DE69834764D1 - Projektions- bzw. Beleuchtungssystem mit einem System zur Detektion einer Lampeninstabilität - Google Patents

Projektions- bzw. Beleuchtungssystem mit einem System zur Detektion einer Lampeninstabilität

Info

Publication number
DE69834764D1
DE69834764D1 DE69834764T DE69834764T DE69834764D1 DE 69834764 D1 DE69834764 D1 DE 69834764D1 DE 69834764 T DE69834764 T DE 69834764T DE 69834764 T DE69834764 T DE 69834764T DE 69834764 D1 DE69834764 D1 DE 69834764D1
Authority
DE
Germany
Prior art keywords
projection
detecting
lighting system
lamp instability
instability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69834764T
Other languages
English (en)
Other versions
DE69834764T2 (de
Inventor
Michael A Creighton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Application granted granted Critical
Publication of DE69834764D1 publication Critical patent/DE69834764D1/de
Publication of DE69834764T2 publication Critical patent/DE69834764T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
DE69834764T 1997-04-30 1998-04-20 Projektions- bzw. Beleuchtungssystem mit einem System zur Detektion einer Lampeninstabilität Expired - Lifetime DE69834764T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US835845 1986-03-03
US08/835,845 US5818575A (en) 1997-04-30 1997-04-30 Lamp stablity diagnostic system

Publications (2)

Publication Number Publication Date
DE69834764D1 true DE69834764D1 (de) 2006-07-20
DE69834764T2 DE69834764T2 (de) 2006-10-19

Family

ID=25270614

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69834764T Expired - Lifetime DE69834764T2 (de) 1997-04-30 1998-04-20 Projektions- bzw. Beleuchtungssystem mit einem System zur Detektion einer Lampeninstabilität

Country Status (6)

Country Link
US (1) US5818575A (de)
EP (1) EP0875790B1 (de)
JP (1) JP4179663B2 (de)
KR (1) KR100548048B1 (de)
CA (1) CA2236068A1 (de)
DE (1) DE69834764T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10150270A1 (de) * 2001-10-11 2003-04-17 Leica Microsystems Lichtquelle zur Beleuchtung in einer optischen Betrachtungseinrichtung
ATE459023T1 (de) * 2004-05-05 2010-03-15 Imax Corp Hochleistungsfähiges stereographisches projektionssystem mit mehreren quellen
FR2903566B1 (fr) * 2006-07-07 2008-10-10 Airbus France Sas Procede et dispositif de surveillance d'eclairement d'ampoules de lampes
JP5849479B2 (ja) * 2011-07-12 2016-01-27 ソニー株式会社 照明装置および表示装置
CN103487769A (zh) * 2013-10-09 2014-01-01 无锡俊达测试技术服务有限公司 一种节能灯通断电测试装置
CN106404348B (zh) * 2016-08-27 2019-02-22 天津大学 净化装置用脉冲氙灯综合性能测试方法与装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5373216A (en) * 1992-12-21 1994-12-13 General Electric Company Electrodeless arc tube with stabilized condensate location
FR2701318B1 (fr) * 1993-02-09 1995-03-17 Inst Francais Du Petrole Dispositif perfectionné et méthode pour mesurer optiquement des caractéristiques d'une substance.
JPH07220989A (ja) * 1994-01-27 1995-08-18 Canon Inc 露光装置及びこれを用いたデバイス製造方法
JPH08255741A (ja) * 1995-03-16 1996-10-01 Nikon Corp 露光装置
KR100422887B1 (ko) * 1995-03-16 2005-02-02 가부시키가이샤 니콘 노광장치및방법

Also Published As

Publication number Publication date
KR19980081852A (ko) 1998-11-25
EP0875790A3 (de) 2000-09-13
KR100548048B1 (ko) 2006-04-17
JP4179663B2 (ja) 2008-11-12
EP0875790B1 (de) 2006-06-07
DE69834764T2 (de) 2006-10-19
JPH1151760A (ja) 1999-02-26
EP0875790A2 (de) 1998-11-04
US5818575A (en) 1998-10-06
CA2236068A1 (en) 1998-10-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition