984-03-30 1984-03-30 Fehlerfeststellungsvorrichtung

Country Status (1)

Country Link
DE (1) DE8409910U1 (el)

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