DE69825226D1 - Mikromechanischer XYZ-Objektträger für die Verwendung mit optischen Bauteilen - Google Patents

Mikromechanischer XYZ-Objektträger für die Verwendung mit optischen Bauteilen

Info

Publication number
DE69825226D1
DE69825226D1 DE69825226T DE69825226T DE69825226D1 DE 69825226 D1 DE69825226 D1 DE 69825226D1 DE 69825226 T DE69825226 T DE 69825226T DE 69825226 T DE69825226 T DE 69825226T DE 69825226 D1 DE69825226 D1 DE 69825226D1
Authority
DE
Germany
Prior art keywords
micromechanical
optical components
xyz slide
xyz
slide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69825226T
Other languages
English (en)
Other versions
DE69825226T2 (de
Inventor
Vladimir Anatolyevich Aksyuk
David John Bishop
Peter Ledel Gammel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia of America Corp
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Application granted granted Critical
Publication of DE69825226D1 publication Critical patent/DE69825226D1/de
Publication of DE69825226T2 publication Critical patent/DE69825226T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0068—Switches making use of microelectromechanical systems [MEMS] with multi dimensional movement, i.e. the movable actuator performing movements in at least two different directions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Micromachines (AREA)
DE69825226T 1997-09-23 1998-09-08 Mikromechanischer XYZ-Objektträger für die Verwendung mit optischen Bauteilen Expired - Lifetime DE69825226T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US935971 1997-09-23
US08/935,971 US5963367A (en) 1997-09-23 1997-09-23 Micromechanical xyz stage for use with optical elements

Publications (2)

Publication Number Publication Date
DE69825226D1 true DE69825226D1 (de) 2004-09-02
DE69825226T2 DE69825226T2 (de) 2005-08-04

Family

ID=25467993

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69825226T Expired - Lifetime DE69825226T2 (de) 1997-09-23 1998-09-08 Mikromechanischer XYZ-Objektträger für die Verwendung mit optischen Bauteilen

Country Status (4)

Country Link
US (1) US5963367A (de)
EP (1) EP0903606B1 (de)
JP (1) JP3566103B2 (de)
DE (1) DE69825226T2 (de)

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US6108466A (en) * 1998-09-17 2000-08-22 Lucent Technologies Micro-machined optical switch with tapered ends
KR100595146B1 (ko) * 1998-12-05 2006-08-30 엘지전자 주식회사 근접장광기록/재생장치
KR100474835B1 (ko) * 2000-07-18 2005-03-08 삼성전자주식회사 다축 구동을 위한 싱글스테이지 마이크로구동기
KR100493151B1 (ko) * 2000-07-19 2005-06-02 삼성전자주식회사 멀티폴디스 스프링을 이용한 다축 구동을 위한싱글스테이지 마이크로 구동기
WO2002057200A2 (en) * 2000-08-15 2002-07-25 Bioforce Nanosciences, Inc. Nanoscale molecular arrayer
AU2001289158A1 (en) 2000-08-25 2002-03-04 Iolon, Inc. Micromechanical device having two degrees of motion
US6708491B1 (en) 2000-09-12 2004-03-23 3M Innovative Properties Company Direct acting vertical thermal actuator
US6483419B1 (en) 2000-09-12 2002-11-19 3M Innovative Properties Company Combination horizontal and vertical thermal actuator
US6531947B1 (en) 2000-09-12 2003-03-11 3M Innovative Properties Company Direct acting vertical thermal actuator with controlled bending
US6567574B1 (en) 2000-10-06 2003-05-20 Omm, Inc. Modular three-dimensional optical switch
US6445514B1 (en) * 2000-10-12 2002-09-03 Honeywell International Inc. Micro-positioning optical element
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6731833B2 (en) 2001-01-16 2004-05-04 T-Rex Enterprises Corp. Optical cross connect switch
US6711318B2 (en) 2001-01-29 2004-03-23 3M Innovative Properties Company Optical switch based on rotating vertical micro-mirror
US6571029B1 (en) 2001-02-13 2003-05-27 Omm, Inc. Method for determining and implementing electrical damping coefficients
US6556739B1 (en) 2001-02-13 2003-04-29 Omm, Inc. Electronic damping of MEMS devices using a look-up table
US6438954B1 (en) 2001-04-27 2002-08-27 3M Innovative Properties Company Multi-directional thermal actuator
US7353593B2 (en) * 2001-08-06 2008-04-08 Simon Fraser University Method for assembling micro structures
US6806991B1 (en) 2001-08-16 2004-10-19 Zyvex Corporation Fully released MEMs XYZ flexure stage with integrated capacitive feedback
US6769616B2 (en) * 2002-11-22 2004-08-03 Advanced Nano Systems Bidirectional MEMS scanning mirror with tunable natural frequency
US7034370B2 (en) * 2002-11-22 2006-04-25 Advanced Nano Systems, Inc. MEMS scanning mirror with tunable natural frequency
US7180662B2 (en) * 2004-04-12 2007-02-20 Applied Scientific Instrumentation Inc. Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage
US7187486B2 (en) 2004-04-27 2007-03-06 Intel Corporation Electromechanical drives adapted to provide two degrees of mobility
US7690325B2 (en) * 2004-04-30 2010-04-06 Bioforce Nanosciences, Inc. Method and apparatus for depositing material onto a surface
US7623142B2 (en) * 2004-09-14 2009-11-24 Hewlett-Packard Development Company, L.P. Flexure
TWI250735B (en) * 2004-11-25 2006-03-01 Ind Tech Res Inst Tunable type light transceiver module
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US8310442B2 (en) * 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
JP4124223B2 (ja) * 2005-03-23 2008-07-23 セイコーエプソン株式会社 アクチュエータおよびアクチュエータを有する光学装置及び当該アクチュエータの製造方法
US8336421B2 (en) * 2005-07-29 2012-12-25 Brigham Young University Spherical three degrees of freedom platform
US7253616B2 (en) * 2005-10-13 2007-08-07 Lucent Technologies Inc. Microelectromechanical magnetometer
US9045329B2 (en) * 2005-11-25 2015-06-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical element which can be deflected
KR100682957B1 (ko) * 2006-01-09 2007-02-15 삼성전자주식회사 Ｘｙ스테이지 모듈과 이를 채용한 정보저장기기 및ｘｙ스테이지 모듈의 제조방법
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
JP5104633B2 (ja) * 2008-08-04 2012-12-19 株式会社豊田中央研究所 ステージ装置
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
JP2013519122A (ja) 2010-02-02 2013-05-23 ピクストロニックス・インコーポレーテッド ディスプレイ装置を制御するための回路
ES2854832T3 (es) * 2011-08-01 2021-09-23 Alcyone Lifesciences Inc Dispositivos microfluídicos de administración de medicamentos
EP3868541A1 (de) 2012-12-18 2021-08-25 Alcyone Lifesciences, Inc. Vorrichtungen und verfahren zur verminderung oder verhinderung von rückstrom in einem abgabesystem
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
CA2915505C (en) 2013-06-17 2021-08-03 Alcyone Lifesciences, Inc. Methods and devices for protecting catheter tips and stereotactic fixtures for microcatheters
ES2738298T3 (es) 2013-07-31 2020-01-21 Alcyone Lifesciences Inc Sistemas y métodos de suministro de fármacos, tratamiento y monitoreo
US10806396B2 (en) 2015-01-26 2020-10-20 Alcyone Lifesciences, Inc. Drug delivery methods with tracer
WO2017120167A1 (en) 2016-01-04 2017-07-13 Alcyone Lifesciences, Inc. Methods and devices for treating stroke

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Publication number Priority date Publication date Assignee Title
US5059793A (en) * 1989-10-04 1991-10-22 Olympus Optical Co., Ltd. Scanning tunneling microscope having proper servo control function
US5148157A (en) * 1990-09-28 1992-09-15 Texas Instruments Incorporated Spatial light modulator with full complex light modulation capability
US5165297A (en) * 1991-02-15 1992-11-24 Albert Einstein College Of Medicine Of Yeshiva University, A Div. Of Yeshiva Univ. Remote controlled micromanipulator
JP3184619B2 (ja) * 1991-09-24 2001-07-09 キヤノン株式会社 平行平面保持機構及びそれを用いたメモリ装置及びｓｔｍ装置
JPH07504749A (ja) * 1992-03-13 1995-05-25 サーモマイクロスコープス　コーポレーション 走査型プローブ電子顕微鏡
US5426302A (en) * 1993-04-28 1995-06-20 Board Of Regents, University Of Texas Optically guided macroscopic-scan-range/nanometer resolution probing system
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
JPH07184377A (ja) * 1993-10-21 1995-07-21 Mitsubishi Chem Corp 静電アクチュエータ

Also Published As

Publication number Publication date
JPH11166938A (ja) 1999-06-22
US5963367A (en) 1999-10-05
DE69825226T2 (de) 2005-08-04
EP0903606A3 (de) 1999-06-16
EP0903606B1 (de) 2004-07-28
JP3566103B2 (ja) 2004-09-15
EP0903606A2 (de) 1999-03-24

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