DE69721549D1 - Ferrofluidabdichtung - Google Patents

Ferrofluidabdichtung

Info

Publication number
DE69721549D1
DE69721549D1 DE69721549T DE69721549T DE69721549D1 DE 69721549 D1 DE69721549 D1 DE 69721549D1 DE 69721549 T DE69721549 T DE 69721549T DE 69721549 T DE69721549 T DE 69721549T DE 69721549 D1 DE69721549 D1 DE 69721549D1
Authority
DE
Germany
Prior art keywords
shaft
pole piece
pressure environment
magnetic fluid
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69721549T
Other languages
English (en)
Other versions
DE69721549T2 (de
Inventor
Walter Helgeland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku USA Inc
Original Assignee
Rigaku USA Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku USA Inc filed Critical Rigaku USA Inc
Application granted granted Critical
Publication of DE69721549D1 publication Critical patent/DE69721549D1/de
Publication of DE69721549T2 publication Critical patent/DE69721549T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/16Sealings between relatively-moving surfaces
    • F16J15/40Sealings between relatively-moving surfaces by means of fluid
    • F16J15/43Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/16Sealings between relatively-moving surfaces
    • F16J15/162Special parts or details relating to lubrication or cooling of the sealing itself

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Sealing Of Bearings (AREA)
  • Glass Compositions (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE69721549T 1996-10-02 1997-09-26 Ferrofluidabdichtung Expired - Lifetime DE69721549T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US720634 1996-10-02
US08/720,634 US5826885A (en) 1996-10-02 1996-10-02 Magnetic fluid sealing device
PCT/US1997/017337 WO1998014726A1 (en) 1996-10-02 1997-09-26 Magnetic fluid sealing device

Publications (2)

Publication Number Publication Date
DE69721549D1 true DE69721549D1 (en) 2003-06-05
DE69721549T2 DE69721549T2 (de) 2004-04-08

Family

ID=24894728

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69721549T Expired - Lifetime DE69721549T2 (de) 1996-10-02 1997-09-26 Ferrofluidabdichtung

Country Status (6)

Country Link
US (1) US5826885A (de)
EP (1) EP0929764B1 (de)
JP (1) JP4132149B2 (de)
AT (1) ATE239183T1 (de)
DE (1) DE69721549T2 (de)
WO (1) WO1998014726A1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6199867B1 (en) * 1997-09-30 2001-03-13 Rigaku/Usa, Inc. Rotary motion feedthrough device
US5975536A (en) * 1997-09-30 1999-11-02 Rigaku/Usa, Inc. Rotary motion feedthrough with rotating magnet system
US6377658B1 (en) * 2001-07-27 2002-04-23 General Electric Company Seal for liquid metal bearing assembly
US6863736B2 (en) * 2002-05-29 2005-03-08 Ibis Technology Corporation Shaft cooling mechanisms
US6899338B2 (en) * 2003-03-06 2005-05-31 Ferrotec Usa Corporation Ferrofluid seal incorporating multiple types of ferrofluid
KR100973666B1 (ko) * 2003-06-17 2010-08-03 주성엔지니어링(주) 원자층증착장치의 가스밸브 어셈블리
JP4885490B2 (ja) * 2005-06-30 2012-02-29 株式会社リガク 磁性流体シール装置
JP5346945B2 (ja) * 2007-10-18 2013-11-20 リガク イノベイティブ テクノロジーズ インコーポレイテッド 流体量の精密制御を伴う磁性流体シールの製造方法
US9163732B2 (en) * 2007-10-18 2015-10-20 Rigaku Innovative Technologies, Inc. Magnetic fluid seal with precise control of fluid volume at each seal stage
JP5756752B2 (ja) 2008-07-03 2015-07-29 セルカコール・ラボラトリーズ・インコーポレイテッドCercacor Laboratories, Inc. センサ
EP2304282B1 (de) * 2008-07-30 2013-09-25 Rigaku Innovative Technologies Inc. Magnet-fluid-dichtung mit shuntelement
US8515509B2 (en) 2008-08-04 2013-08-20 Cercacor Laboratories, Inc. Multi-stream emitter for noninvasive measurement of blood constituents
JP5024965B2 (ja) * 2008-09-09 2012-09-12 株式会社リガク 磁性流体シール装置
WO2010042718A1 (en) * 2008-10-09 2010-04-15 Rigaku Innovative Technologies, Inc. Magnetic fluid seal with centering of bearing and shaft by compressible member
US8013696B2 (en) * 2008-10-14 2011-09-06 Nexteer (Beijing) Technology Co., Ltd. Magnetic apparatus and method of manufacturing the magnetic apparatus
US20100128848A1 (en) * 2008-11-21 2010-05-27 General Electric Company X-ray tube having liquid lubricated bearings and liquid cooled target
US8688183B2 (en) 2009-09-03 2014-04-01 Ceracor Laboratories, Inc. Emitter driver for noninvasive patient monitor
CN101737497B (zh) * 2010-02-11 2011-08-03 北京交通大学 一种磁性液体与三斜口填料环组合式往复轴密封装置
JP5549552B2 (ja) * 2010-11-12 2014-07-16 東京エレクトロン株式会社 真空処理装置の組み立て方法及び真空処理装置
CN102600781B (zh) * 2011-01-24 2015-09-30 昆山密友机械密封有限公司 结构改良的反应釜冷却系统
CN102537366B (zh) * 2012-01-05 2014-07-09 北京交通大学 分瓣式磁性液体密封装置的密封方法
US9279185B2 (en) * 2012-06-14 2016-03-08 Asm Technology Singapore Pte Ltd Feed-through apparatus for a chemical vapour deposition device
US9322478B2 (en) * 2012-07-31 2016-04-26 General Electric Company Seal system and method for rotary machine
KR101905291B1 (ko) * 2014-05-13 2018-10-05 이글버그만 재팬 가부시키가이샤 자성 유체 실의 조립 방법 및 자성 유체 실
JP6505742B2 (ja) * 2014-10-24 2019-04-24 公益財団法人鉄道総合技術研究所 高速回転用磁性流体シール構造
WO2017082284A1 (ja) * 2015-11-11 2017-05-18 イーグルブルグマンジャパン株式会社 磁性流体シール
CN105952904B (zh) * 2016-07-15 2019-03-29 湖南维格磁流体股份有限公司 真空设备及其磁流体密封传动装置
RU2659305C2 (ru) * 2016-11-07 2018-06-29 Общество с ограниченной ответственностью "ИнТек Техно" (ООО "ИнТек Техно") Магнитожидкостное уплотнение
CN106763214A (zh) * 2017-01-18 2017-05-31 东南大学 一种用于电机后置式电主轴辅助支承的动静压水轴承
CN107893855B (zh) * 2017-12-13 2023-05-02 广西科技大学 一种凹阶梯轴磁流体密封装置
RU2686358C1 (ru) * 2018-01-10 2019-04-25 Федеральное государственное бюджетное образовательное учреждение высшего образования "Ивановская пожарно-спасательная академия Государственной противопожарной службы Министерства Российской Федерации по делам гражданской обороны, чрезвычайным ситуациям и ликвидации последствий стихийных бедствий" Комбинированное магнитожидкостное уплотнение
CN108692026B (zh) * 2018-06-06 2019-04-05 中国石油大学(华东) 一种轴向端面密封静环装置
CN114294424B (zh) * 2021-12-10 2022-06-03 清华大学 磁性液体密封装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3612630A (en) * 1970-01-23 1971-10-12 Ferrofluidics Corp Bearing arrangement with magnetic fluid defining bearing pads
US3734578A (en) * 1970-01-23 1973-05-22 Ferrofluidics Corp Magnetic fluid pneumatic bearings
US3620584A (en) * 1970-05-25 1971-11-16 Ferrofluidics Corp Magnetic fluid seals
US3917538A (en) * 1973-01-17 1975-11-04 Ferrofluidics Corp Ferrofluid compositions and process of making same
US3810055A (en) * 1973-05-21 1974-05-07 T Wright Magnetic holding device
DE2444843C2 (de) * 1973-10-01 1984-03-22 Novatome, 92350 Le-Plessis-Robinson, Hauts-de-Seine Spiralförmige Drehdichtung mit einem Fluid zur Abdichtung einer rotierenden Welle
US4054293A (en) * 1976-12-27 1977-10-18 Borg-Warner Corporation Hybrid magnetic fluid shaft seals
US4281724A (en) * 1979-08-24 1981-08-04 Smith International, Inc. Drilling head
US4309040A (en) * 1980-06-03 1982-01-05 Ferrofluidics Corporation Linear seal apparatus
JPS5950275A (ja) * 1982-09-16 1984-03-23 Rigaku Keisoku Kk 磁性流体軸封装置
US4527805A (en) * 1984-05-03 1985-07-09 Ferrofluidics Corporation High-pressure ferrofluid seal apparatus
US4502700A (en) * 1984-05-03 1985-03-05 Ferrofluidics Corporation Ferrofluid linear seal apparatus
JP2522995B2 (ja) * 1988-08-10 1996-08-07 日本ピラー工業株式会社 磁性流体シ―ル装置
US4865334A (en) * 1988-11-04 1989-09-12 Ferrofluidics Corporation Long-life multi-stage ferrofluid seals incorporating a ferrofluid reservoir
US4995622A (en) * 1989-02-07 1991-02-26 Nippon Pillar Packing Co., Ltd. Magnetic fluid seal device
JPH03172617A (ja) * 1989-11-29 1991-07-26 Toshiba Corp 軸受装置
US5007513A (en) * 1990-04-03 1991-04-16 Lord Corporation Electroactive fluid torque transmission apparatus with ferrofluid seal
US5557900A (en) * 1995-09-15 1996-09-24 The Shane Group, Inc. Playground structural member using recycled plastic

Also Published As

Publication number Publication date
JP4132149B2 (ja) 2008-08-13
EP0929764A1 (de) 1999-07-21
WO1998014726A1 (en) 1998-04-09
JPH10184932A (ja) 1998-07-14
DE69721549T2 (de) 2004-04-08
EP0929764B1 (de) 2003-05-02
US5826885A (en) 1998-10-27
ATE239183T1 (de) 2003-05-15

Similar Documents

Publication Publication Date Title
DE69721549D1 (en) Ferrofluidabdichtung
DE3365535D1 (en) Seal assembly for a valve, valve construction having such a seal assembly, and method fo assembling the valve
DK1372956T3 (da) Anvendelse af inonomerer til forsegling af isolationsmateriale
ATE32253T1 (de) Ferrofluidabdichtung und verfahren zu deren herstellung.
WO2004097873A3 (en) Vacuum encapsulation having an empty chamber
AU1327500A (en) Rotary motion feedthrough device
AU1951692A (en) Mechanical face seals
GB1535056A (en) Measuring instrument
EP0696057A4 (de) Container zum verpacken von halbleiterwafern
ES2167390T3 (es) Bomba para transportar medios corrosivos a alta temperatura.
AU5566299A (en) Integrated barrier fluid sealing apparatus with visual volume indicator
JPS5733222A (en) Sealed antifriction bearing
EP1493950A3 (de) Gleitringdichtung
CN201893519U (zh) 一种气体动密封的液体封气间隔组件
DE59403770D1 (de) Dichtung für einen pneumatisch angetrieben Kolben
EP0182656A3 (de) Einrichtung und Verfahren zur Dichtung mittels Ferrofluid
GB1256144A (en) A face seal for sealing two relatively rotatable members
CN203963025U (zh) 改进密封结构
CN2180845Y (zh) 磁力传动全密封无泄漏阀门
ES8501092A1 (es) Una empaquetadura de valvula.
SU1093850A1 (ru) Комбинированное уплотнение вала
CA2047973A1 (en) Mechanical face seals
CN202041172U (zh) 防水编码器
JPS534206A (en) Ventilator-shaft sealing system
TW200520338A (en) Gas-insulated switchgear

Legal Events

Date Code Title Description
8364 No opposition during term of opposition