DE69838006T2 - Beschichtungsvorrichtung - Google Patents
Beschichtungsvorrichtung Download PDFInfo
- Publication number
- DE69838006T2 DE69838006T2 DE69838006T DE69838006T DE69838006T2 DE 69838006 T2 DE69838006 T2 DE 69838006T2 DE 69838006 T DE69838006 T DE 69838006T DE 69838006 T DE69838006 T DE 69838006T DE 69838006 T2 DE69838006 T2 DE 69838006T2
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- surface layer
- heating
- diamond
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims abstract description 98
- 239000000463 material Substances 0.000 claims abstract description 46
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 29
- 239000010432 diamond Substances 0.000 claims abstract description 29
- 238000010438 heat treatment Methods 0.000 claims abstract description 29
- 238000000576 coating method Methods 0.000 claims abstract description 25
- 239000011248 coating agent Substances 0.000 claims abstract description 21
- 150000001247 metal acetylides Chemical class 0.000 claims abstract description 8
- 239000011195 cermet Substances 0.000 claims abstract description 7
- 239000004020 conductor Substances 0.000 claims description 17
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910052702 rhenium Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 37
- 239000002344 surface layer Substances 0.000 abstract description 32
- 239000010410 layer Substances 0.000 abstract description 30
- 229910052799 carbon Inorganic materials 0.000 abstract description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 27
- 239000007789 gas Substances 0.000 abstract description 22
- 229910052760 oxygen Inorganic materials 0.000 abstract description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000001301 oxygen Substances 0.000 abstract description 4
- 238000000137 annealing Methods 0.000 description 8
- 101100447665 Mus musculus Gas2 gene Proteins 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 101100348341 Caenorhabditis elegans gas-1 gene Proteins 0.000 description 3
- 101100447658 Mus musculus Gas1 gene Proteins 0.000 description 3
- 238000005422 blasting Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 229910052756 noble gas Inorganic materials 0.000 description 3
- 150000002835 noble gases Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical class [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 description 1
- 101100298048 Mus musculus Pmp22 gene Proteins 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000035784 germination Effects 0.000 description 1
- -1 graphite and. a. Chemical compound 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0209—Pretreatment of the material to be coated by heating
- C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
- Y10T428/252—Glass or ceramic [i.e., fired or glazed clay, cement, etc.] [porcelain, quartz, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Powder Metallurgy (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Seal Device For Vehicle (AREA)
- Glass Compositions (AREA)
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Formation And Processing Of Food Products (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19704262 | 1997-02-05 | ||
| DE19704262 | 1997-02-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69838006D1 DE69838006D1 (de) | 2007-08-09 |
| DE69838006T2 true DE69838006T2 (de) | 2008-03-13 |
Family
ID=7819337
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69838006T Expired - Lifetime DE69838006T2 (de) | 1997-02-05 | 1998-02-05 | Beschichtungsvorrichtung |
| DE69823495T Expired - Lifetime DE69823495T2 (de) | 1997-02-05 | 1998-02-05 | Beschichtung eines karbidverbundkörpers oder eines karbidenthaltenden cermets mit hartem material |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69823495T Expired - Lifetime DE69823495T2 (de) | 1997-02-05 | 1998-02-05 | Beschichtung eines karbidverbundkörpers oder eines karbidenthaltenden cermets mit hartem material |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6268045B1 (enExample) |
| EP (2) | EP0975820B1 (enExample) |
| JP (1) | JP4295830B2 (enExample) |
| AT (2) | ATE265556T1 (enExample) |
| AU (1) | AU6294998A (enExample) |
| DE (2) | DE69838006T2 (enExample) |
| DK (1) | DK1408138T3 (enExample) |
| IL (1) | IL131225A (enExample) |
| WO (1) | WO1998035071A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6436204B1 (en) | 1998-11-20 | 2002-08-20 | Kennametal Pc Inc. | Diamond coated cutting tools and method of manufacture |
| US6220375B1 (en) * | 1999-01-13 | 2001-04-24 | Baker Hughes Incorporated | Polycrystalline diamond cutters having modified residual stresses |
| SE522730C2 (sv) | 2000-11-23 | 2004-03-02 | Sandvik Ab | Metod för tillverkning av en belagd hårdmetallkropp avsedd för skärande bearbetning |
| JP2003251503A (ja) * | 2001-12-26 | 2003-09-09 | Sumitomo Electric Ind Ltd | 表面被覆切削工具 |
| KR100493025B1 (ko) * | 2002-08-07 | 2005-06-07 | 삼성전자주식회사 | 반도체 메모리 장치의 제조 방법 |
| WO2004031437A1 (de) * | 2002-09-27 | 2004-04-15 | Cemecon Ag | Beschichtungsverfahren und beschichteter körper |
| US7815735B2 (en) * | 2003-03-21 | 2010-10-19 | Cemecon Ag | Body having a smooth diamond layer, device and method therefor |
| US8069937B2 (en) * | 2009-02-26 | 2011-12-06 | Us Synthetic Corporation | Polycrystalline diamond compact including a cemented tungsten carbide substrate that is substantially free of tungsten carbide grains exhibiting abnormal grain growth and applications therefor |
| GB0903322D0 (en) * | 2009-02-27 | 2009-04-22 | Element Six Holding Gmbh | Hard-metal substrate with graded microstructure |
| WO2011020859A1 (de) | 2009-08-19 | 2011-02-24 | Cemecon Ag | Beschichtetes werkzeug |
| DE102013218446A1 (de) | 2013-09-13 | 2015-03-19 | Cemecon Ag | Werkzeug sowie Verfahren zum Zerspanen von faserverstärktenMaterialien |
| DE102014210371A1 (de) | 2014-06-02 | 2015-12-03 | Gühring KG | Diamantbeschichtetes spanabhebendes Werkzeug und Verfahren zu seiner Herstellung |
| DE102015208742A1 (de) | 2015-05-12 | 2016-11-17 | Gühring KG | Spanabhebendes Werkzeug |
| EP3436209A1 (en) * | 2016-04-01 | 2019-02-06 | Pramet Tools, S.R.O. | Surface hardening of cemented carbide body |
| DE102017002154A1 (de) | 2017-03-06 | 2018-09-06 | Audi Ag | Schneidelement für ein Spanbearbeitungswerkzeug sowie Verfahren zur Herstellung eines solchen Schneidelementes |
| DE102017204109B4 (de) | 2017-03-13 | 2019-03-14 | Gühring KG | Verwendung einer mit Fremdatomen dotierten Diamantschicht zur Erfassung des Abnutzungsgrades einer undotierten diamantenen Funktionsschicht eines Werkzeugs |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0384011B1 (en) | 1989-02-23 | 1993-10-27 | Toshiba Tungaloy Co. Ltd. | Diamond-coated sintered body excellent in adhesion and process for preparing the same |
| US4979465A (en) * | 1989-04-03 | 1990-12-25 | Daidousanso Co., Ltd. | Apparatus for producing semiconductors |
| US5236740A (en) * | 1991-04-26 | 1993-08-17 | National Center For Manufacturing Sciences | Methods for coating adherent diamond films on cemented tungsten carbide substrates |
| DE69222138T2 (de) * | 1991-07-22 | 1998-01-22 | Sumitomo Electric Industries | Diamantverkleidetes hartmaterial und verfahren zu dessen herstellung |
| KR100193546B1 (ko) * | 1992-12-08 | 1999-06-15 | 아키오 하라 | 초경질막 피복부재 및 그 제조방법 |
| AT400041B (de) | 1993-03-26 | 1995-09-25 | Plansee Tizit Gmbh | Hartmetall-substrat mit diamantschicht hoher haftfestigkeit |
| US5585176A (en) | 1993-11-30 | 1996-12-17 | Kennametal Inc. | Diamond coated tools and wear parts |
| US5635256A (en) * | 1994-08-11 | 1997-06-03 | St. Gobain/Norton Industrial Ceramics Corporation | Method of making a diamond-coated composite body |
| US5674620A (en) * | 1994-08-11 | 1997-10-07 | Saint-Gobain/Norton Industrial Ceramics Corporation | Diamond-coated composite cutting tool and method of making |
| US5701578A (en) * | 1996-11-20 | 1997-12-23 | Kennametal Inc. | Method for making a diamond-coated member |
-
1998
- 1998-02-05 DK DK03026337T patent/DK1408138T3/da active
- 1998-02-05 AU AU62949/98A patent/AU6294998A/en not_active Abandoned
- 1998-02-05 JP JP53375598A patent/JP4295830B2/ja not_active Expired - Lifetime
- 1998-02-05 EP EP98906917A patent/EP0975820B1/en not_active Expired - Lifetime
- 1998-02-05 DE DE69838006T patent/DE69838006T2/de not_active Expired - Lifetime
- 1998-02-05 AT AT98906917T patent/ATE265556T1/de active
- 1998-02-05 EP EP03026337A patent/EP1408138B9/en not_active Expired - Lifetime
- 1998-02-05 AT AT03026337T patent/ATE365815T1/de active
- 1998-02-05 IL IL13122598A patent/IL131225A/xx not_active IP Right Cessation
- 1998-02-05 US US09/355,832 patent/US6268045B1/en not_active Expired - Lifetime
- 1998-02-05 DE DE69823495T patent/DE69823495T2/de not_active Expired - Lifetime
- 1998-02-05 WO PCT/EP1998/000614 patent/WO1998035071A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| ATE265556T1 (de) | 2004-05-15 |
| US6268045B1 (en) | 2001-07-31 |
| DK1408138T3 (da) | 2007-10-29 |
| AU6294998A (en) | 1998-08-26 |
| DE69838006D1 (de) | 2007-08-09 |
| WO1998035071A1 (en) | 1998-08-13 |
| EP0975820B1 (en) | 2004-04-28 |
| JP4295830B2 (ja) | 2009-07-15 |
| EP1408138B9 (en) | 2008-02-13 |
| EP1408138A1 (en) | 2004-04-14 |
| IL131225A0 (en) | 2001-01-28 |
| IL131225A (en) | 2003-07-31 |
| DE69823495T2 (de) | 2005-04-07 |
| DE69823495D1 (de) | 2004-06-03 |
| EP1408138B1 (en) | 2007-06-27 |
| ATE365815T1 (de) | 2007-07-15 |
| JP2001511219A (ja) | 2001-08-07 |
| EP0975820A1 (en) | 2000-02-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE69823495T2 (de) | Beschichtung eines karbidverbundkörpers oder eines karbidenthaltenden cermets mit hartem material | |
| DE69223075T2 (de) | Diamant-beschichtete bzw. mit diamantartigem Kohlenstoff beschichtete Hartstoffe | |
| DE60124061T2 (de) | Hartstoffschicht für Schneidwerkzeuge | |
| DE69707071T2 (de) | Diamant | |
| DE69025582T3 (de) | Beschichteter Hartmetallkörper und Verfahren zu seiner Herstellung | |
| DE60133705T3 (de) | Werkzeug aus einem gesinterten Bornitrid Körper mit beschichteter Oberfläche | |
| DE69129625T2 (de) | Diamant auf substrat für elektronische anwendungen | |
| DE68916207T2 (de) | Diamantbeschichtetes Werkzeug, Substrate dafür und Verfahren zu dessen Herstellung. | |
| DE69210874T3 (de) | Ein diamantbeschichteter und/oder mit diamantartigem Kohlenstoff beschichteter Hartstoff | |
| DE68904314T2 (de) | Verfahren fuer die herstellung eines gesinterten hartmetalles mit einer diamantschicht. | |
| EP0845053B1 (de) | Verbundkörper und verfahren zu dessen herstellung | |
| EP0668938B1 (de) | Werkzeug und verfahren zur beschichtung eines werkzeuggrundkörpers | |
| DE69330052T2 (de) | Ultrahartes folienbeschichtetes material und dessen herstellung | |
| DE19962056A1 (de) | Schneidwerkzeug mit mehrlagiger, verschleissfester Beschichtung | |
| DE4408250A1 (de) | Verfahren zum Beschichten der Oberfläche eines Substrats und Beschichtungsmaterial | |
| DE102008056189A1 (de) | Harte Beschichtung mit ausgezeichneter Gleiteigenschaft und Verfahren zur Herstellung derselben | |
| EP0730670A1 (de) | Beschichteter körper, verfahren zu dessen herstellung sowie dessen verwendung | |
| DE102007010595A1 (de) | Auf amorphem Kohlenstoff basierender, harter Mehrschichtfilm und Teil mit harter Oberfläche, das den Film auf der Oberfläche aufweist | |
| DE2357814A1 (de) | Graphitkoerper mit siliciumcarbidbeschichtung | |
| DE112009001396T5 (de) | Hartbeschichtungsschicht und Verfahren zu deren Bildung | |
| DE69504896T2 (de) | Synthetische Diamantschicht mit verringerter Biegung und Verfahren zu ihrer Herstellung | |
| DE3810237C2 (enExample) | ||
| EP0617140B1 (de) | Hartmetallsubstrat mit Diamantschicht von hoher Haftfestigkeit | |
| DE112004000720T5 (de) | Aluminiumoxidschutzfilm und Herstellungsverfahren dafür | |
| DE69512298T2 (de) | Verfahren zur Herstellung eines mit Diamanten beschichteten Gegenstandes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| R082 | Change of representative |
Ref document number: 1408138 Country of ref document: EP Representative=s name: , |