DE69828461D1 - Verfahren und Apparat zur Herstellung einer Mikroanordnung - Google Patents
Verfahren und Apparat zur Herstellung einer MikroanordnungInfo
- Publication number
- DE69828461D1 DE69828461D1 DE69828461T DE69828461T DE69828461D1 DE 69828461 D1 DE69828461 D1 DE 69828461D1 DE 69828461 T DE69828461 T DE 69828461T DE 69828461 T DE69828461 T DE 69828461T DE 69828461 D1 DE69828461 D1 DE 69828461D1
- Authority
- DE
- Germany
- Prior art keywords
- microarray
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title 1
- 238000002493 microarray Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
Landscapes
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Micromachines (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US856565 | 1997-05-15 | ||
US08/856,565 US5912094A (en) | 1997-05-15 | 1997-05-15 | Method and apparatus for making a micro device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69828461D1 true DE69828461D1 (de) | 2005-02-10 |
DE69828461T2 DE69828461T2 (de) | 2005-12-15 |
Family
ID=25323963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69828461T Expired - Lifetime DE69828461T2 (de) | 1997-05-15 | 1998-05-05 | Verfahren und Apparat zur Herstellung einer Mikroanordnung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5912094A (de) |
EP (1) | EP0880077B1 (de) |
JP (1) | JP3808205B2 (de) |
DE (1) | DE69828461T2 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5994159A (en) * | 1997-12-22 | 1999-11-30 | Lucent Technologies, Inc. | Self-assemblying micro-mechanical device |
US6303986B1 (en) | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
US6753638B2 (en) * | 2000-02-03 | 2004-06-22 | Calient Networks, Inc. | Electrostatic actuator for micromechanical systems |
US20010050828A1 (en) | 2000-05-18 | 2001-12-13 | Davis Michael W. | Reverse flow disk drive and head suspension for same |
US7259510B1 (en) | 2000-08-30 | 2007-08-21 | Agere Systems Inc. | On-chip vacuum tube device and process for making device |
US6531947B1 (en) | 2000-09-12 | 2003-03-11 | 3M Innovative Properties Company | Direct acting vertical thermal actuator with controlled bending |
US6483419B1 (en) | 2000-09-12 | 2002-11-19 | 3M Innovative Properties Company | Combination horizontal and vertical thermal actuator |
US6708491B1 (en) | 2000-09-12 | 2004-03-23 | 3M Innovative Properties Company | Direct acting vertical thermal actuator |
US6825967B1 (en) | 2000-09-29 | 2004-11-30 | Calient Networks, Inc. | Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same |
US6707591B2 (en) | 2001-04-10 | 2004-03-16 | Silicon Light Machines | Angled illumination for a single order light modulator based projection system |
US6438954B1 (en) | 2001-04-27 | 2002-08-27 | 3M Innovative Properties Company | Multi-directional thermal actuator |
US6543087B2 (en) | 2001-06-01 | 2003-04-08 | Aip Networks, Inc. | Micro-electromechanical hinged flap structure |
US6747781B2 (en) | 2001-06-25 | 2004-06-08 | Silicon Light Machines, Inc. | Method, apparatus, and diffuser for reducing laser speckle |
US6782205B2 (en) | 2001-06-25 | 2004-08-24 | Silicon Light Machines | Method and apparatus for dynamic equalization in wavelength division multiplexing |
US6829092B2 (en) | 2001-08-15 | 2004-12-07 | Silicon Light Machines, Inc. | Blazed grating light valve |
US6930364B2 (en) * | 2001-09-13 | 2005-08-16 | Silicon Light Machines Corporation | Microelectronic mechanical system and methods |
US6989603B2 (en) * | 2001-10-02 | 2006-01-24 | Guobiao Zhang | nF-Opening Aiv Structures |
US6800238B1 (en) | 2002-01-15 | 2004-10-05 | Silicon Light Machines, Inc. | Method for domain patterning in low coercive field ferroelectrics |
US6767751B2 (en) * | 2002-05-28 | 2004-07-27 | Silicon Light Machines, Inc. | Integrated driver process flow |
US6728023B1 (en) | 2002-05-28 | 2004-04-27 | Silicon Light Machines | Optical device arrays with optimized image resolution |
US6822797B1 (en) | 2002-05-31 | 2004-11-23 | Silicon Light Machines, Inc. | Light modulator structure for producing high-contrast operation using zero-order light |
US6829258B1 (en) | 2002-06-26 | 2004-12-07 | Silicon Light Machines, Inc. | Rapidly tunable external cavity laser |
US6813059B2 (en) | 2002-06-28 | 2004-11-02 | Silicon Light Machines, Inc. | Reduced formation of asperities in contact micro-structures |
US6714337B1 (en) | 2002-06-28 | 2004-03-30 | Silicon Light Machines | Method and device for modulating a light beam and having an improved gamma response |
US6801354B1 (en) | 2002-08-20 | 2004-10-05 | Silicon Light Machines, Inc. | 2-D diffraction grating for substantially eliminating polarization dependent losses |
US6712480B1 (en) | 2002-09-27 | 2004-03-30 | Silicon Light Machines | Controlled curvature of stressed micro-structures |
US6806997B1 (en) | 2003-02-28 | 2004-10-19 | Silicon Light Machines, Inc. | Patterned diffractive light modulator ribbon for PDL reduction |
US6829077B1 (en) | 2003-02-28 | 2004-12-07 | Silicon Light Machines, Inc. | Diffractive light modulator with dynamically rotatable diffraction plane |
US8330128B2 (en) * | 2009-04-17 | 2012-12-11 | Varian Semiconductor Equipment Associates, Inc. | Implant mask with moveable hinged mask segments |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4575229A (en) * | 1984-05-03 | 1986-03-11 | Koltron Corporation | Photoetch plate hinge |
US4698284A (en) * | 1985-10-25 | 1987-10-06 | M&T Chemicals Inc. | Device for aligning a photomask onto a printed wiring board |
US5726480A (en) * | 1995-01-27 | 1998-03-10 | The Regents Of The University Of California | Etchants for use in micromachining of CMOS Microaccelerometers and microelectromechanical devices and method of making the same |
-
1997
- 1997-05-15 US US08/856,565 patent/US5912094A/en not_active Expired - Lifetime
-
1998
- 1998-05-05 EP EP98303499A patent/EP0880077B1/de not_active Expired - Lifetime
- 1998-05-05 DE DE69828461T patent/DE69828461T2/de not_active Expired - Lifetime
- 1998-05-15 JP JP13289398A patent/JP3808205B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69828461T2 (de) | 2005-12-15 |
EP0880077B1 (de) | 2005-01-05 |
US5912094A (en) | 1999-06-15 |
JPH1138591A (ja) | 1999-02-12 |
EP0880077A3 (de) | 2003-05-14 |
EP0880077A2 (de) | 1998-11-25 |
JP3808205B2 (ja) | 2006-08-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69828461D1 (de) | Verfahren und Apparat zur Herstellung einer Mikroanordnung | |
DE59709248D1 (de) | Verfahren und vorrichtung zur herstellung einer zahnbürste | |
DE69605337D1 (de) | Positionierungssystem und Verfahren und Apparat zur Herstellung einer Vorrichtung | |
DE69730025D1 (de) | Verfahren und vorrichtung zur herstellung einer spinnvliesbahn | |
DE69821666D1 (de) | Apparat zur Bilderzeugung und Verfahren zur Herstellung | |
DE69511023D1 (de) | Verfahren zur herstellung einer propylen-polymerzusammensetzung und propylen-polymerzusammensetzung | |
DE69807949D1 (de) | Verfahren und Vorrichtung zur Herstellung einer Dünnschicht | |
DE69625093D1 (de) | Belichtungsverfahren, Belichtungsapparat und Verfahren zur Herstellung einer Vorrichtung | |
DE69731614D1 (de) | Netzübergreifende einrichtung und verfahren zur herstellung einer solchen einrichtung | |
DE69506821D1 (de) | Verfahren zur herstellung einer propylen-polymerzusammensetzung und propylen-polymerzusammensetzung | |
ATE232927T1 (de) | Verfahren und vorrichtung zur herstellung einer verkürtzten zellulosestruktur | |
DE69837974D1 (de) | Vorrichtung und verfahren zur entlüftung von tinte sowie verfahren zur herstellung von tintenpatronen | |
DE69740012D1 (de) | Belichtungsapparat und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben | |
DE59802100D1 (de) | Druckprodukt und verfahren zur herstellung eines druckproduktes | |
DE59503839D1 (de) | Verfahren und Vorrichtung zur Herstellung einer Druckform | |
DE59506365D1 (de) | Vorrichtung und verfahren zur herstellung einer bildsequenz | |
DE69728072D1 (de) | Verfahren und vorrichtung zur herstellung von p-xylen | |
DE69838154D1 (de) | Belichtungseinheit, Belichtungssystem und Verfahren zur Herstellung einer Vorrichtung | |
DE69811732D1 (de) | Verfahren und vorrichtung zur herstellung einer schnecke | |
DE69838048D1 (de) | Vorrichtung und Verfahren zur Herstellung eines Übertragungslaminats | |
DE69832423D1 (de) | Verfahren und einrichtung zur herstellung von druckplatten | |
DE69809503D1 (de) | Vorrichtung und Verfahren zur Herstellung von Polyurethanmaterial | |
ATE247557T1 (de) | Verfahren und anlage zur herstellung einer vielzahl unterschiedlicher reifen | |
ATE221992T1 (de) | Verfahren und gerät zur schrittweisen verteilung einer blutprobe | |
DE69918954D1 (de) | Verfahren und Vorrichtung zur Herstellung von Faltenbalgen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |