DE69841095D1 - Kapazitives verfahren und vorrichtung zur druckmessung - Google Patents

Kapazitives verfahren und vorrichtung zur druckmessung

Info

Publication number
DE69841095D1
DE69841095D1 DE69841095T DE69841095T DE69841095D1 DE 69841095 D1 DE69841095 D1 DE 69841095D1 DE 69841095 T DE69841095 T DE 69841095T DE 69841095 T DE69841095 T DE 69841095T DE 69841095 D1 DE69841095 D1 DE 69841095D1
Authority
DE
Germany
Prior art keywords
pressure measurement
capacitive method
capacitive
measurement
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69841095T
Other languages
English (en)
Inventor
Wayne C Haase
Paul M Chizinski
Leonid Mindlin
Kerry S Lahey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE69841095D1 publication Critical patent/DE69841095D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
DE69841095T 1997-04-10 1998-03-30 Kapazitives verfahren und vorrichtung zur druckmessung Expired - Lifetime DE69841095D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/835,668 US5942692A (en) 1997-04-10 1997-04-10 Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals
PCT/US1998/006238 WO1998045675A1 (en) 1997-04-10 1998-03-30 Capacitive pressure sensing method and apparatus

Publications (1)

Publication Number Publication Date
DE69841095D1 true DE69841095D1 (de) 2009-10-08

Family

ID=25270145

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69841095T Expired - Lifetime DE69841095D1 (de) 1997-04-10 1998-03-30 Kapazitives verfahren und vorrichtung zur druckmessung

Country Status (7)

Country Link
US (1) US5942692A (de)
EP (1) EP0974043B1 (de)
JP (1) JP3578774B2 (de)
KR (1) KR100426461B1 (de)
DE (1) DE69841095D1 (de)
TW (1) TW434402B (de)
WO (1) WO1998045675A1 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
JP3566178B2 (ja) * 2000-04-05 2004-09-15 ティーエスコーポレーション株式会社 圧力検出装置
US6782754B1 (en) 2000-07-07 2004-08-31 Rosemount, Inc. Pressure transmitter for clean environments
JP4342122B2 (ja) * 2001-06-01 2009-10-14 株式会社豊田中央研究所 静電容量型物理量センサと検出装置
US6687635B2 (en) * 2002-06-13 2004-02-03 Mks Instruments, Inc. Apparatus and method for compensated sensor output
US6828802B2 (en) * 2002-08-16 2004-12-07 Rosemount Inc. Pressure measurement device including a capacitive sensor in an amplifier feedback path
US6837112B2 (en) * 2003-03-22 2005-01-04 Stec Inc. Capacitance manometer having a relatively thick flush diaphragm under tension to provide low hysteresis
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US8097134B2 (en) * 2004-04-01 2012-01-17 Nanyang Technological University Addressable chem/bio chip array
US7347099B2 (en) * 2004-07-16 2008-03-25 Rosemount Inc. Pressure transducer with external heater
US7204150B2 (en) * 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
US7679033B2 (en) 2005-09-29 2010-03-16 Rosemount Inc. Process field device temperature control
WO2007061172A1 (en) 2005-11-28 2007-05-31 Atlab Inc. Time to digital converting circuit and pressure sensing device using the same
KR100725894B1 (ko) * 2005-11-28 2007-06-08 주식회사 애트랩 압력센서 및 압력 측정 방법
US7451654B2 (en) 2006-08-09 2008-11-18 Mks Instruments, Inc. Constant power dissipation in capacitance pressure transducers
US7706995B2 (en) 2007-04-16 2010-04-27 Mks Instr Inc Capacitance manometers and methods relating to auto-drift correction
US7779698B2 (en) * 2007-11-08 2010-08-24 Rosemount Inc. Pressure sensor
US7784366B2 (en) * 2008-07-29 2010-08-31 Motorola, Inc. Single sided capacitive force sensor for electronic devices
TWI372570B (en) * 2009-12-25 2012-09-11 Ind Tech Res Inst Capacitive sensor and manufacturing method thereof
DE112011100416T5 (de) 2010-02-02 2012-12-06 Mks Instruments Inc. Kapazitiver Drucksensor
JP5855441B2 (ja) * 2011-01-07 2016-02-09 北陸電気工業株式会社 力センサユニット
SG11201400940WA (en) 2011-09-29 2014-04-28 Mks Instr Inc Capacitive pressure sensor with improved electrode structure
US8887575B2 (en) 2011-10-11 2014-11-18 Mks Instruments, Inc. Pressure sensor
JP6178424B2 (ja) 2012-11-14 2017-08-09 ヴェクトリアス メディカル テクノロジーズ リミテッド 埋め込み型静電容量ベース圧力変換器のためのドリフト補償
US9562820B2 (en) 2013-02-28 2017-02-07 Mks Instruments, Inc. Pressure sensor with real time health monitoring and compensation
US10205488B2 (en) 2013-04-18 2019-02-12 Vectorious Medical Technologies Ltd. Low-power high-accuracy clock harvesting in inductive coupling systems
WO2017115112A1 (en) 2015-12-30 2017-07-06 Vectorious Medical Technologies Ltd. Power-efficient pressure-sensor implant
JP6386535B2 (ja) 2013-04-18 2018-09-05 ヴェクトリアス メディカル テクノロジーズ リミテッド 遠隔電源供給される検知用インプラント
WO2016178197A1 (en) 2015-05-07 2016-11-10 Vectorious Medical Technologies Ltd Deploying and fixating an implant across an organ wall
US10054507B2 (en) * 2016-04-06 2018-08-21 City University Of Hong Kong Electric device for detecting pressure
DE102018105234B4 (de) 2018-03-07 2020-08-20 Ifm Electronic Gmbh Verfahren zum Betreiben eines kapazitiven Druckmessgeräts
EP3969865A4 (de) * 2019-05-15 2023-01-25 Sumitomo (Shi) Cryogenics of America, Inc. Brückenspannungsinversionsschaltung für vakuummeter und drucksensor mit der spannungsinversionsschaltung
JP2020190468A (ja) * 2019-05-22 2020-11-26 株式会社堀場エステック 圧力測定装置
US11287342B2 (en) 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2178471A (en) * 1937-05-24 1939-10-31 Philips Nv Device for oscillographing
US3497801A (en) * 1967-02-23 1970-02-24 Schwien Eng Inc System for determining the difference in capacitance of two capacitors
US3783374A (en) * 1972-04-07 1974-01-01 Sundstrand Data Control Capacitance difference detector circuit
US3948102A (en) * 1974-07-31 1976-04-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Trielectrode capacitive pressure transducer
US4398426A (en) * 1981-07-02 1983-08-16 Kavlico Corporation Linear capacitive pressure transducer system
US4546651A (en) * 1984-04-02 1985-10-15 Hewlett-Packard Co. Transducer coupling
US4823603A (en) * 1988-05-03 1989-04-25 Vacuum General, Inc. Capacitance manometer having stress relief for fixed electrode
US5087866A (en) * 1991-05-22 1992-02-11 Lucas Industries Temperature compensating circuit for LVDT and control system
US5237285A (en) * 1991-10-18 1993-08-17 Rosemount Inc. Method and apparatus for capacitance temperature compensation and manufacturability in a dual plate capacitive pressure transmitter
US5233875A (en) * 1992-05-04 1993-08-10 Kavlico Corporation Stable capacitive pressure transducer system
US5571970A (en) * 1993-03-30 1996-11-05 Honda Motor Co., Ltd. Pressure sensor
US5656780A (en) * 1996-03-28 1997-08-12 Kavlico Corporation Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm

Also Published As

Publication number Publication date
JP2001519031A (ja) 2001-10-16
EP0974043A1 (de) 2000-01-26
US5942692A (en) 1999-08-24
EP0974043B1 (de) 2009-08-26
EP0974043A4 (de) 2002-05-02
JP3578774B2 (ja) 2004-10-20
KR20010006217A (ko) 2001-01-26
WO1998045675A1 (en) 1998-10-15
TW434402B (en) 2001-05-16
KR100426461B1 (ko) 2004-04-13

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