DE69925434D1 - Gasdichte Reaktionsgaseinlassvorrichtung eines Ofens zur Gasphaseninfiltration bzw. -Beschichtung - Google Patents
Gasdichte Reaktionsgaseinlassvorrichtung eines Ofens zur Gasphaseninfiltration bzw. -BeschichtungInfo
- Publication number
- DE69925434D1 DE69925434D1 DE69925434T DE69925434T DE69925434D1 DE 69925434 D1 DE69925434 D1 DE 69925434D1 DE 69925434 T DE69925434 T DE 69925434T DE 69925434 T DE69925434 T DE 69925434T DE 69925434 D1 DE69925434 D1 DE 69925434D1
- Authority
- DE
- Germany
- Prior art keywords
- gas
- furnace
- coating
- inlet device
- phase infiltration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US178432 | 1998-10-28 | ||
US09/178,432 US6162298A (en) | 1998-10-28 | 1998-10-28 | Sealed reactant gas inlet for a CVI/CVD furnace |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69925434D1 true DE69925434D1 (de) | 2005-06-30 |
DE69925434T2 DE69925434T2 (de) | 2006-02-02 |
Family
ID=22652535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69925434T Expired - Lifetime DE69925434T2 (de) | 1998-10-28 | 1999-10-19 | Gasdichte Reaktionsgaseinlassvorrichtung eines Ofens zur Gasphaseninfiltration bzw. -Beschichtung |
Country Status (3)
Country | Link |
---|---|
US (1) | US6162298A (de) |
EP (1) | EP0997553B1 (de) |
DE (1) | DE69925434T2 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6352430B1 (en) | 1998-10-23 | 2002-03-05 | Goodrich Corporation | Method and apparatus for cooling a CVI/CVD furnace |
EP1063319B1 (de) * | 1999-06-04 | 2005-12-07 | Goodrich Corporation | Verfahren und Vorrichtung zum Kühlen von einem CVI/CVD-Ofen |
FR2818442B1 (fr) * | 2000-12-20 | 2003-10-17 | Energy Systems Internat Bv | Dispositif photovoltaique formant vitrage |
US6758909B2 (en) * | 2001-06-05 | 2004-07-06 | Honeywell International Inc. | Gas port sealing for CVD/CVI furnace hearth plates |
US7067214B2 (en) * | 2003-10-27 | 2006-06-27 | Utc Fuel Cells, Llc | PEM fuel cell stack assembly with isolated internal coolant manifold |
EP1700335A1 (de) * | 2003-12-22 | 2006-09-13 | Adaptive Plasma Technology Corporation | Verfahren zum einrichten einer plasmakammer mit einer adaptiven plasmaquelle, plasmaätzverfahren damit und herstellungsverfahren für eine adaptive plasmaquelle |
US7745764B2 (en) * | 2005-12-07 | 2010-06-29 | Ajax Tocco Magnethermic Corporation | Method and apparatus for controlling furnace position in response to thermal expansion |
US7811085B2 (en) * | 2006-05-04 | 2010-10-12 | Honeywell International Inc. | Gas preheater for chemical vapor processing furnace |
US7771194B2 (en) * | 2006-05-26 | 2010-08-10 | Honeywell International Inc. | Gas preheater for chemical vapor processing furnace having circuitous passages |
US20080232424A1 (en) * | 2007-03-23 | 2008-09-25 | Honeywell International Inc. | Hearth plate including side walls defining a processing volume |
JP5029382B2 (ja) * | 2008-01-22 | 2012-09-19 | 東京エレクトロン株式会社 | 処理装置及び処理方法 |
US10655219B1 (en) * | 2009-04-14 | 2020-05-19 | Goodrich Corporation | Containment structure for creating composite structures |
US10689753B1 (en) * | 2009-04-21 | 2020-06-23 | Goodrich Corporation | System having a cooling element for densifying a substrate |
FI124673B (en) * | 2012-12-19 | 2014-11-28 | Outotec Oyj | Method of sealing the grooves in a contact groove and sealing arrangement |
FR3018526B1 (fr) * | 2014-03-14 | 2021-06-11 | Herakles | Installation de densification cvi comprenant une zone de prechauffage a forte capacite |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2117933A1 (de) * | 1971-04-14 | 1972-10-19 | Siemens Ag | Verfahren zum Herstellen von Hohlkörpern aus Halbleitermaterial von beliebiger Länge |
US3995187A (en) * | 1971-09-07 | 1976-11-30 | Telic Corporation | Electrode type glow discharge apparatus |
US4031424A (en) * | 1971-09-07 | 1977-06-21 | Telic Corporation | Electrode type glow discharge apparatus |
US3884793A (en) * | 1971-09-07 | 1975-05-20 | Telic Corp | Electrode type glow discharge apparatus |
US4030996A (en) * | 1971-09-07 | 1977-06-21 | Telic Corporation | Electrode type glow discharge method and apparatus |
US4147571A (en) * | 1977-07-11 | 1979-04-03 | Hewlett-Packard Company | Method for vapor epitaxial deposition of III/V materials utilizing organometallic compounds and a halogen or halide in a hot wall system |
FR2490246A1 (fr) * | 1980-09-17 | 1982-03-19 | Cit Alcatel | Dispositif de deposition chimique activee sous plasma |
US5244500A (en) * | 1983-10-05 | 1993-09-14 | Toshiba Kikai Kabushiki Kaisha | Process control system of semiconductor vapor phase growth apparatus |
US4573431A (en) * | 1983-11-16 | 1986-03-04 | Btu Engineering Corporation | Modular V-CVD diffusion furnace |
US4606650A (en) * | 1984-11-26 | 1986-08-19 | Domtar Inc. | Microwave, a closed vessel and methods of determining volatile material content |
US5073241A (en) * | 1986-01-31 | 1991-12-17 | Kabushiki Kaisha Meidenshae | Method for carbon film production |
JPS6312128A (ja) * | 1986-03-20 | 1988-01-19 | Toshiba Mach Co Ltd | バレル型気相成長装置 |
US4900525A (en) * | 1986-08-25 | 1990-02-13 | Gte Laboratories Incorporated | Chemical vapor deposition reactor for producing metal carbide or nitride whiskers |
US4854266A (en) * | 1987-11-02 | 1989-08-08 | Btu Engineering Corporation | Cross-flow diffusion furnace |
US4993358A (en) * | 1989-07-28 | 1991-02-19 | Watkins-Johnson Company | Chemical vapor deposition reactor and method of operation |
JP2626925B2 (ja) * | 1990-05-23 | 1997-07-02 | 三菱電機株式会社 | 基板処理装置および基板処理方法 |
CA2089149C (en) * | 1990-08-10 | 2002-11-26 | Eric R. Dickey | Shielding for arc suppression in rotating magnetron sputtering systems |
US5625170A (en) * | 1994-01-18 | 1997-04-29 | Nanometrics Incorporated | Precision weighing to monitor the thickness and uniformity of deposited or etched thin film |
US5480678A (en) * | 1994-11-16 | 1996-01-02 | The B. F. Goodrich Company | Apparatus for use with CVI/CVD processes |
CN1171137A (zh) * | 1994-11-16 | 1998-01-21 | B·F·谷德里奇公司 | 压力梯度化学蒸汽渗透和沉积的设备及工艺和制品 |
US6039812A (en) * | 1996-10-21 | 2000-03-21 | Abb Research Ltd. | Device for epitaxially growing objects and method for such a growth |
US5954881A (en) * | 1997-01-28 | 1999-09-21 | Northrop Grumman Corporation | Ceiling arrangement for an epitaxial growth reactor |
US6062851A (en) * | 1998-10-23 | 2000-05-16 | The B. F. Goodrich Company | Combination CVI/CVD and heat treat susceptor lid |
-
1998
- 1998-10-28 US US09/178,432 patent/US6162298A/en not_active Expired - Lifetime
-
1999
- 1999-10-19 EP EP99120708A patent/EP0997553B1/de not_active Expired - Lifetime
- 1999-10-19 DE DE69925434T patent/DE69925434T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0997553A1 (de) | 2000-05-03 |
EP0997553B1 (de) | 2005-05-25 |
US6162298A (en) | 2000-12-19 |
DE69925434T2 (de) | 2006-02-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |