DE69813280D1 - Membranventil für flüssigkeitskreislauf - Google Patents
Membranventil für flüssigkeitskreislaufInfo
- Publication number
- DE69813280D1 DE69813280D1 DE69813280T DE69813280T DE69813280D1 DE 69813280 D1 DE69813280 D1 DE 69813280D1 DE 69813280 T DE69813280 T DE 69813280T DE 69813280 T DE69813280 T DE 69813280T DE 69813280 D1 DE69813280 D1 DE 69813280D1
- Authority
- DE
- Germany
- Prior art keywords
- diaphragm valve
- liquid circuit
- liquid
- circuit
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C3/00—Circuit elements having moving parts
- F15C3/04—Circuit elements having moving parts using diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87571—Multiple inlet with single outlet
- Y10T137/87676—With flow control
- Y10T137/87684—Valve in each inlet
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
- Valve Housings (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/990,861 US6007046A (en) | 1997-12-15 | 1997-12-15 | Fluid transport circuit and valve structure therefor |
PCT/US1998/025648 WO1999031419A1 (en) | 1997-12-15 | 1998-12-03 | Diaphragm valve for a fluid circuit |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69813280D1 true DE69813280D1 (de) | 2003-05-15 |
DE69813280T2 DE69813280T2 (de) | 2004-01-29 |
Family
ID=25536593
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1998613280 Expired - Fee Related DE69813280T2 (de) | 1997-12-15 | 1998-12-03 | Membranventil für flüssigkeitskreislauf |
Country Status (5)
Country | Link |
---|---|
US (1) | US6007046A (de) |
EP (1) | EP1030989B1 (de) |
JP (1) | JP4216470B2 (de) |
DE (1) | DE69813280T2 (de) |
WO (1) | WO1999031419A1 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6394417B1 (en) | 1998-10-09 | 2002-05-28 | Swagelok Co. | Sanitary diaphragm valve |
US6883780B2 (en) * | 1998-10-09 | 2005-04-26 | Swagelok Company | Sanitary diaphragm valve |
US6309541B1 (en) | 1999-10-29 | 2001-10-30 | Ontogen Corporation | Apparatus and method for multiple channel high throughput purification |
US6358414B1 (en) | 1999-10-29 | 2002-03-19 | Ontogen Corporation | Pressure regulation apparatus and method for multiple channel high throughput purification |
US20020127146A1 (en) * | 2001-03-07 | 2002-09-12 | Symyx Technologies, Inc. | Gas chromatograph injection valve |
US6742544B2 (en) | 2001-03-07 | 2004-06-01 | Symyx Technologies, Inc. | Injection valve array |
US6637476B2 (en) | 2002-04-01 | 2003-10-28 | Protedyne Corporation | Robotically manipulable sample handling tool |
TW561038B (en) * | 2003-03-04 | 2003-11-11 | Rossmax Int Ltd | Device for adjusting gas pressure |
US7249529B2 (en) * | 2003-03-28 | 2007-07-31 | Protedyne Corporation | Robotically manipulable sample handling tool |
US7021330B2 (en) * | 2003-06-26 | 2006-04-04 | Planar Systems, Inc. | Diaphragm valve with reliability enhancements for atomic layer deposition |
US6941963B2 (en) * | 2003-06-26 | 2005-09-13 | Planar Systems, Inc. | High-speed diaphragm valve for atomic layer deposition |
US6907897B2 (en) * | 2003-06-26 | 2005-06-21 | Planar Systems, Inc. | Diaphragm valve for high-temperature precursor supply in atomic layer deposition |
JP5560276B2 (ja) * | 2009-08-31 | 2014-07-23 | 株式会社フジキン | 流体制御器 |
KR101491713B1 (ko) * | 2013-06-10 | 2015-02-11 | (주)씨엔에스 | 액체 또는 기체의 유량 제어방법 |
KR101491711B1 (ko) * | 2013-06-10 | 2015-02-11 | (주)씨엔에스 | 다이어프램 밸브를 이용한 액체 또는 기체의 유량 제어방법 |
WO2015083829A1 (ja) | 2013-12-06 | 2015-06-11 | 国立大学法人東京大学 | バルブ、流体制御構造、流体デバイス及びバルブの製造方法 |
WO2016002847A1 (ja) * | 2014-07-01 | 2016-01-07 | 株式会社ニコン | 流体デバイス、流体の制御方法、検査デバイス、検査方法、及び流体デバイスの製造方法 |
KR101604978B1 (ko) * | 2014-08-05 | 2016-03-21 | (주)씨엔에스 | 모터를 이용한 일체형 다이어프램 밸브장치 |
GB2555816A (en) * | 2016-11-10 | 2018-05-16 | Natural Environment Res Council | Analyser |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS448943Y1 (de) * | 1965-02-27 | 1969-04-11 | ||
US3897041A (en) * | 1973-08-20 | 1975-07-29 | Leesona Corp | Fluid flow control elements with area dividing inserts |
GB2002877B (en) * | 1977-08-16 | 1982-06-30 | Niemand C | Fluid valves |
US4304257A (en) * | 1980-07-01 | 1981-12-08 | Instrumentation Laboratory Inc. | Valve with flexible sheet member |
JPS62140205U (de) * | 1986-02-28 | 1987-09-04 | ||
US4911195A (en) * | 1986-08-27 | 1990-03-27 | Porton Instruments, Inc. | Valve block assembly |
US4944487A (en) * | 1989-05-08 | 1990-07-31 | Lee Company | Diaphragm valve |
US5083742A (en) * | 1990-08-01 | 1992-01-28 | Photovac Incorporated | Fluid control valve |
US5176359A (en) * | 1991-05-20 | 1993-01-05 | Photovac International, Inc. | Fluid control valve arrangement |
US5203368A (en) * | 1992-07-29 | 1993-04-20 | Protein Technologies Inc. | Matrix of valves |
US5496009A (en) * | 1994-10-07 | 1996-03-05 | Bayer Corporation | Valve |
US5653259A (en) * | 1994-10-17 | 1997-08-05 | Applied Biosystems, Inc. | Valve block |
-
1997
- 1997-12-15 US US08/990,861 patent/US6007046A/en not_active Expired - Fee Related
-
1998
- 1998-12-03 WO PCT/US1998/025648 patent/WO1999031419A1/en active IP Right Grant
- 1998-12-03 EP EP98960690A patent/EP1030989B1/de not_active Expired - Lifetime
- 1998-12-03 JP JP2000539286A patent/JP4216470B2/ja not_active Expired - Fee Related
- 1998-12-03 DE DE1998613280 patent/DE69813280T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2002508491A (ja) | 2002-03-19 |
JP4216470B2 (ja) | 2009-01-28 |
EP1030989A1 (de) | 2000-08-30 |
EP1030989B1 (de) | 2003-04-09 |
WO1999031419A1 (en) | 1999-06-24 |
US6007046A (en) | 1999-12-28 |
DE69813280T2 (de) | 2004-01-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |