DE69942087D1 - Ausführung eines kapazitiven drucksensors - Google Patents

Ausführung eines kapazitiven drucksensors

Info

Publication number
DE69942087D1
DE69942087D1 DE69942087T DE69942087T DE69942087D1 DE 69942087 D1 DE69942087 D1 DE 69942087D1 DE 69942087 T DE69942087 T DE 69942087T DE 69942087 T DE69942087 T DE 69942087T DE 69942087 D1 DE69942087 D1 DE 69942087D1
Authority
DE
Germany
Prior art keywords
execution
pressure sensor
capacitive pressure
capacitive
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69942087T
Other languages
English (en)
Inventor
Christopher P Grudzien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE69942087D1 publication Critical patent/DE69942087D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE69942087T 1998-02-04 1999-01-11 Ausführung eines kapazitiven drucksensors Expired - Lifetime DE69942087D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/018,395 US6029525A (en) 1998-02-04 1998-02-04 Capacitive based pressure sensor design
PCT/US1999/000563 WO1999040405A1 (en) 1998-02-04 1999-01-11 Capacitive based pressure sensor design

Publications (1)

Publication Number Publication Date
DE69942087D1 true DE69942087D1 (de) 2010-04-15

Family

ID=21787709

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69942087T Expired - Lifetime DE69942087D1 (de) 1998-02-04 1999-01-11 Ausführung eines kapazitiven drucksensors

Country Status (5)

Country Link
US (1) US6029525A (de)
EP (1) EP1053459B1 (de)
JP (1) JP3980270B2 (de)
DE (1) DE69942087D1 (de)
WO (1) WO1999040405A1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6568274B1 (en) * 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US6431003B1 (en) 2000-03-22 2002-08-13 Rosemount Aerospace Inc. Capacitive differential pressure sensor with coupled diaphragms
US6782754B1 (en) 2000-07-07 2004-08-31 Rosemount, Inc. Pressure transmitter for clean environments
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US6612176B2 (en) 2000-12-28 2003-09-02 Mks Instruments, Inc. Pressure transducer assembly with thermal shield
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7143652B2 (en) * 2004-10-18 2006-12-05 Silverbrook Research Pty Ltd Pressure sensor for high acceleration environment
US7194901B2 (en) * 2004-10-18 2007-03-27 Silverbrook Research Pty Ltd Pressure sensor with apertured membrane guard
US7234357B2 (en) * 2004-10-18 2007-06-26 Silverbrook Research Pty Ltd Wafer bonded pressure sensor
US7089798B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with thin membrane
US7159467B2 (en) * 2004-10-18 2007-01-09 Silverbrook Research Pty Ltd Pressure sensor with conductive ceramic membrane
US7240560B2 (en) * 2004-10-18 2007-07-10 Silverbrook Research Pty Ltd Pressure sensor with remote power source
US7295131B2 (en) * 2005-01-07 2007-11-13 Rosemount Inc. Diagnostic system for detecting rupture or thinning of diaphragms
US7000479B1 (en) 2005-05-02 2006-02-21 Mks Instruments, Inc. Heated pressure transducer
US7124640B1 (en) 2005-07-13 2006-10-24 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
US7679033B2 (en) * 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
JP5284959B2 (ja) * 2006-08-09 2013-09-11 エム ケー エス インストルメンツ インコーポレーテッド 静電容量圧力変換器における電力損失を一定に制御するためのシステムおよび方法
US7779698B2 (en) * 2007-11-08 2010-08-24 Rosemount Inc. Pressure sensor
WO2011097249A1 (en) 2010-02-02 2011-08-11 Mks Instruments, Inc. Capacitive pressure sensor
EP2761265B1 (de) 2011-09-29 2019-11-06 MKS Instruments, Inc. Kapazitiver drucksensor mitverbesserter elektrodenstruktur.
US8887575B2 (en) 2011-10-11 2014-11-18 Mks Instruments, Inc. Pressure sensor
JP6063240B2 (ja) * 2012-12-13 2017-01-18 サーパス工業株式会社 アンプ内蔵型圧力センサ
WO2015191641A1 (en) 2014-06-10 2015-12-17 Smart Hybrid Systems Incorporated High energy density capacitor with micrometer structures and nanometer components
US10312026B2 (en) 2015-06-09 2019-06-04 Smart Hybird Systems Incorporated High energy density capacitor with high aspect micrometer structures and a giant colossal dielectric material
US10996124B2 (en) * 2016-12-28 2021-05-04 Tubitak High accuracy pressure transducer with improved temperature stability
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2800796A (en) * 1952-08-05 1957-07-30 Trans Souics Inc Pressure measuring device
US3318153A (en) * 1962-12-04 1967-05-09 Rosemount Eng Co Ltd Diode loop capacitor comparative circuit including a pair of transformer windings coupled in phase
US3619742A (en) * 1970-05-21 1971-11-09 Rosemount Eng Co Ltd Shielded capacitance pressure sensor
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4168518A (en) * 1977-05-10 1979-09-18 Lee Shih Y Capacitor transducer
JPS6015010B2 (ja) * 1977-10-26 1985-04-17 株式会社日立製作所 圧力検出器
US4136603A (en) * 1977-11-14 1979-01-30 The Foxboro Company Diaphragm assembly
US4358814A (en) * 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
US4434203A (en) * 1980-10-27 1984-02-28 Setra Systems, Inc. Diaphragm
US5279163A (en) * 1986-02-28 1994-01-18 Antonio Nicholas F D Sensor and transducer apparatus
GB2188155B (en) * 1986-03-21 1990-01-10 Furness Controls Ltd Pressure transducer
US4800758A (en) * 1986-06-23 1989-01-31 Rosemount Inc. Pressure transducer with stress isolation for hard mounting
US4735090A (en) * 1986-11-28 1988-04-05 Honeywell Inc. Flange mounted pressure transmitter
US4785669A (en) * 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
US4977480A (en) * 1988-09-14 1990-12-11 Fuji Koki Mfg. Co., Ltd. Variable-capacitance type sensor and variable-capacitance type sensor system using the same
US5020377A (en) * 1990-01-23 1991-06-04 Kavlico Corporation Low pressure transducer using metal foil diaphragm
US5150275A (en) * 1991-07-01 1992-09-22 Setra Systems, Inc. Capacitive pressure sensor
US5155653A (en) * 1991-08-14 1992-10-13 Maclean-Fogg Company Capacitive pressure sensor
US5499533A (en) * 1992-08-26 1996-03-19 Miller; Mark Downhole pressure gauge converter
US5442962A (en) * 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode

Also Published As

Publication number Publication date
US6029525A (en) 2000-02-29
JP3980270B2 (ja) 2007-09-26
EP1053459A1 (de) 2000-11-22
EP1053459B1 (de) 2010-03-03
JP2002502964A (ja) 2002-01-29
WO1999040405A1 (en) 1999-08-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition