DE69841741D1 - VERFAHREN ZUR HERSTELLUNG VON GESCHMOLZENES SiO2-TiO2 GLAS - Google Patents

VERFAHREN ZUR HERSTELLUNG VON GESCHMOLZENES SiO2-TiO2 GLAS

Info

Publication number
DE69841741D1
DE69841741D1 DE69841741T DE69841741T DE69841741D1 DE 69841741 D1 DE69841741 D1 DE 69841741D1 DE 69841741 T DE69841741 T DE 69841741T DE 69841741 T DE69841741 T DE 69841741T DE 69841741 D1 DE69841741 D1 DE 69841741D1
Authority
DE
Germany
Prior art keywords
sio2
melted
preparing
tio2 glass
tio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69841741T
Other languages
English (en)
Inventor
James E Maxon
Robert S Pavlik
Daniel R Sempolinski
Michael H Wasilewski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Application granted granted Critical
Publication of DE69841741D1 publication Critical patent/DE69841741D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1476—Means for heating during or immediately prior to deposition
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C03B2207/52—Linear array of like burners

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
DE69841741T 1997-09-24 1998-08-31 VERFAHREN ZUR HERSTELLUNG VON GESCHMOLZENES SiO2-TiO2 GLAS Expired - Lifetime DE69841741D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US5985997P 1997-09-24 1997-09-24
PCT/US1998/018067 WO1999015468A1 (en) 1997-09-24 1998-08-31 FUSED SiO2-TiO2 GLASS METHOD

Publications (1)

Publication Number Publication Date
DE69841741D1 true DE69841741D1 (de) 2010-08-05

Family

ID=22025746

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69841741T Expired - Lifetime DE69841741D1 (de) 1997-09-24 1998-08-31 VERFAHREN ZUR HERSTELLUNG VON GESCHMOLZENES SiO2-TiO2 GLAS

Country Status (5)

Country Link
EP (1) EP1030822B1 (de)
JP (1) JP4108926B2 (de)
KR (1) KR100574123B1 (de)
DE (1) DE69841741D1 (de)
WO (1) WO1999015468A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI114548B (fi) * 1999-10-19 2004-11-15 Liekki Oy Menetelmä materiaalin värjäämiseksi
EP1283819A1 (de) * 2000-05-25 2003-02-19 Corning Incorporated Verfahren zur herstellung einer vorform aus mit titandioxid dotiertem geschmolzenem siliciumdioxid
US6988378B1 (en) 2000-07-27 2006-01-24 Corning Incorporated Light weight porous structure
US6387511B1 (en) 2000-07-27 2002-05-14 Corning Incorporated Light weight porous structure
US6776006B2 (en) * 2000-10-13 2004-08-17 Corning Incorporated Method to avoid striae in EUV lithography mirrors
JP2004516214A (ja) * 2000-12-21 2004-06-03 コーニング インコーポレイテッド 溶融シリカ製造炉のための耐火物
US8047023B2 (en) 2001-04-27 2011-11-01 Corning Incorporated Method for producing titania-doped fused silica glass
JP4792705B2 (ja) * 2003-04-03 2011-10-12 旭硝子株式会社 ＴｉＯ２を含有するシリカガラスおよびその製造法
JP4792706B2 (ja) * 2003-04-03 2011-10-12 旭硝子株式会社 ＴｉＯ２を含有するシリカガラスおよびその製造方法
JPWO2004092082A1 (ja) * 2003-04-11 2006-07-06 株式会社ニコン ＳｉＯ２−ＴｉＯ２系ガラスの製造方法、ＳｉＯ２−ＴｉＯ２系ガラス及び露光装置
TW200940472A (en) 2007-12-27 2009-10-01 Asahi Glass Co Ltd TiO2-containing silica glass
JPWO2012105513A1 (ja) 2011-01-31 2014-07-03 旭硝子株式会社 チタニアを含有するシリカガラス体の製造方法およびチタニアを含有するシリカガラス体
JP5992842B2 (ja) * 2013-01-24 2016-09-14 信越石英株式会社 シリカチタニアガラスの製造方法及びシリカチタニアガラスの選別方法
EP3002262B1 (de) 2014-10-01 2018-06-27 Heraeus Quarzglas GmbH & Co. KG Verfahren zur Herstellung von synthetischem Quarzglas mittels einer polymerisierbaren Polyalkylsiloxanverbindung
US10604437B2 (en) 2014-10-20 2020-03-31 Navus Automation, Inc. Fused silica furnace system and method for continuous production of fused silica
EP3034476A1 (de) 2014-12-16 2016-06-22 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von synthetischem quarzglas unter verwendung einer reinigungsvorrichtung
EP3059212A1 (de) 2015-02-18 2016-08-24 Heraeus Quarzglas GmbH & Co. KG Verfahren und vorrichtung zur herstellung von quarzglas aus einer polymerisierbaren polyalkylsiloxanverbindung mit membranfilter als reinigungsvorrichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
US5152819A (en) * 1990-08-16 1992-10-06 Corning Incorporated Method of making fused silica
US5154744A (en) * 1991-08-26 1992-10-13 Corning Incorporated Method of making titania-doped fused silica
US5332702A (en) * 1993-04-16 1994-07-26 Corning Incorporated Low sodium zircon refractory and fused silica process
US5558687A (en) * 1994-12-30 1996-09-24 Corning Incorporated Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds
US5632797A (en) * 1994-12-30 1997-05-27 Corning Incorporated Method of providing vaporized halide-free, silicon-containing compounds
JP2000505036A (ja) * 1996-02-21 2000-04-25 コーニング インコーポレイテッド 純粋な溶融シリカ、炉および方法

Also Published As

Publication number Publication date
JP2001517597A (ja) 2001-10-09
WO1999015468A1 (en) 1999-04-01
EP1030822A1 (de) 2000-08-30
JP4108926B2 (ja) 2008-06-25
KR100574123B1 (ko) 2006-04-25
EP1030822A4 (de) 2004-12-15
KR20010024261A (ko) 2001-03-26
EP1030822B1 (de) 2010-06-23

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