DE69802008D1 - Vorrichtung zur kristallziehung - Google Patents
Vorrichtung zur kristallziehungInfo
- Publication number
- DE69802008D1 DE69802008D1 DE69802008T DE69802008T DE69802008D1 DE 69802008 D1 DE69802008 D1 DE 69802008D1 DE 69802008 T DE69802008 T DE 69802008T DE 69802008 T DE69802008 T DE 69802008T DE 69802008 D1 DE69802008 D1 DE 69802008D1
- Authority
- DE
- Germany
- Prior art keywords
- drawing device
- crystal drawing
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/911—Seed or rod holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/978,334 US5935328A (en) | 1997-11-25 | 1997-11-25 | Apparatus for use in crystal pulling |
PCT/US1998/023805 WO1999027165A1 (en) | 1997-11-25 | 1998-11-10 | Apparatus for use in crystal pulling |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69802008D1 true DE69802008D1 (de) | 2001-11-15 |
DE69802008T2 DE69802008T2 (de) | 2002-02-07 |
Family
ID=25525988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69802008T Expired - Fee Related DE69802008T2 (de) | 1997-11-25 | 1998-11-10 | Vorrichtung zur kristallziehung |
Country Status (9)
Country | Link |
---|---|
US (1) | US5935328A (de) |
EP (1) | EP1034323B1 (de) |
JP (1) | JP2001524446A (de) |
KR (1) | KR20010032413A (de) |
CN (1) | CN1280634A (de) |
DE (1) | DE69802008T2 (de) |
MY (1) | MY133072A (de) |
TW (1) | TW428054B (de) |
WO (1) | WO1999027165A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6776840B1 (en) | 1999-03-22 | 2004-08-17 | Memc Electronic Materials, Inc. | Method and apparatus for controlling diameter of a silicon crystal in a locked seed lift growth process |
US6238483B1 (en) * | 1999-08-31 | 2001-05-29 | Memc Electronic Materials, Inc. | Apparatus for supporting a semiconductor ingot during growth |
WO2001057294A1 (en) | 2000-02-01 | 2001-08-09 | Memc Electronic Materials, Inc. | Method for controlling growth of a silicon crystal to minimize growth rate and diameter deviations |
US6835247B2 (en) * | 2000-10-31 | 2004-12-28 | Advanced Silicon Materials Llc | Rod replenishment system for use in single crystal silicon production |
CN1329558C (zh) * | 2004-08-13 | 2007-08-01 | 山东大学 | 具有阻尼的晶体旋转提拉装置 |
US7465288B2 (en) * | 2005-06-28 | 2008-12-16 | St. Jude Medical, Atrial Fibrillation Division, Inc. | Actuation handle for a catheter |
TWI382107B (zh) * | 2008-05-16 | 2013-01-11 | Sino American Silicon Prod Inc | Long crystal furnace pull crystal rod |
KR20110095290A (ko) * | 2008-11-05 | 2011-08-24 | 엠이엠씨 싱가포르 피티이. 엘티디. | 규소 결정 성장을 위한 규소 분말 용융물의 제조 방법 |
CN101713097B (zh) * | 2009-12-18 | 2011-10-05 | 江苏华盛天龙光电设备股份有限公司 | 一种自动平衡补偿式硅单晶生长用提升装置 |
US9634098B2 (en) | 2013-06-11 | 2017-04-25 | SunEdison Semiconductor Ltd. (UEN201334164H) | Oxygen precipitation in heavily doped silicon wafers sliced from ingots grown by the Czochralski method |
KR101623641B1 (ko) * | 2014-08-04 | 2016-05-23 | 주식회사 엘지실트론 | 잉곳성장장치 |
US11255024B2 (en) * | 2019-06-18 | 2022-02-22 | Linton Crystal Technologies Corp. | Seed lifting and rotating system for use in crystal growth |
US11891721B2 (en) | 2020-12-09 | 2024-02-06 | Linton Kayex Technology Co., Ltd | Spool-balanced seed lift |
CN116180231A (zh) * | 2022-12-30 | 2023-05-30 | 浙江晶盛机电股份有限公司 | 籽晶提升装置及单晶炉 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL128651C (de) * | 1966-01-26 | |||
US4002523A (en) * | 1973-09-12 | 1977-01-11 | Texas Instruments Incorporated | Dislocation-free growth of silicon semiconductor crystals with <110> orientation |
US4235848A (en) * | 1978-06-15 | 1980-11-25 | Apilat Vitaly Y | Apparatus for pulling single crystal from melt on a seed |
US4371502A (en) * | 1980-02-08 | 1983-02-01 | Ferrofluidics Corporation | Crystal growing furnace pulling head |
NL8102566A (nl) * | 1980-06-14 | 1982-01-04 | Leybold Heraeus Gmbh & Co Kg | Inrichting voor het door middel van een opwikkelbaar trekorgaan uit een kroes trekken van een enkel kristal. |
US4301120A (en) * | 1980-09-02 | 1981-11-17 | Ferrofluidics Corporation | Chain introduction means for a crystal growth pulling head |
US4352785A (en) * | 1982-01-04 | 1982-10-05 | Western Electric Co., Inc. | Crystal grower with torque supportive collapsible pulling mechanism |
DE3333960A1 (de) * | 1983-09-20 | 1985-04-04 | Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen | Verfahren zur herstellung von versetzungsfreien einkristallstaeben aus silicium |
DE3414290A1 (de) * | 1984-04-14 | 1985-10-24 | Leybold-Heraeus GmbH, 5000 Köln | Kristallhalter |
JPS6447914A (en) * | 1987-08-18 | 1989-02-22 | Shinetsu Handotai Kk | Apparatus for measuring crystal-rod lifting load |
DE3733562A1 (de) * | 1987-10-03 | 1989-04-20 | Leybold Ag | Vorrichtung zum ziehen eines einkristalls aus einem tiegel mittels eines aufwickelbaren ziehorgans |
JP2714986B2 (ja) * | 1989-06-27 | 1998-02-16 | 東芝セラミックス株式会社 | ワイヤ固定装置 |
DE69017642T2 (de) * | 1989-12-22 | 1995-07-06 | Shinetsu Handotai Kk | Vorrichtung zur Herstellung von Einkristallen nach dem Czochralski-Verfahren. |
DE4329283C2 (de) * | 1993-08-31 | 1997-02-13 | Leybold Ag | Drehkopf für Kristallziehanlagen für die Durchführung des Czochralski-Prozesses |
-
1997
- 1997-11-25 US US08/978,334 patent/US5935328A/en not_active Expired - Fee Related
-
1998
- 1998-11-10 EP EP98956673A patent/EP1034323B1/de not_active Expired - Lifetime
- 1998-11-10 CN CN98811554A patent/CN1280634A/zh active Pending
- 1998-11-10 DE DE69802008T patent/DE69802008T2/de not_active Expired - Fee Related
- 1998-11-10 WO PCT/US1998/023805 patent/WO1999027165A1/en not_active Application Discontinuation
- 1998-11-10 KR KR1020007005653A patent/KR20010032413A/ko not_active Application Discontinuation
- 1998-11-10 JP JP2000522301A patent/JP2001524446A/ja not_active Withdrawn
- 1998-11-17 TW TW087119021A patent/TW428054B/zh active
- 1998-11-19 MY MYPI98005267A patent/MY133072A/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR20010032413A (ko) | 2001-04-16 |
EP1034323A1 (de) | 2000-09-13 |
CN1280634A (zh) | 2001-01-17 |
MY133072A (en) | 2007-10-31 |
JP2001524446A (ja) | 2001-12-04 |
DE69802008T2 (de) | 2002-02-07 |
EP1034323B1 (de) | 2001-10-10 |
WO1999027165A1 (en) | 1999-06-03 |
TW428054B (en) | 2001-04-01 |
US5935328A (en) | 1999-08-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |