DE69718889T2 - Diagnostic method and device for vacuum pumps - Google Patents

Diagnostic method and device for vacuum pumps

Info

Publication number
DE69718889T2
DE69718889T2 DE1997618889 DE69718889T DE69718889T2 DE 69718889 T2 DE69718889 T2 DE 69718889T2 DE 1997618889 DE1997618889 DE 1997618889 DE 69718889 T DE69718889 T DE 69718889T DE 69718889 T2 DE69718889 T2 DE 69718889T2
Authority
DE
Germany
Prior art keywords
diagnostic method
vacuum pumps
pumps
vacuum
diagnostic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1997618889
Other languages
German (de)
Other versions
DE69718889D1 (en
Inventor
Simon Mauro De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11415164&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69718889(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian SpA filed Critical Varian SpA
Publication of DE69718889D1 publication Critical patent/DE69718889D1/en
Application granted granted Critical
Publication of DE69718889T2 publication Critical patent/DE69718889T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
DE1997618889 1996-12-27 1997-07-12 Diagnostic method and device for vacuum pumps Expired - Lifetime DE69718889T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT96TO001091 IT1289811B1 (en) 1996-12-27 1996-12-27 METHOD AND DIAGNOSTIC APPARATUS FOR VACUUM PUMP.

Publications (2)

Publication Number Publication Date
DE69718889D1 DE69718889D1 (en) 2003-03-13
DE69718889T2 true DE69718889T2 (en) 2003-10-30

Family

ID=11415164

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1997618889 Expired - Lifetime DE69718889T2 (en) 1996-12-27 1997-07-12 Diagnostic method and device for vacuum pumps

Country Status (3)

Country Link
EP (1) EP0851127B1 (en)
DE (1) DE69718889T2 (en)
IT (1) IT1289811B1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006034478A1 (en) * 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Method for determining a statement about a state of a turbomolecular pump and a turbomolecular pump
DE102013223020A1 (en) * 2013-11-12 2015-05-13 Oerlikon Leybold Vacuum Gmbh Method for operating a vacuum pump
DE112012005157B4 (en) * 2011-12-08 2016-07-14 Kyky Technology Co., Ltd. Method and system for synchronously suppressing the subcritical vibration of the magnetic levitation molecular pump rotor

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2314877B1 (en) * 2008-07-14 2018-08-22 Edwards Japan Limited Vacuum pump
GB2507500B (en) * 2012-10-30 2015-06-17 Edwards Ltd Vacuum pump
GB2507501B (en) * 2012-10-30 2015-07-15 Edwards Ltd Vacuum pump
KR101766017B1 (en) 2015-07-01 2017-08-08 현대자동차주식회사 Method for diagnosis abrasion of electric oil pump rotor
US9828992B2 (en) 2015-07-09 2017-11-28 Hamilton Sundstrand Corporation Vane pumps with vane wear detection
GB2551337A (en) * 2016-06-13 2017-12-20 Edwards Ltd Pump assembly, method and computer program
JP7006520B2 (en) * 2018-06-14 2022-01-24 株式会社島津製作所 Vacuum pump and diagnostic system
EP3557072B1 (en) * 2019-02-27 2021-02-24 Pfeiffer Vacuum Gmbh Monitoring the bearing assembly of a vacuum pump
EP3933355A1 (en) 2020-06-30 2022-01-05 Alfa Laval Corporate AB A method for monitoring operating condition of a rotating equipment
FR3117435B1 (en) 2020-12-16 2022-10-28 Psa Automobiles Sa METHOD FOR DIAGNOSING A VACUUM GENERATION FAILURE IN A BRAKING AMPLIFIER

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1241431B (en) 1990-03-09 1994-01-17 Varian Spa PERFECTED TURBOMOLECULAR PUMP.
EP0654163B1 (en) * 1992-08-10 2000-07-26 Dow Deutschland Inc. Process and device for monitoring vibrational excitation of an axial compressor
DE19511430A1 (en) * 1995-03-29 1996-10-02 Leybold Ag Circulation blower, vacuum pump or the like

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006034478A1 (en) * 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Method for determining a statement about a state of a turbomolecular pump and a turbomolecular pump
DE112012005157B4 (en) * 2011-12-08 2016-07-14 Kyky Technology Co., Ltd. Method and system for synchronously suppressing the subcritical vibration of the magnetic levitation molecular pump rotor
DE102013223020A1 (en) * 2013-11-12 2015-05-13 Oerlikon Leybold Vacuum Gmbh Method for operating a vacuum pump

Also Published As

Publication number Publication date
EP0851127B1 (en) 2003-02-05
ITTO961091A1 (en) 1998-06-27
DE69718889D1 (en) 2003-03-13
EP0851127A3 (en) 1999-06-16
IT1289811B1 (en) 1998-10-16
EP0851127A2 (en) 1998-07-01

Similar Documents

Publication Publication Date Title
DE69509327D1 (en) Pumping device and method
DE69717231T2 (en) Vacuum pumping device
DE69505750T2 (en) Valve device for cannula arrangement
DE59807358D1 (en) Process diagnostic system and method
FI972048A0 (en) Background noise removal device
DE69522505D1 (en) Suction device for taking blood
EP0697586A3 (en) Integrated acoustic leak detection processing system
EP1019717A4 (en) Diagnostic device and method
DE69531822T2 (en) BLOOD PUMP DEVICE
IT1277860B1 (en) SYMMETRIZER DEVICE AND PROCEDURE FOR ITS DESIGN.
DE69517459D1 (en) Imaging device and method
DE69711298D1 (en) Cannula device for tracheostomy
DE59906108D1 (en) ACOUSTIC DIAGNOSTIC SYSTEM AND METHOD
NL1001656A1 (en) X-ray inspection system and method.
DE69839809D1 (en) DIAGNOSTIC SYSTEM AND METHOD FOR TELEPHONES TRANSMISSION
DE69529223T2 (en) test method
DE69718889T2 (en) Diagnostic method and device for vacuum pumps
DE69535201D1 (en) Positioning device and method
DE69735422D1 (en) DIAGNOSTIC ULTRASOUND DEVICE
TR199700116A3 (en) Device and method for carrying the clothings.
DE69708472T2 (en) Drive device for mail
FI963172A0 (en) Connection method and device
DE59507918D1 (en) DEVICE FOR REDUCING NOISE IN CENTRIFUGAL PUMPS
DE59503594D1 (en) Flooding device for magnetically mounted vacuum pumps
DE69512696T2 (en) System analysis method

Legal Events

Date Code Title Description
8363 Opposition against the patent