DE69911661D1 - Titan-eindiffundierte wellenleiter - Google Patents

Titan-eindiffundierte wellenleiter

Info

Publication number
DE69911661D1
DE69911661D1 DE69911661T DE69911661T DE69911661D1 DE 69911661 D1 DE69911661 D1 DE 69911661D1 DE 69911661 T DE69911661 T DE 69911661T DE 69911661 T DE69911661 T DE 69911661T DE 69911661 D1 DE69911661 D1 DE 69911661D1
Authority
DE
Germany
Prior art keywords
wave guide
titanium diffused
diffused wave
titanium
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69911661T
Other languages
English (en)
Other versions
DE69911661T2 (de
Inventor
J Burrows
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
California Institute of Technology CalTech
Original Assignee
California Institute of Technology CalTech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by California Institute of Technology CalTech filed Critical California Institute of Technology CalTech
Publication of DE69911661D1 publication Critical patent/DE69911661D1/de
Application granted granted Critical
Publication of DE69911661T2 publication Critical patent/DE69911661T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/16—Oxides
    • C30B29/22—Complex oxides
    • C30B29/30—Niobates; Vanadates; Tantalates
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1345—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion exchange
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/07—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 buffer layer
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/20—LiNbO3, LiTaO3

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Organic Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Optical Integrated Circuits (AREA)
DE69911661T 1999-10-15 1999-11-10 Titan-eindiffundierte wellenleiter Expired - Fee Related DE69911661T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/419,349 US6567598B1 (en) 1998-05-11 1999-10-15 Titanium-indiffusion waveguides
US419349 1999-10-15
PCT/US1999/026661 WO2001029595A1 (en) 1999-10-15 1999-11-10 Titanium-indiffusion waveguides

Publications (2)

Publication Number Publication Date
DE69911661D1 true DE69911661D1 (de) 2003-10-30
DE69911661T2 DE69911661T2 (de) 2004-07-08

Family

ID=23661877

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69911661T Expired - Fee Related DE69911661T2 (de) 1999-10-15 1999-11-10 Titan-eindiffundierte wellenleiter

Country Status (5)

Country Link
US (1) US6567598B1 (de)
EP (1) EP1224492B1 (de)
AU (1) AU2344700A (de)
DE (1) DE69911661T2 (de)
WO (1) WO2001029595A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6625368B1 (en) * 1999-10-15 2003-09-23 California Institute Of Technology Titanium-indiffusion waveguides and methods of fabrication
WO2005019913A1 (ja) 2003-08-21 2005-03-03 Ngk Insulators, Ltd. 光導波路デバイスおよび進行波形光変調器
JP4063190B2 (ja) * 2003-10-16 2008-03-19 住友金属鉱山株式会社 タンタル酸リチウム基板の製造方法
JP2005181757A (ja) * 2003-12-19 2005-07-07 Advantest Corp マッハ・ツェンダー干渉計、光結合器及び光結合器の製造方法
JP5386841B2 (ja) * 2008-03-24 2014-01-15 住友大阪セメント株式会社 光変調器
CN110286146B (zh) * 2019-06-18 2020-09-25 北京航空航天大学 一种具有液面探测功能的铌酸锂基片夹具及质子交换方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4196963A (en) 1978-05-30 1980-04-08 Hughes Aircraft Company Method for eliminating Li2 O out-diffusion in LiNbO3 and LiTaO3 waveguide structures
US4640736A (en) 1980-10-02 1987-02-03 Xerox Corporation Wave guide fabrication method
US5055169A (en) * 1989-03-17 1991-10-08 The United States Of America As Represented By The Secretary Of The Army Method of making mixed metal oxide coated substrates
US5064684A (en) 1989-08-02 1991-11-12 Eastman Kodak Company Waveguides, interferometers, and methods of their formation
US5193136A (en) 1989-10-27 1993-03-09 Litton Systems, Inc. Process for making multifunction integrated optics chips having high electro-optic coefficients
US5095518A (en) 1990-08-10 1992-03-10 The Board Of Trustees Of The Leland Stanford Junior University Integrated optical waveguide utilizing zinc oxide diffused into congruent and magnesium oxide doped lithium niobate crystals
US5442719A (en) 1993-07-21 1995-08-15 Litton Systems, Inc., A Delaware Corporation Electro-optic waveguides and phase modulators and methods for making them
CA2133300C (en) * 1993-11-01 1999-04-27 Hirotoshi Nagata Optical waveguide device
US5436992A (en) * 1994-10-18 1995-07-25 National Science Council Lithium niobate optical TE-TM mode splitter
WO1996024869A1 (de) * 1995-02-07 1996-08-15 Ldt Gmbh & Co. Laser-Display-Technologie Kg Verbindungsaufspalter aus streifen-wellenleitern und verwendungen
US6770132B1 (en) 1998-05-11 2004-08-03 California Institute Of Technology Method for pressurized annealing of lithium niobate and resulting lithium niobate structures
US6185355B1 (en) * 1998-09-01 2001-02-06 Henry H. Hung Process for making high yield, DC stable proton exchanged waveguide for active integrated optic devices
US6195191B1 (en) * 1999-08-19 2001-02-27 Lucent Technologies, Inc. Optical devices having improved temperature stability

Also Published As

Publication number Publication date
EP1224492B1 (de) 2003-09-24
US6567598B1 (en) 2003-05-20
WO2001029595A1 (en) 2001-04-26
DE69911661T2 (de) 2004-07-08
AU2344700A (en) 2001-04-30
EP1224492A1 (de) 2002-07-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee