DE69809442T2 - Gemusterte schleifwerkzeuge - Google Patents
Gemusterte schleifwerkzeugeInfo
- Publication number
- DE69809442T2 DE69809442T2 DE69809442T DE69809442T DE69809442T2 DE 69809442 T2 DE69809442 T2 DE 69809442T2 DE 69809442 T DE69809442 T DE 69809442T DE 69809442 T DE69809442 T DE 69809442T DE 69809442 T2 DE69809442 T2 DE 69809442T2
- Authority
- DE
- Germany
- Prior art keywords
- cutting surface
- abrasive
- paste
- brazing
- packets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000227 grinding Methods 0.000 title claims description 45
- 238000005219 brazing Methods 0.000 claims abstract description 84
- 229910052751 metal Inorganic materials 0.000 claims abstract description 67
- 239000002184 metal Substances 0.000 claims abstract description 67
- 238000005520 cutting process Methods 0.000 claims abstract description 61
- 239000006061 abrasive grain Substances 0.000 claims abstract description 45
- 238000000034 method Methods 0.000 claims abstract description 39
- 239000000203 mixture Substances 0.000 claims abstract description 38
- 239000002245 particle Substances 0.000 claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 claims abstract description 20
- 238000011049 filling Methods 0.000 claims abstract description 14
- 238000000151 deposition Methods 0.000 claims abstract description 13
- 239000011230 binding agent Substances 0.000 claims description 21
- 239000008187 granular material Substances 0.000 claims description 12
- 238000003825 pressing Methods 0.000 claims description 7
- 230000008021 deposition Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 13
- 239000002826 coolant Substances 0.000 abstract description 3
- 238000010304 firing Methods 0.000 abstract description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 18
- 239000003082 abrasive agent Substances 0.000 description 9
- 239000011324 bead Substances 0.000 description 8
- 239000004744 fabric Substances 0.000 description 8
- 229910003460 diamond Inorganic materials 0.000 description 7
- 239000010432 diamond Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 239000002243 precursor Substances 0.000 description 7
- 239000013078 crystal Substances 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 239000005060 rubber Substances 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229920001875 Ebonite Polymers 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- 229920002972 Acrylic fiber Polymers 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 241001463139 Vitta Species 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- -1 alpha-iron trioxide Chemical class 0.000 description 1
- JZQOJFLIJNRDHK-CMDGGOBGSA-N alpha-irone Chemical compound CC1CC=C(C)C(\C=C\C(C)=O)C1(C)C JZQOJFLIJNRDHK-CMDGGOBGSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910001593 boehmite Inorganic materials 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000004035 construction material Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- DGXKDBWJDQHNCI-UHFFFAOYSA-N dioxido(oxo)titanium nickel(2+) Chemical compound [Ni++].[O-][Ti]([O-])=O DGXKDBWJDQHNCI-UHFFFAOYSA-N 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000005246 galvanizing Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000012770 industrial material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/856,501 US6537140B1 (en) | 1997-05-14 | 1997-05-14 | Patterned abrasive tools |
| PCT/US1998/005537 WO1998051448A1 (en) | 1997-05-14 | 1998-03-19 | Patterned abrasive tools |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69809442D1 DE69809442D1 (de) | 2002-12-19 |
| DE69809442T2 true DE69809442T2 (de) | 2003-08-28 |
Family
ID=25323788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69809442T Expired - Lifetime DE69809442T2 (de) | 1997-05-14 | 1998-03-19 | Gemusterte schleifwerkzeuge |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US6537140B1 (https=) |
| EP (1) | EP1009592B1 (https=) |
| JP (3) | JP2001507290A (https=) |
| AT (1) | ATE227624T1 (https=) |
| AU (1) | AU717867B2 (https=) |
| BR (1) | BR9809621A (https=) |
| CA (1) | CA2287199C (https=) |
| DE (1) | DE69809442T2 (https=) |
| ES (1) | ES2187943T3 (https=) |
| NZ (1) | NZ500076A (https=) |
| WO (1) | WO1998051448A1 (https=) |
Families Citing this family (134)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6478831B2 (en) | 1995-06-07 | 2002-11-12 | Ultimate Abrasive Systems, L.L.C. | Abrasive surface and article and methods for making them |
| US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US6679243B2 (en) | 1997-04-04 | 2004-01-20 | Chien-Min Sung | Brazed diamond tools and methods for making |
| US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
| US7124753B2 (en) | 1997-04-04 | 2006-10-24 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9199357B2 (en) | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
| US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
| US7323049B2 (en) | 1997-04-04 | 2008-01-29 | Chien-Min Sung | High pressure superabrasive particle synthesis |
| KR20010020807A (ko) * | 1999-05-03 | 2001-03-15 | 조셉 제이. 스위니 | 고정 연마재 제품을 사전-조절하는 방법 |
| US6755720B1 (en) * | 1999-07-15 | 2004-06-29 | Noritake Co., Limited | Vitrified bond tool and method of manufacturing the same |
| US7201645B2 (en) | 1999-11-22 | 2007-04-10 | Chien-Min Sung | Contoured CMP pad dresser and associated methods |
| TW467809B (en) * | 1999-12-17 | 2001-12-11 | Ultimate Abrasive Systems Llc | Abrasive surface and article and methods for making them |
| US20040020789A1 (en) * | 2000-02-17 | 2004-02-05 | Applied Materials, Inc. | Conductive polishing article for electrochemical mechanical polishing |
| US7077721B2 (en) | 2000-02-17 | 2006-07-18 | Applied Materials, Inc. | Pad assembly for electrochemical mechanical processing |
| US7029365B2 (en) * | 2000-02-17 | 2006-04-18 | Applied Materials Inc. | Pad assembly for electrochemical mechanical processing |
| US6962524B2 (en) * | 2000-02-17 | 2005-11-08 | Applied Materials, Inc. | Conductive polishing article for electrochemical mechanical polishing |
| US7059948B2 (en) * | 2000-12-22 | 2006-06-13 | Applied Materials | Articles for polishing semiconductor substrates |
| US7303462B2 (en) * | 2000-02-17 | 2007-12-04 | Applied Materials, Inc. | Edge bead removal by an electro polishing process |
| US7374644B2 (en) * | 2000-02-17 | 2008-05-20 | Applied Materials, Inc. | Conductive polishing article for electrochemical mechanical polishing |
| US6979248B2 (en) * | 2002-05-07 | 2005-12-27 | Applied Materials, Inc. | Conductive polishing article for electrochemical mechanical polishing |
| US7066800B2 (en) * | 2000-02-17 | 2006-06-27 | Applied Materials Inc. | Conductive polishing article for electrochemical mechanical polishing |
| US6991528B2 (en) * | 2000-02-17 | 2006-01-31 | Applied Materials, Inc. | Conductive polishing article for electrochemical mechanical polishing |
| US20080156657A1 (en) * | 2000-02-17 | 2008-07-03 | Butterfield Paul D | Conductive polishing article for electrochemical mechanical polishing |
| US7303662B2 (en) * | 2000-02-17 | 2007-12-04 | Applied Materials, Inc. | Contacts for electrochemical processing |
| US7125477B2 (en) * | 2000-02-17 | 2006-10-24 | Applied Materials, Inc. | Contacts for electrochemical processing |
| US7678245B2 (en) * | 2000-02-17 | 2010-03-16 | Applied Materials, Inc. | Method and apparatus for electrochemical mechanical processing |
| US7670468B2 (en) * | 2000-02-17 | 2010-03-02 | Applied Materials, Inc. | Contact assembly and method for electrochemical mechanical processing |
| US20050092621A1 (en) * | 2000-02-17 | 2005-05-05 | Yongqi Hu | Composite pad assembly for electrochemical mechanical processing (ECMP) |
| US8256091B2 (en) * | 2000-11-17 | 2012-09-04 | Duescher Wayne O | Equal sized spherical beads |
| US8545583B2 (en) * | 2000-11-17 | 2013-10-01 | Wayne O. Duescher | Method of forming a flexible abrasive sheet article |
| US7632434B2 (en) | 2000-11-17 | 2009-12-15 | Wayne O. Duescher | Abrasive agglomerate coated raised island articles |
| US7520800B2 (en) * | 2003-04-16 | 2009-04-21 | Duescher Wayne O | Raised island abrasive, lapping apparatus and method of use |
| US8062098B2 (en) | 2000-11-17 | 2011-11-22 | Duescher Wayne O | High speed flat lapping platen |
| EP1207015A3 (en) * | 2000-11-17 | 2003-07-30 | Keltech Engineering, Inc. | Raised island abrasive, method of use and lapping apparatus |
| CN100361786C (zh) * | 2000-12-21 | 2008-01-16 | 新日本制铁株式会社 | Cmp调节器、用于cmp调节器的硬质磨粒的排列方法以及cmp调节器的制造方法 |
| US6669745B2 (en) * | 2001-02-21 | 2003-12-30 | 3M Innovative Properties Company | Abrasive article with optimally oriented abrasive particles and method of making the same |
| US7344432B2 (en) * | 2001-04-24 | 2008-03-18 | Applied Materials, Inc. | Conductive pad with ion exchange membrane for electrochemical mechanical polishing |
| US7137879B2 (en) * | 2001-04-24 | 2006-11-21 | Applied Materials, Inc. | Conductive polishing article for electrochemical mechanical polishing |
| US20050194681A1 (en) * | 2002-05-07 | 2005-09-08 | Yongqi Hu | Conductive pad with high abrasion |
| JP2004082323A (ja) * | 2002-06-26 | 2004-03-18 | Ricoh Co Ltd | 研磨具およびその製造方法 |
| US20060059785A1 (en) * | 2002-09-24 | 2006-03-23 | Chien-Min Sung | Methods of maximizing retention of superabrasive particles in a metal matrix |
| US20050108948A1 (en) * | 2002-09-24 | 2005-05-26 | Chien-Min Sung | Molten braze-coated superabrasive particles and associated methods |
| US20050076577A1 (en) * | 2003-10-10 | 2005-04-14 | Hall Richard W.J. | Abrasive tools made with a self-avoiding abrasive grain array |
| US20050178666A1 (en) * | 2004-01-13 | 2005-08-18 | Applied Materials, Inc. | Methods for fabrication of a polishing article |
| US20050260939A1 (en) * | 2004-05-18 | 2005-11-24 | Saint-Gobain Abrasives, Inc. | Brazed diamond dressing tool |
| US20060030156A1 (en) * | 2004-08-05 | 2006-02-09 | Applied Materials, Inc. | Abrasive conductive polishing article for electrochemical mechanical polishing |
| US7089925B1 (en) | 2004-08-18 | 2006-08-15 | Kinik Company | Reciprocating wire saw for cutting hard materials |
| US7084064B2 (en) * | 2004-09-14 | 2006-08-01 | Applied Materials, Inc. | Full sequence metal and barrier layer electrochemical mechanical processing |
| WO2006039436A2 (en) * | 2004-10-01 | 2006-04-13 | Applied Materials, Inc. | Pad design for electrochemical mechanical polishing |
| US7520968B2 (en) * | 2004-10-05 | 2009-04-21 | Applied Materials, Inc. | Conductive pad design modification for better wafer-pad contact |
| JP2006130613A (ja) * | 2004-11-05 | 2006-05-25 | Asahi Diamond Industrial Co Ltd | 研削工具 |
| US7427340B2 (en) * | 2005-04-08 | 2008-09-23 | Applied Materials, Inc. | Conductive pad |
| US8974270B2 (en) | 2011-05-23 | 2015-03-10 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
| US9138862B2 (en) | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
| US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
| US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
| US8678878B2 (en) | 2009-09-29 | 2014-03-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
| JP5285609B2 (ja) * | 2006-08-30 | 2013-09-11 | スリーエム イノベイティブ プロパティズ カンパニー | 長寿命化された研磨物品及び方法 |
| US20080271384A1 (en) * | 2006-09-22 | 2008-11-06 | Saint-Gobain Ceramics & Plastics, Inc. | Conditioning tools and techniques for chemical mechanical planarization |
| US7919151B2 (en) * | 2006-12-14 | 2011-04-05 | General Electric Company | Methods of preparing wetting-resistant surfaces and articles incorporating the same |
| US20080293343A1 (en) * | 2007-05-22 | 2008-11-27 | Yuchun Wang | Pad with shallow cells for electrochemical mechanical processing |
| US8657652B2 (en) | 2007-08-23 | 2014-02-25 | Saint-Gobain Abrasives, Inc. | Optimized CMP conditioner design for next generation oxide/metal CMP |
| MX2010006180A (es) * | 2007-12-12 | 2010-07-28 | Saint Gobain Abrasives Inc | Herramienta abrasiva de funciones multiples con union hibrida. |
| KR101413030B1 (ko) * | 2009-03-24 | 2014-07-02 | 생-고벵 아브라시프 | 화학적 기계적 평탄화 패드 컨디셔너로 사용되는 연마 공구 |
| SG176629A1 (en) * | 2009-06-02 | 2012-01-30 | Saint Gobain Abrasives Inc | Corrosion-resistant cmp conditioning tools and methods for making and using same |
| US20110097977A1 (en) * | 2009-08-07 | 2011-04-28 | Abrasive Technology, Inc. | Multiple-sided cmp pad conditioning disk |
| EP2474025A2 (en) | 2009-09-01 | 2012-07-11 | Saint-Gobain Abrasives, Inc. | Chemical mechanical polishing conditioner |
| US8480772B2 (en) * | 2009-12-22 | 2013-07-09 | 3M Innovative Properties Company | Transfer assisted screen printing method of making shaped abrasive particles and the resulting shaped abrasive particles |
| US8871331B2 (en) * | 2009-12-29 | 2014-10-28 | Saint-Gobain Abrasives, Inc. | Anti-loading abrasive article |
| JP5767325B2 (ja) | 2010-07-02 | 2015-08-19 | スリーエム イノベイティブ プロパティズ カンパニー | 被覆研磨材物品 |
| US8911522B2 (en) | 2010-07-06 | 2014-12-16 | Baker Hughes Incorporated | Methods of forming inserts and earth-boring tools |
| WO2012092590A2 (en) | 2010-12-31 | 2012-07-05 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
| CN103764349B (zh) | 2011-06-30 | 2017-06-09 | 圣戈本陶瓷及塑料股份有限公司 | 液相烧结碳化硅研磨颗粒 |
| CN108262695A (zh) | 2011-06-30 | 2018-07-10 | 圣戈本陶瓷及塑料股份有限公司 | 包括氮化硅磨粒的磨料制品 |
| EP2760639B1 (en) | 2011-09-26 | 2021-01-13 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming |
| WO2013101575A2 (en) | 2011-12-29 | 2013-07-04 | 3M Innovative Properties Company | Coated abrasive article |
| EP2797716B1 (en) | 2011-12-30 | 2021-02-17 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
| KR102074138B1 (ko) | 2011-12-30 | 2020-02-07 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
| BR112014016159A8 (pt) | 2011-12-30 | 2017-07-04 | Saint Gobain Ceramics | formação de partículas abrasivas moldadas |
| EP3705177A1 (en) | 2012-01-10 | 2020-09-09 | Saint-Gobain Ceramics & Plastics Inc. | Abrasive particles having complex shapes and methods of forming same |
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-
1997
- 1997-05-14 US US08/856,501 patent/US6537140B1/en not_active Expired - Lifetime
-
1998
- 1998-03-19 JP JP54921598A patent/JP2001507290A/ja not_active Withdrawn
- 1998-03-19 AU AU65745/98A patent/AU717867B2/en not_active Expired
- 1998-03-19 BR BR9809621-4A patent/BR9809621A/pt not_active IP Right Cessation
- 1998-03-19 DE DE69809442T patent/DE69809442T2/de not_active Expired - Lifetime
- 1998-03-19 NZ NZ500076A patent/NZ500076A/en not_active IP Right Cessation
- 1998-03-19 ES ES98911896T patent/ES2187943T3/es not_active Expired - Lifetime
- 1998-03-19 AT AT98911896T patent/ATE227624T1/de active
- 1998-03-19 CA CA002287199A patent/CA2287199C/en not_active Expired - Lifetime
- 1998-03-19 EP EP98911896A patent/EP1009592B1/en not_active Expired - Lifetime
- 1998-03-19 WO PCT/US1998/005537 patent/WO1998051448A1/en not_active Ceased
-
2003
- 2003-08-21 JP JP2003297853A patent/JP2004001232A/ja not_active Withdrawn
-
2009
- 2009-08-28 JP JP2009198461A patent/JP5105491B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US6537140B1 (en) | 2003-03-25 |
| JP2009285829A (ja) | 2009-12-10 |
| ES2187943T3 (es) | 2003-06-16 |
| WO1998051448A1 (en) | 1998-11-19 |
| ATE227624T1 (de) | 2002-11-15 |
| EP1009592B1 (en) | 2002-11-13 |
| CA2287199A1 (en) | 1998-11-19 |
| NZ500076A (en) | 2000-06-23 |
| CA2287199C (en) | 2004-03-16 |
| AU717867B2 (en) | 2000-04-06 |
| JP2004001232A (ja) | 2004-01-08 |
| JP5105491B2 (ja) | 2012-12-26 |
| JP2001507290A (ja) | 2001-06-05 |
| BR9809621A (pt) | 2000-07-04 |
| AU6574598A (en) | 1998-12-08 |
| DE69809442D1 (de) | 2002-12-19 |
| EP1009592A1 (en) | 2000-06-21 |
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