SG11201400940WA - Capacitive pressure sensor with improved electrode structure - Google Patents
Capacitive pressure sensor with improved electrode structureInfo
- Publication number
- SG11201400940WA SG11201400940WA SG11201400940WA SG11201400940WA SG11201400940WA SG 11201400940W A SG11201400940W A SG 11201400940WA SG 11201400940W A SG11201400940W A SG 11201400940WA SG 11201400940W A SG11201400940W A SG 11201400940WA SG 11201400940W A SG11201400940W A SG 11201400940WA
- Authority
- SG
- Singapore
- Prior art keywords
- pressure sensor
- electrode structure
- capacitive pressure
- improved electrode
- improved
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/248,521 US8561471B2 (en) | 2010-02-02 | 2011-09-29 | Capacitive pressure sensor with improved electrode structure |
| PCT/US2012/057797 WO2013049490A2 (en) | 2011-09-29 | 2012-09-28 | Capacitive pressure sensor with improved electrode structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201400940WA true SG11201400940WA (en) | 2014-04-28 |
Family
ID=47046859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201400940WA SG11201400940WA (en) | 2011-09-29 | 2012-09-28 | Capacitive pressure sensor with improved electrode structure |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP2761265B1 (en) |
| JP (1) | JP5997771B2 (en) |
| KR (1) | KR101588714B1 (en) |
| CN (1) | CN103998909B (en) |
| SG (1) | SG11201400940WA (en) |
| TW (1) | TWI568999B (en) |
| WO (1) | WO2013049490A2 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105387508A (en) * | 2015-11-25 | 2016-03-09 | 重庆市龙山金属材料有限公司 | Improved heat exchange enhanced floor heating system |
| DE102017109226A1 (en) * | 2017-04-28 | 2018-10-31 | Testo SE & Co. KGaA | Deep-frying oil and / or frying fat sensor for determining a frying oil and / or frying fat quality |
| DE102018131352A1 (en) * | 2018-12-07 | 2020-06-10 | Carl Freudenberg Kg | Sensor element with one-piece support and sensor body |
| DE102018222712A1 (en) * | 2018-12-21 | 2020-06-25 | Robert Bosch Gmbh | Micromechanical component for a capacitive pressure sensor device |
| CN110319971B (en) * | 2019-08-02 | 2024-04-23 | 上海振太仪表有限公司 | Measuring circuit for measuring pressure in bipolar capacitance type vacuum gauge |
| EP4058093A1 (en) | 2019-11-12 | 2022-09-21 | Fresenius Medical Care Deutschland GmbH | Blood treatment systems |
| CN110879111B (en) * | 2019-11-27 | 2021-07-27 | 中国科学院微电子研究所 | Flexible electrode supporting structure |
| CN110926662B (en) * | 2019-11-29 | 2022-02-08 | 中国科学院微电子研究所 | Thin film type capacitance sensor |
| CN114001858B (en) * | 2020-07-28 | 2024-04-05 | 中微半导体设备(上海)股份有限公司 | Capacitive film vacuum gauge, plasma reaction device and film preparation method |
| CN114964613B (en) * | 2022-08-01 | 2022-11-08 | 季华实验室 | Capacitive film vacuum gauge capable of tensioning induction diaphragm |
| CN116429317B (en) * | 2023-06-09 | 2023-08-15 | 季华实验室 | Capacitive film vacuum gauge sensor, manufacturing method thereof and capacitive film vacuum gauge |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3195028A (en) * | 1961-02-13 | 1965-07-13 | Rosemount Eng Co Ltd | Capacitance pressure gage |
| US4499773A (en) | 1983-04-28 | 1985-02-19 | Dresser Industries, Inc. | Variable capacitance pressure transducer |
| US4785669A (en) | 1987-05-18 | 1988-11-22 | Mks Instruments, Inc. | Absolute capacitance manometers |
| US4823603A (en) | 1988-05-03 | 1989-04-25 | Vacuum General, Inc. | Capacitance manometer having stress relief for fixed electrode |
| US5271277A (en) | 1991-12-23 | 1993-12-21 | The Boc Group, Inc. | Capacitance pressure transducer |
| US5396803A (en) * | 1993-07-07 | 1995-03-14 | Tylan General, Inc. | Dual balanced capacitance manometers for suppressing vibration effects |
| US5625152A (en) | 1996-01-16 | 1997-04-29 | Mks Instruments, Inc. | Heated pressure transducer assembly |
| US5808206A (en) | 1996-01-16 | 1998-09-15 | Mks Instruments, Inc. | Heated pressure transducer assembly |
| SE9700612D0 (en) | 1997-02-20 | 1997-02-20 | Cecap Ab | Sensor element with integrated reference pressure |
| US5942692A (en) | 1997-04-10 | 1999-08-24 | Mks Instruments, Inc. | Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals |
| US5911162A (en) | 1997-06-20 | 1999-06-08 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
| US5965821A (en) | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
| US20040099061A1 (en) | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
| US6029525A (en) | 1998-02-04 | 2000-02-29 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
| US6568274B1 (en) | 1998-02-04 | 2003-05-27 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
| US6105436A (en) * | 1999-07-23 | 2000-08-22 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
| TW455678B (en) * | 1999-10-01 | 2001-09-21 | Mks Instr Inc | Improved capacitive based pressure sensor design |
| US6672171B2 (en) | 2001-07-16 | 2004-01-06 | Mks Instruments, Inc. | Combination differential and absolute pressure transducer for load lock control |
| US6993973B2 (en) | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
| US6909975B2 (en) | 2003-11-24 | 2005-06-21 | Mks Instruments, Inc. | Integrated absolute and differential pressure transducer |
| US7201057B2 (en) | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
| US7137301B2 (en) | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
| US7141447B2 (en) | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
| EP1658869A1 (en) * | 2004-11-17 | 2006-05-24 | Fresenius Medical Care Deutschland GmbH | Membrane unit, housing of a pressure measuring unit and pressure measuring unit |
| US7000479B1 (en) | 2005-05-02 | 2006-02-21 | Mks Instruments, Inc. | Heated pressure transducer |
| WO2008021178A2 (en) | 2006-08-09 | 2008-02-21 | Mks Instruments, Inc. | Constant power dissipation in capacitance pressure transducers |
| US7383737B1 (en) * | 2007-03-29 | 2008-06-10 | Delphi Technologies, Inc | Capacitive pressure sensor |
| US7706995B2 (en) | 2007-04-16 | 2010-04-27 | Mks Instr Inc | Capacitance manometers and methods relating to auto-drift correction |
| US7757563B2 (en) | 2008-04-10 | 2010-07-20 | Mks Instruments, Inc. | Capacitance manometers and methods of making same |
-
2012
- 2012-09-28 KR KR1020147011428A patent/KR101588714B1/en active IP Right Grant
- 2012-09-28 CN CN201280057483.8A patent/CN103998909B/en active Active
- 2012-09-28 TW TW101135864A patent/TWI568999B/en active
- 2012-09-28 EP EP12775383.8A patent/EP2761265B1/en active Active
- 2012-09-28 SG SG11201400940WA patent/SG11201400940WA/en unknown
- 2012-09-28 JP JP2014533362A patent/JP5997771B2/en active Active
- 2012-09-28 WO PCT/US2012/057797 patent/WO2013049490A2/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| CN103998909A (en) | 2014-08-20 |
| KR20140078708A (en) | 2014-06-25 |
| TWI568999B (en) | 2017-02-01 |
| JP5997771B2 (en) | 2016-09-28 |
| EP2761265B1 (en) | 2019-11-06 |
| JP2014534417A (en) | 2014-12-18 |
| CN103998909B (en) | 2016-04-27 |
| KR101588714B1 (en) | 2016-01-26 |
| EP2761265A2 (en) | 2014-08-06 |
| WO2013049490A3 (en) | 2013-06-13 |
| TW201333439A (en) | 2013-08-16 |
| WO2013049490A2 (en) | 2013-04-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| SG11201400940WA (en) | Capacitive pressure sensor with improved electrode structure | |
| EP2573533A4 (en) | Capacitance-type sensor | |
| SG10201509452UA (en) | Pressure sensor | |
| GB2543984B (en) | Pressure sensor element with cap | |
| EP2846143A4 (en) | Pressure sensor | |
| GB2491503B (en) | Capacitive pressure sensor | |
| EP2751929A4 (en) | Proximity sensor | |
| EP2765888A4 (en) | Pressure sensing mat | |
| LU91791B1 (en) | Heating element operated as capacitive sensing electrode | |
| IL214999A0 (en) | Monitoring compliance using venous refill detection | |
| EP2833111A4 (en) | Capacitive sensor | |
| GB2509455B (en) | Dispenser with capacitive-based proximity sensor | |
| EP2924408A4 (en) | Pressure sensor | |
| EP2717344A4 (en) | Lower electrode for piezoelectric element, and piezoelectric element provided with lower electrode | |
| GB201108342D0 (en) | Electrochemical sensors | |
| EP2706337C0 (en) | Capacitive pressure sensor | |
| EP2728302A4 (en) | Proximity sensor | |
| HUE048605T2 (en) | Pressure sensor | |
| HK1198800A1 (en) | Capacitive sensor | |
| HUE054158T2 (en) | Capacitive distance sensor | |
| EP2749841A4 (en) | Displacement monitoring electrode structure | |
| EP2591551A4 (en) | A multi purpose capacitive sensor | |
| EP2818841A4 (en) | Pressure sensor | |
| EP2795304A4 (en) | Electrochemical sensors | |
| PT2805222T (en) | Capacitive proximity sensor |