DE69808221D1 - Flüssigkeitsabgabevorrichtung und Verfahren - Google Patents

Flüssigkeitsabgabevorrichtung und Verfahren

Info

Publication number
DE69808221D1
DE69808221D1 DE69808221T DE69808221T DE69808221D1 DE 69808221 D1 DE69808221 D1 DE 69808221D1 DE 69808221 T DE69808221 T DE 69808221T DE 69808221 T DE69808221 T DE 69808221T DE 69808221 D1 DE69808221 D1 DE 69808221D1
Authority
DE
Germany
Prior art keywords
liquid dispenser
dispenser
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69808221T
Other languages
English (en)
Other versions
DE69808221T3 (de
DE69808221T2 (de
Inventor
Peter M Pozniak
Duy Khanh Trang
Benjamin R Roberts
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Vacuum LLC
Original Assignee
BOC Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25526913&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69808221(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by BOC Group Inc filed Critical BOC Group Inc
Publication of DE69808221D1 publication Critical patent/DE69808221D1/de
Application granted granted Critical
Publication of DE69808221T2 publication Critical patent/DE69808221T2/de
Publication of DE69808221T3 publication Critical patent/DE69808221T3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3124—Plural units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y10T137/313—Gas carried by or evolved from liquid

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
  • Jet Pumps And Other Pumps (AREA)
DE1998608221 1997-11-26 1998-11-23 Flüssigkeitsabgabevorrichtung und Verfahren Expired - Fee Related DE69808221T3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US979496 1992-11-18
US08/979,496 US6076541A (en) 1997-11-26 1997-11-26 Dispensing system and method for dispensing an aqueous solution

Publications (3)

Publication Number Publication Date
DE69808221D1 true DE69808221D1 (de) 2002-10-31
DE69808221T2 DE69808221T2 (de) 2003-05-15
DE69808221T3 DE69808221T3 (de) 2007-09-20

Family

ID=25526913

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1998608221 Expired - Fee Related DE69808221T3 (de) 1997-11-26 1998-11-23 Flüssigkeitsabgabevorrichtung und Verfahren

Country Status (9)

Country Link
US (1) US6076541A (de)
EP (1) EP0919329B2 (de)
JP (1) JP4404391B2 (de)
KR (1) KR100296860B1 (de)
CA (1) CA2248910C (de)
DE (1) DE69808221T3 (de)
IL (1) IL126510A (de)
SG (1) SG77654A1 (de)
TW (1) TW397803B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69912323T2 (de) 1998-12-30 2004-07-29 The Boc Group, Inc. Anlage und Verfahren zur Abgabe von Chemikalien
US6098843A (en) * 1998-12-31 2000-08-08 Silicon Valley Group, Inc. Chemical delivery systems and methods of delivery
DE19919108A1 (de) * 1999-04-27 2000-11-09 Siemens Ag Zuführvorrichtung für Schleifmittel
US6736154B2 (en) 2001-01-26 2004-05-18 American Air Liquide, Inc. Pressure vessel systems and methods for dispensing liquid chemical compositions
KR100832447B1 (ko) 2007-01-26 2008-05-26 플러스이엔지 주식회사 반도체 제조용 액체 저장용기
KR20120036953A (ko) * 2009-06-10 2012-04-18 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 유체 가공 시스템 및 방법
US9770804B2 (en) 2013-03-18 2017-09-26 Versum Materials Us, Llc Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54123950A (en) * 1978-03-17 1979-09-26 Matsushita Electric Ind Co Ltd Ink jet recorder
DE2923906C2 (de) * 1979-06-13 1981-01-08 Basf Farben + Fasern Ag, 2000 Hamburg Verfahren und Vorrichtung zur Lackversorgung von Lackierstraßen
JPS5854862B2 (ja) * 1980-09-17 1983-12-07 積水ハウス株式会社 塗装装置
FR2558737B1 (fr) * 1984-01-30 1986-07-11 Siderurgie Fse Inst Rech Generateur de gaz humide
AU563417B2 (en) * 1984-02-07 1987-07-09 Nippon Telegraph & Telephone Public Corporation Optical fibre manufacture
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
JPH10503431A (ja) † 1994-07-19 1998-03-31 アプライド ケミカル ソルーションズ インコーポレーティッド 化学機械的研磨処理に用いるための装置及び方法
WO1998000676A1 (en) * 1996-06-28 1998-01-08 Intelligent Enclosures Corporation Environmentally enhanced enclosure for managing cmp contamination

Also Published As

Publication number Publication date
EP0919329B1 (de) 2002-09-25
IL126510A0 (en) 1999-08-17
TW397803B (en) 2000-07-11
JP4404391B2 (ja) 2010-01-27
EP0919329B2 (de) 2007-01-03
EP0919329A1 (de) 1999-06-02
DE69808221T3 (de) 2007-09-20
JPH11218099A (ja) 1999-08-10
CA2248910C (en) 2002-04-23
KR19990045566A (ko) 1999-06-25
CA2248910A1 (en) 1999-05-26
DE69808221T2 (de) 2003-05-15
KR100296860B1 (ko) 2001-09-29
SG77654A1 (en) 2001-01-16
US6076541A (en) 2000-06-20
IL126510A (en) 2001-09-13

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS VACCUM.INC. (N. D. GES. D. STAATES DEL, US

8339 Ceased/non-payment of the annual fee