DE69942087D1 - Ausführung eines kapazitiven drucksensors - Google Patents
Ausführung eines kapazitiven drucksensorsInfo
- Publication number
- DE69942087D1 DE69942087D1 DE69942087T DE69942087T DE69942087D1 DE 69942087 D1 DE69942087 D1 DE 69942087D1 DE 69942087 T DE69942087 T DE 69942087T DE 69942087 T DE69942087 T DE 69942087T DE 69942087 D1 DE69942087 D1 DE 69942087D1
- Authority
- DE
- Germany
- Prior art keywords
- execution
- pressure sensor
- capacitive pressure
- capacitive
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/018,395 US6029525A (en) | 1998-02-04 | 1998-02-04 | Capacitive based pressure sensor design |
PCT/US1999/000563 WO1999040405A1 (en) | 1998-02-04 | 1999-01-11 | Capacitive based pressure sensor design |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69942087D1 true DE69942087D1 (de) | 2010-04-15 |
Family
ID=21787709
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69942087T Expired - Lifetime DE69942087D1 (de) | 1998-02-04 | 1999-01-11 | Ausführung eines kapazitiven drucksensors |
Country Status (5)
Country | Link |
---|---|
US (1) | US6029525A (de) |
EP (1) | EP1053459B1 (de) |
JP (1) | JP3980270B2 (de) |
DE (1) | DE69942087D1 (de) |
WO (1) | WO1999040405A1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040099061A1 (en) * | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
US6568274B1 (en) * | 1998-02-04 | 2003-05-27 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
US6431003B1 (en) | 2000-03-22 | 2002-08-13 | Rosemount Aerospace Inc. | Capacitive differential pressure sensor with coupled diaphragms |
US6782754B1 (en) | 2000-07-07 | 2004-08-31 | Rosemount, Inc. | Pressure transmitter for clean environments |
US6772640B1 (en) | 2000-10-10 | 2004-08-10 | Mks Instruments, Inc. | Multi-temperature heater for use with pressure transducers |
FR2818676B1 (fr) * | 2000-12-27 | 2003-03-07 | Freyssinet Int Stup | Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre |
US6612176B2 (en) | 2000-12-28 | 2003-09-02 | Mks Instruments, Inc. | Pressure transducer assembly with thermal shield |
US6837112B2 (en) * | 2003-03-22 | 2005-01-04 | Stec Inc. | Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis |
US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
US7347099B2 (en) * | 2004-07-16 | 2008-03-25 | Rosemount Inc. | Pressure transducer with external heater |
US7201057B2 (en) * | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
US7141447B2 (en) * | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
US7137301B2 (en) * | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
US7159467B2 (en) * | 2004-10-18 | 2007-01-09 | Silverbrook Research Pty Ltd | Pressure sensor with conductive ceramic membrane |
US7089798B2 (en) * | 2004-10-18 | 2006-08-15 | Silverbrook Research Pty Ltd | Pressure sensor with thin membrane |
US7143652B2 (en) * | 2004-10-18 | 2006-12-05 | Silverbrook Research Pty Ltd | Pressure sensor for high acceleration environment |
US7194901B2 (en) * | 2004-10-18 | 2007-03-27 | Silverbrook Research Pty Ltd | Pressure sensor with apertured membrane guard |
US7234357B2 (en) * | 2004-10-18 | 2007-06-26 | Silverbrook Research Pty Ltd | Wafer bonded pressure sensor |
US7240560B2 (en) * | 2004-10-18 | 2007-07-10 | Silverbrook Research Pty Ltd | Pressure sensor with remote power source |
US7295131B2 (en) * | 2005-01-07 | 2007-11-13 | Rosemount Inc. | Diagnostic system for detecting rupture or thinning of diaphragms |
US7000479B1 (en) | 2005-05-02 | 2006-02-21 | Mks Instruments, Inc. | Heated pressure transducer |
US7124640B1 (en) | 2005-07-13 | 2006-10-24 | Mks Instruments, Inc. | Thermal mounting plate for heated pressure transducer |
US7679033B2 (en) * | 2005-09-29 | 2010-03-16 | Rosemount Inc. | Process field device temperature control |
WO2008021178A2 (en) * | 2006-08-09 | 2008-02-21 | Mks Instruments, Inc. | Constant power dissipation in capacitance pressure transducers |
US7779698B2 (en) * | 2007-11-08 | 2010-08-24 | Rosemount Inc. | Pressure sensor |
US8333118B2 (en) | 2010-02-02 | 2012-12-18 | Mks Instruments, Inc. | Capacitive pressure sensor |
WO2013049490A2 (en) | 2011-09-29 | 2013-04-04 | Mks Instruments, Inc. | Capacitive pressure sensor with improved electrode structure |
CN104145179B (zh) | 2011-10-11 | 2016-11-09 | Mks仪器公司 | 压力传感器 |
JP6063240B2 (ja) * | 2012-12-13 | 2017-01-18 | サーパス工業株式会社 | アンプ内蔵型圧力センサ |
WO2015191641A1 (en) * | 2014-06-10 | 2015-12-17 | Smart Hybrid Systems Incorporated | High energy density capacitor with micrometer structures and nanometer components |
US10312026B2 (en) | 2015-06-09 | 2019-06-04 | Smart Hybird Systems Incorporated | High energy density capacitor with high aspect micrometer structures and a giant colossal dielectric material |
US10996124B2 (en) * | 2016-12-28 | 2021-05-04 | Tubitak | High accuracy pressure transducer with improved temperature stability |
US11287342B2 (en) | 2020-03-20 | 2022-03-29 | Mks Instruments, Inc. | Capacitance manometer with improved baffle for improved detection accuracy |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2800796A (en) * | 1952-08-05 | 1957-07-30 | Trans Souics Inc | Pressure measuring device |
US3318153A (en) * | 1962-12-04 | 1967-05-09 | Rosemount Eng Co Ltd | Diode loop capacitor comparative circuit including a pair of transformer windings coupled in phase |
US3619742A (en) * | 1970-05-21 | 1971-11-09 | Rosemount Eng Co Ltd | Shielded capacitance pressure sensor |
US4084438A (en) * | 1976-03-29 | 1978-04-18 | Setra Systems, Inc. | Capacitive pressure sensing device |
US4168518A (en) * | 1977-05-10 | 1979-09-18 | Lee Shih Y | Capacitor transducer |
JPS6015010B2 (ja) * | 1977-10-26 | 1985-04-17 | 株式会社日立製作所 | 圧力検出器 |
US4136603A (en) * | 1977-11-14 | 1979-01-30 | The Foxboro Company | Diaphragm assembly |
US4434203A (en) * | 1980-10-27 | 1984-02-28 | Setra Systems, Inc. | Diaphragm |
US4358814A (en) * | 1980-10-27 | 1982-11-09 | Setra Systems, Inc. | Capacitive pressure sensor |
US5279163A (en) * | 1986-02-28 | 1994-01-18 | Antonio Nicholas F D | Sensor and transducer apparatus |
GB2188155B (en) * | 1986-03-21 | 1990-01-10 | Furness Controls Ltd | Pressure transducer |
US4800758A (en) * | 1986-06-23 | 1989-01-31 | Rosemount Inc. | Pressure transducer with stress isolation for hard mounting |
US4735090A (en) * | 1986-11-28 | 1988-04-05 | Honeywell Inc. | Flange mounted pressure transmitter |
US4785669A (en) * | 1987-05-18 | 1988-11-22 | Mks Instruments, Inc. | Absolute capacitance manometers |
US4823603A (en) * | 1988-05-03 | 1989-04-25 | Vacuum General, Inc. | Capacitance manometer having stress relief for fixed electrode |
US4977480A (en) * | 1988-09-14 | 1990-12-11 | Fuji Koki Mfg. Co., Ltd. | Variable-capacitance type sensor and variable-capacitance type sensor system using the same |
US5020377A (en) * | 1990-01-23 | 1991-06-04 | Kavlico Corporation | Low pressure transducer using metal foil diaphragm |
US5150275A (en) * | 1991-07-01 | 1992-09-22 | Setra Systems, Inc. | Capacitive pressure sensor |
US5155653A (en) * | 1991-08-14 | 1992-10-13 | Maclean-Fogg Company | Capacitive pressure sensor |
US5499533A (en) * | 1992-08-26 | 1996-03-19 | Miller; Mark | Downhole pressure gauge converter |
US5442962A (en) * | 1993-08-20 | 1995-08-22 | Setra Systems, Inc. | Capacitive pressure sensor having a pedestal supported electrode |
-
1998
- 1998-02-04 US US09/018,395 patent/US6029525A/en not_active Expired - Lifetime
-
1999
- 1999-01-11 JP JP2000530770A patent/JP3980270B2/ja not_active Expired - Lifetime
- 1999-01-11 WO PCT/US1999/000563 patent/WO1999040405A1/en active Application Filing
- 1999-01-11 DE DE69942087T patent/DE69942087D1/de not_active Expired - Lifetime
- 1999-01-11 EP EP99901426A patent/EP1053459B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1053459A1 (de) | 2000-11-22 |
EP1053459B1 (de) | 2010-03-03 |
JP2002502964A (ja) | 2002-01-29 |
JP3980270B2 (ja) | 2007-09-26 |
US6029525A (en) | 2000-02-29 |
WO1999040405A1 (en) | 1999-08-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |