DE69941192D1 - DISCHARGE DEVICE FOR CHEMICALS WITH VENTILATION SYSTEM USING VARIOUS BLEEDING TECHNIQUES - Google Patents
DISCHARGE DEVICE FOR CHEMICALS WITH VENTILATION SYSTEM USING VARIOUS BLEEDING TECHNIQUESInfo
- Publication number
- DE69941192D1 DE69941192D1 DE69941192T DE69941192T DE69941192D1 DE 69941192 D1 DE69941192 D1 DE 69941192D1 DE 69941192 T DE69941192 T DE 69941192T DE 69941192 T DE69941192 T DE 69941192T DE 69941192 D1 DE69941192 D1 DE 69941192D1
- Authority
- DE
- Germany
- Prior art keywords
- chemicals
- discharge device
- ventilation system
- various bleeding
- bleeding techniques
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US8840598P | 1998-06-08 | 1998-06-08 | |
US09/105,423 US6029718A (en) | 1997-07-11 | 1998-06-26 | Chemical delivery system employing containment crate |
US9119198P | 1998-06-30 | 1998-06-30 | |
PCT/US1998/014373 WO1999002251A2 (en) | 1997-07-11 | 1998-07-10 | Bulk chemical delivery system |
US13393699P | 1999-05-13 | 1999-05-13 | |
US13458499P | 1999-05-17 | 1999-05-17 | |
PCT/US1999/012648 WO1999064780A1 (en) | 1998-06-08 | 1999-06-04 | Chemical delivery system having purge system utilizing multiple purge techniques |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69941192D1 true DE69941192D1 (en) | 2009-09-10 |
Family
ID=40937467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69941192T Expired - Lifetime DE69941192D1 (en) | 1998-06-08 | 1999-06-04 | DISCHARGE DEVICE FOR CHEMICALS WITH VENTILATION SYSTEM USING VARIOUS BLEEDING TECHNIQUES |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5227300B2 (en) |
DE (1) | DE69941192D1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102399396B1 (en) * | 2021-09-27 | 2022-05-18 | 최용태 | Gas supplying apparatus for semiconductor manufacturing apparatus |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05177126A (en) * | 1991-10-17 | 1993-07-20 | Furukawa Electric Co Ltd:The | Harmful liquid supply apparatus |
JP3122311B2 (en) * | 1994-06-29 | 2001-01-09 | 東京エレクトロン株式会社 | Apparatus for supplying liquid material to film forming chamber and method of using the same |
JP3582118B2 (en) * | 1994-12-22 | 2004-10-27 | 住友化学工業株式会社 | Organic metal filling method |
JPH09143740A (en) * | 1995-11-22 | 1997-06-03 | Tokyo Electron Ltd | Cleaning method for treating gas supplying system |
JP3601153B2 (en) * | 1995-12-27 | 2004-12-15 | 東京エレクトロン株式会社 | Cleaning method for processing gas supply device |
JPH09298171A (en) * | 1996-05-08 | 1997-11-18 | Tokyo Electron Ltd | Method and apparatus for supply of treatment gas |
JPH1088349A (en) * | 1996-09-18 | 1998-04-07 | Anelva Corp | Vapor phase growth system |
-
1999
- 1999-06-04 DE DE69941192T patent/DE69941192D1/en not_active Expired - Lifetime
-
2009
- 2009-12-22 JP JP2009290994A patent/JP5227300B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP5227300B2 (en) | 2013-07-03 |
JP2010123977A (en) | 2010-06-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |