DE69721419D1 - Gerät zur optischen differentiellen Messung des Gleitabstandes über einer magnetischen Platte - Google Patents

Gerät zur optischen differentiellen Messung des Gleitabstandes über einer magnetischen Platte

Info

Publication number
DE69721419D1
DE69721419D1 DE69721419T DE69721419T DE69721419D1 DE 69721419 D1 DE69721419 D1 DE 69721419D1 DE 69721419 T DE69721419 T DE 69721419T DE 69721419 T DE69721419 T DE 69721419T DE 69721419 D1 DE69721419 D1 DE 69721419D1
Authority
DE
Germany
Prior art keywords
magnetic plate
sliding distance
distance over
differential measurement
optical differential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69721419T
Other languages
English (en)
Inventor
Huizong Lu
Ali Reza Taheri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69721419D1 publication Critical patent/DE69721419D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/14Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Supporting Of Heads In Record-Carrier Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
DE69721419T 1996-09-23 1997-09-05 Gerät zur optischen differentiellen Messung des Gleitabstandes über einer magnetischen Platte Expired - Lifetime DE69721419D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/710,818 US5703684A (en) 1996-09-23 1996-09-23 Apparatus for optical differential measurement of glide height above a magnetic disk

Publications (1)

Publication Number Publication Date
DE69721419D1 true DE69721419D1 (de) 2003-06-05

Family

ID=24855676

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69721419T Expired - Lifetime DE69721419D1 (de) 1996-09-23 1997-09-05 Gerät zur optischen differentiellen Messung des Gleitabstandes über einer magnetischen Platte

Country Status (6)

Country Link
US (1) US5703684A (de)
EP (1) EP0831464B1 (de)
JP (1) JPH10116480A (de)
KR (1) KR19980024159A (de)
DE (1) DE69721419D1 (de)
TW (1) TW334562B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6105421A (en) 1998-04-16 2000-08-22 Seagate Technology, Inc. Glide height testing using a glide head apparatus with a piezoelectric actuator
US6112582A (en) * 1998-04-16 2000-09-05 Seagate Technology, Inc. Glide head apparatus for testing recording media
US7019840B2 (en) * 2003-06-17 2006-03-28 Seagate Technology Llc Dual-beam interferometer for ultra-smooth surface topographical measurements
US10120196B2 (en) * 2016-09-30 2018-11-06 National Taiwan University Of Science And Technology Optical device

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2133687A1 (de) * 1971-07-07 1973-01-25 Ibm Deutschland Anordnung zur stabilisierung der optischen weglaengendifferenz
FR2300998A2 (fr) * 1975-02-11 1976-09-10 Anvar Dispositif pour la spectrometrie interferentielle a modulation selective
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
US4534649A (en) * 1981-10-30 1985-08-13 Downs Michael J Surface profile interferometer
JPS6220187A (ja) * 1985-07-19 1987-01-28 Toshiba Corp 磁気デイスク装置
US4844616A (en) * 1988-05-31 1989-07-04 International Business Machines Corporation Interferometric dimensional measurement and defect detection method
US5122648A (en) * 1990-06-01 1992-06-16 Wyko Corporation Apparatus and method for automatically focusing an interference microscope
US5280340A (en) * 1991-10-23 1994-01-18 Phase Metrics Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
US5457534A (en) * 1991-10-23 1995-10-10 Phase Metrics Method and apparatus to calibrate intensity and determine fringe order for interferometric measurement of small spacings
JPH0827178B2 (ja) * 1992-11-06 1996-03-21 日本アイ・ビー・エム株式会社 ヘッド浮上量測定装置
JP2980493B2 (ja) * 1993-08-19 1999-11-22 インターナショナル・ビジネス・マシーンズ・コーポレイション 磁気ヘッドの浮上量測定方法
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
US5410402A (en) * 1994-01-24 1995-04-25 Seagate Technology, Inc. Calibration standard for flying height tester having a wedge slider and a transparent disc held together
US5600441A (en) * 1995-01-31 1997-02-04 Zygo Corporation Interferometer and method for measuring the distance of an object surface with respect to the surface of a rotating disk

Also Published As

Publication number Publication date
EP0831464A1 (de) 1998-03-25
KR19980024159A (de) 1998-07-06
JPH10116480A (ja) 1998-05-06
US5703684A (en) 1997-12-30
EP0831464B1 (de) 2003-05-02
TW334562B (en) 1998-06-21

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Legal Events

Date Code Title Description
8332 No legal effect for de