DE69810745D1 - GETTERPUMPE MIT EINTEILIGEM STüTZRAHMEN MIT MEHREREN ZU EINANDER PARALLELEN GETTERELEMENTEN AUS NICHTVERDAMPFBAREM MATERIAL - Google Patents

GETTERPUMPE MIT EINTEILIGEM STüTZRAHMEN MIT MEHREREN ZU EINANDER PARALLELEN GETTERELEMENTEN AUS NICHTVERDAMPFBAREM MATERIAL

Info

Publication number
DE69810745D1
DE69810745D1 DE69810745T DE69810745T DE69810745D1 DE 69810745 D1 DE69810745 D1 DE 69810745D1 DE 69810745 T DE69810745 T DE 69810745T DE 69810745 T DE69810745 T DE 69810745T DE 69810745 D1 DE69810745 D1 DE 69810745D1
Authority
DE
Germany
Prior art keywords
getter
support frame
elements made
piece support
several
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69810745T
Other languages
English (en)
Other versions
DE69810745T2 (de
Inventor
Danilo Dominioni
Roberto Giannantonio
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Publication of DE69810745D1 publication Critical patent/DE69810745D1/de
Application granted granted Critical
Publication of DE69810745T2 publication Critical patent/DE69810745T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE69810745T 1997-02-24 1998-02-17 GETTERPUMPE MIT EINTEILIGEM STüTZRAHMEN MIT MEHREREN ZU EINANDER PARALLELEN GETTERELEMENTEN AUS NICHTVERDAMPFBAREM MATERIAL Expired - Lifetime DE69810745T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT97MI000393A IT1290548B1 (it) 1997-02-24 1997-02-24 Pompa getter con armatura di sostegno in unico pezzo di una molteplicita' di elementi getter non evaporabili tra loro paralleli
PCT/IT1998/000027 WO1998037325A1 (en) 1997-02-24 1998-02-17 Getter pump with one-piece supporting framework of a plurality of non-evaporable getter elements mutually parallel

Publications (2)

Publication Number Publication Date
DE69810745D1 true DE69810745D1 (de) 2003-02-20
DE69810745T2 DE69810745T2 (de) 2003-11-06

Family

ID=11376147

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69810745T Expired - Lifetime DE69810745T2 (de) 1997-02-24 1998-02-17 GETTERPUMPE MIT EINTEILIGEM STüTZRAHMEN MIT MEHREREN ZU EINANDER PARALLELEN GETTERELEMENTEN AUS NICHTVERDAMPFBAREM MATERIAL

Country Status (9)

Country Link
US (1) US6106237A (de)
EP (1) EP0918933B1 (de)
JP (1) JP3720377B2 (de)
KR (1) KR100491510B1 (de)
CN (1) CN1077236C (de)
DE (1) DE69810745T2 (de)
IT (1) IT1290548B1 (de)
RU (1) RU2186249C2 (de)
WO (1) WO1998037325A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080206076A1 (en) * 2007-02-27 2008-08-28 Baker Spd Vertical Pump Arrangement
BRPI0910238A2 (pt) * 2008-03-28 2015-09-29 Getters Spa sistema de bombeamento combinado.
JP6133821B2 (ja) * 2014-08-08 2017-05-24 有限会社真空実験室 非蒸発型ゲッター及び非蒸発型ゲッターポンプ
CN106930923B (zh) * 2015-12-30 2018-11-30 核工业西南物理研究院 一种大型直板式钛升华泵结构
CN106224202B (zh) * 2016-08-31 2018-06-22 兰州空间技术物理研究所 一种利用电加热激活的非蒸散型吸附泵
CN114928934B (zh) * 2022-06-20 2024-06-18 中国科学院近代物理研究所 加速器真空室非蒸散型吸气剂片固定装置及其使用方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4137012A (en) 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
JP2967785B2 (ja) 1990-04-24 1999-10-25 株式会社日本製鋼所 ゲツターポンプ装置
DE4110588A1 (de) * 1991-04-02 1992-10-08 Leybold Ag Ionenzerstaeuberpumpe mit gettermodul
IT1255438B (it) 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system

Also Published As

Publication number Publication date
KR100491510B1 (ko) 2005-08-05
IT1290548B1 (it) 1998-12-10
JP2000509784A (ja) 2000-08-02
US6106237A (en) 2000-08-22
EP0918933B1 (de) 2003-01-15
CN1077236C (zh) 2002-01-02
RU2186249C2 (ru) 2002-07-27
KR20000064988A (ko) 2000-11-06
EP0918933A1 (de) 1999-06-02
CN1217768A (zh) 1999-05-26
ITMI970393A1 (it) 1998-08-24
DE69810745T2 (de) 2003-11-06
JP3720377B2 (ja) 2005-11-24
WO1998037325A1 (en) 1998-08-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition