DE69941192D1 - DISCHARGE DEVICE FOR CHEMICALS WITH VENTILATION SYSTEM USING VARIOUS BLEEDING TECHNIQUES - Google Patents

DISCHARGE DEVICE FOR CHEMICALS WITH VENTILATION SYSTEM USING VARIOUS BLEEDING TECHNIQUES

Info

Publication number
DE69941192D1
DE69941192D1 DE69941192T DE69941192T DE69941192D1 DE 69941192 D1 DE69941192 D1 DE 69941192D1 DE 69941192 T DE69941192 T DE 69941192T DE 69941192 T DE69941192 T DE 69941192T DE 69941192 D1 DE69941192 D1 DE 69941192D1
Authority
DE
Germany
Prior art keywords
chemicals
discharge device
ventilation system
various bleeding
bleeding techniques
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69941192T
Other languages
German (de)
Inventor
John N Gregg
Craig M Noah
Robert M Jackson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/105,423 external-priority patent/US6029718A/en
Priority claimed from PCT/US1998/014373 external-priority patent/WO1999002251A2/en
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Priority claimed from PCT/US1999/012648 external-priority patent/WO1999064780A1/en
Application granted granted Critical
Publication of DE69941192D1 publication Critical patent/DE69941192D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE69941192T 1998-06-08 1999-06-04 DISCHARGE DEVICE FOR CHEMICALS WITH VENTILATION SYSTEM USING VARIOUS BLEEDING TECHNIQUES Expired - Lifetime DE69941192D1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US8840598P 1998-06-08 1998-06-08
US09/105,423 US6029718A (en) 1997-07-11 1998-06-26 Chemical delivery system employing containment crate
US9119198P 1998-06-30 1998-06-30
PCT/US1998/014373 WO1999002251A2 (en) 1997-07-11 1998-07-10 Bulk chemical delivery system
US13393699P 1999-05-13 1999-05-13
US13458499P 1999-05-17 1999-05-17
PCT/US1999/012648 WO1999064780A1 (en) 1998-06-08 1999-06-04 Chemical delivery system having purge system utilizing multiple purge techniques

Publications (1)

Publication Number Publication Date
DE69941192D1 true DE69941192D1 (en) 2009-09-10

Family

ID=40937467

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69941192T Expired - Lifetime DE69941192D1 (en) 1998-06-08 1999-06-04 DISCHARGE DEVICE FOR CHEMICALS WITH VENTILATION SYSTEM USING VARIOUS BLEEDING TECHNIQUES

Country Status (2)

Country Link
JP (1) JP5227300B2 (en)
DE (1) DE69941192D1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102399396B1 (en) * 2021-09-27 2022-05-18 최용태 Gas supplying apparatus for semiconductor manufacturing apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05177126A (en) * 1991-10-17 1993-07-20 Furukawa Electric Co Ltd:The Harmful liquid supply apparatus
JP3122311B2 (en) * 1994-06-29 2001-01-09 東京エレクトロン株式会社 Apparatus for supplying liquid material to film forming chamber and method of using the same
JP3582118B2 (en) * 1994-12-22 2004-10-27 住友化学工業株式会社 Organic metal filling method
JPH09143740A (en) * 1995-11-22 1997-06-03 Tokyo Electron Ltd Cleaning method for treating gas supplying system
JP3601153B2 (en) * 1995-12-27 2004-12-15 東京エレクトロン株式会社 Cleaning method for processing gas supply device
JPH09298171A (en) * 1996-05-08 1997-11-18 Tokyo Electron Ltd Method and apparatus for supply of treatment gas
JPH1088349A (en) * 1996-09-18 1998-04-07 Anelva Corp Vapor phase growth system

Also Published As

Publication number Publication date
JP5227300B2 (en) 2013-07-03
JP2010123977A (en) 2010-06-03

Similar Documents

Publication Publication Date Title
DE69834947D1 (en) RAIL WARNING SYSTEM FOR PLANES
DE69901363T2 (en) Control system for automatic vehicle
DE59913374D1 (en) WIPER SYSTEM
DE69938245D1 (en) CONTROL SYSTEM FOR BATHS
DE69935602D1 (en) ADMINISTRATIVE SYSTEMS FOR PROTEIN SUBSTANCES USING MEMBRANE MIMETICS
DE69917997D1 (en) Tire pressure monitoring system
DE69723351D1 (en) Control unit for an irrigation system
DE69531585D1 (en) Hibernation system for network
DE69917364D1 (en) Control system for construction machines
DE69830932D1 (en) PART DISCHARGE MEASURING SYSTEM USING TOP CUTTING
DE59812663D1 (en) WIPER SYSTEM
DE69701157T2 (en) Tank ventilation system tank
DE69840366D1 (en) SYSTEM FOR TAKING PROGRAM
DE69941192D1 (en) DISCHARGE DEVICE FOR CHEMICALS WITH VENTILATION SYSTEM USING VARIOUS BLEEDING TECHNIQUES
DE59705940D1 (en) Extrusion device for tires
DE29802678U1 (en) Alarm system for vehicles
DE59909461D1 (en) Light unit for vehicles
DE69914047D1 (en) Drive system for small vehicle
ATE341739T1 (en) LIGHT UNIT FOR LIGHT LINE SYSTEM
DE29709702U1 (en) Device for monitoring vehicle groups
DE29608830U1 (en) Ventilation element for roofs
DE29811633U1 (en) Control device for lighting system
DE69928227D1 (en) VENTILATION SYSTEM FOR VEHICLE
DE69800916T2 (en) Traffic monitoring system
DE69806517D1 (en) WIPER SYSTEM

Legal Events

Date Code Title Description
8364 No opposition during term of opposition