DE69931804D1 - Druckwandler mit einer siliziumkarbidenthaltenden membran und verfahren zu seiner herstellung - Google Patents
Druckwandler mit einer siliziumkarbidenthaltenden membran und verfahren zu seiner herstellungInfo
- Publication number
- DE69931804D1 DE69931804D1 DE69931804T DE69931804T DE69931804D1 DE 69931804 D1 DE69931804 D1 DE 69931804D1 DE 69931804 T DE69931804 T DE 69931804T DE 69931804 T DE69931804 T DE 69931804T DE 69931804 D1 DE69931804 D1 DE 69931804D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- silicon carbide
- pressure transducer
- containing membrane
- membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/141—Monolithic housings, e.g. molded or one-piece housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/003—Fluidic connecting means using a detachable interface or adapter between the process medium and the pressure gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49169—Assembling electrical component directly to terminal or elongated conductor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9814968A FR2786564B1 (fr) | 1998-11-27 | 1998-11-27 | Capteur de pression a membrane comportant du carbure de silicium et procede de fabrication |
FR9814968 | 1998-11-27 | ||
PCT/FR1999/002911 WO2000033044A1 (fr) | 1998-11-27 | 1999-11-25 | Capteur de pression a membrane comportant du carbure de silicium et procede de fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69931804D1 true DE69931804D1 (de) | 2006-07-20 |
DE69931804T2 DE69931804T2 (de) | 2007-06-14 |
Family
ID=9533271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69931804T Expired - Lifetime DE69931804T2 (de) | 1998-11-27 | 1999-11-25 | Druckwandler mit einer siliziumkarbidenthaltenden membran und verfahren zu seiner herstellung |
Country Status (5)
Country | Link |
---|---|
US (2) | US6688181B1 (de) |
EP (1) | EP1133683B1 (de) |
DE (1) | DE69931804T2 (de) |
FR (1) | FR2786564B1 (de) |
WO (1) | WO2000033044A1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1261427B1 (de) * | 2000-03-02 | 2011-03-02 | Microchips, Inc. | Mikromechanische geräte und verfahren zur speicherung und zur selektiven exposition von chemikalien |
DE60332094D1 (de) * | 2002-02-22 | 2010-05-27 | Masimo Corp | Aktive pulsspektrophotometrie |
US6790699B2 (en) | 2002-07-10 | 2004-09-14 | Robert Bosch Gmbh | Method for manufacturing a semiconductor device |
DE10260105A1 (de) | 2002-12-19 | 2004-07-01 | Robert Bosch Gmbh | Drucksensor |
US7754497B2 (en) | 2003-08-29 | 2010-07-13 | Reverse Proteomics Research Institute Co., Ltd. | Method for immobilizing proteins |
DE10342487A1 (de) * | 2003-09-15 | 2005-04-07 | Robert Bosch Gmbh | Glühstiftkerze mit als Drucksensor ausgebildetem Glühstift |
DE102004020914B4 (de) * | 2004-04-28 | 2008-05-29 | Max Frank Gmbh & Co Kg | Kragplattenanschlusselement |
DE102004021041A1 (de) * | 2004-04-29 | 2005-11-24 | Robert Bosch Gmbh | Kombinierter Absolutdruck- und Relativdrucksensor |
DE102005005354A1 (de) * | 2005-02-05 | 2006-08-10 | Bosch Rexroth Aktiengesellschaft | Kraftmessvorrichtung und Dehnungsmesselement |
US7628309B1 (en) | 2005-05-03 | 2009-12-08 | Rosemount Aerospace Inc. | Transient liquid phase eutectic bonding |
US7538401B2 (en) * | 2005-05-03 | 2009-05-26 | Rosemount Aerospace Inc. | Transducer for use in harsh environments |
US20070013014A1 (en) * | 2005-05-03 | 2007-01-18 | Shuwen Guo | High temperature resistant solid state pressure sensor |
DE102006046224A1 (de) * | 2006-09-29 | 2008-04-03 | Siemens Ag | Mikro-elektro-mechanischer System (MEMS) Sensor für extreme Umgebungsbedingungen |
DE602007012995D1 (de) * | 2007-01-31 | 2011-04-21 | Infineon Technologies Ag | Mikromechanischer Drucksensor |
KR100997788B1 (ko) * | 2008-06-30 | 2010-12-02 | 주식회사 하이닉스반도체 | 반도체 패키지 |
DE102009058930B4 (de) * | 2009-12-17 | 2011-11-10 | Pierburg Gmbh | Ventilvorrichtung für Verbrennungskraftmaschinen |
JP5877248B2 (ja) * | 2012-10-17 | 2016-03-02 | 株式会社鷺宮製作所 | 圧力センサおよび、それを備えるセンサユニット |
FR3043196B1 (fr) | 2015-10-30 | 2020-10-02 | Commissariat Energie Atomique | Dispositif de mesure de caracteristique d'un fluide |
BE1026684B1 (fr) * | 2018-10-05 | 2020-05-07 | Safran Aero Boosters Sa | Pièce de machine d’aéronef intégrant au moins un capteur de pression |
JP2021025957A (ja) * | 2019-08-08 | 2021-02-22 | アズビル株式会社 | 圧力センサ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4706100A (en) | 1986-08-01 | 1987-11-10 | Honeywell Inc. | High temperature hetero-epitaxial pressure sensor |
JPH0731091B2 (ja) * | 1987-05-27 | 1995-04-10 | 日本碍子株式会社 | 歪検出器 |
JPH01182729A (ja) * | 1988-01-16 | 1989-07-20 | Ngk Insulators Ltd | 圧力センサ |
US5095401A (en) * | 1989-01-13 | 1992-03-10 | Kopin Corporation | SOI diaphragm sensor |
US4984635A (en) * | 1989-11-16 | 1991-01-15 | Mobil Oil Corporation | Thermal barriers for enhanced oil recovery |
US5230248A (en) * | 1991-07-12 | 1993-07-27 | Rosemount Inc. | Corrosion resistant isolator |
FR2681472B1 (fr) * | 1991-09-18 | 1993-10-29 | Commissariat Energie Atomique | Procede de fabrication de films minces de materiau semiconducteur. |
US5549006A (en) * | 1994-05-24 | 1996-08-27 | Kulite Semiconductor Products, Inc. | Temperature compensated silicon carbide pressure transducer and method for making the same |
DE19601791A1 (de) * | 1996-01-19 | 1997-07-24 | Bosch Gmbh Robert | Sensor mit einer Membran und Verfahren zur Herstellung eines Sensors mit einer Membran |
-
1998
- 1998-11-27 FR FR9814968A patent/FR2786564B1/fr not_active Expired - Fee Related
-
1999
- 1999-11-25 US US09/831,911 patent/US6688181B1/en not_active Expired - Fee Related
- 1999-11-25 EP EP99956145A patent/EP1133683B1/de not_active Expired - Lifetime
- 1999-11-25 DE DE69931804T patent/DE69931804T2/de not_active Expired - Lifetime
- 1999-11-25 WO PCT/FR1999/002911 patent/WO2000033044A1/fr active IP Right Grant
-
2003
- 2003-10-16 US US10/685,526 patent/US6782757B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1133683A1 (de) | 2001-09-19 |
WO2000033044A1 (fr) | 2000-06-08 |
EP1133683B1 (de) | 2006-06-07 |
US6688181B1 (en) | 2004-02-10 |
DE69931804T2 (de) | 2007-06-14 |
US20040079163A1 (en) | 2004-04-29 |
FR2786564B1 (fr) | 2001-04-13 |
FR2786564A1 (fr) | 2000-06-02 |
US6782757B2 (en) | 2004-08-31 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |