DE69718889D1 - Diagnostic method and device for vacuum pumps - Google Patents

Diagnostic method and device for vacuum pumps

Info

Publication number
DE69718889D1
DE69718889D1 DE69718889T DE69718889T DE69718889D1 DE 69718889 D1 DE69718889 D1 DE 69718889D1 DE 69718889 T DE69718889 T DE 69718889T DE 69718889 T DE69718889 T DE 69718889T DE 69718889 D1 DE69718889 D1 DE 69718889D1
Authority
DE
Germany
Prior art keywords
diagnostic method
vacuum pumps
pumps
vacuum
diagnostic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69718889T
Other languages
German (de)
Other versions
DE69718889T2 (en
Inventor
Simon Mauro De
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11415164&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69718889(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian SpA filed Critical Varian SpA
Application granted granted Critical
Publication of DE69718889D1 publication Critical patent/DE69718889D1/en
Publication of DE69718889T2 publication Critical patent/DE69718889T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
DE1997618889 1996-12-27 1997-07-12 Diagnostic method and device for vacuum pumps Expired - Lifetime DE69718889T2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT96TO001091 IT1289811B1 (en) 1996-12-27 1996-12-27 METHOD AND DIAGNOSTIC APPARATUS FOR VACUUM PUMP.

Publications (2)

Publication Number Publication Date
DE69718889D1 true DE69718889D1 (en) 2003-03-13
DE69718889T2 DE69718889T2 (en) 2003-10-30

Family

ID=11415164

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1997618889 Expired - Lifetime DE69718889T2 (en) 1996-12-27 1997-07-12 Diagnostic method and device for vacuum pumps

Country Status (3)

Country Link
EP (1) EP0851127B1 (en)
DE (1) DE69718889T2 (en)
IT (1) IT1289811B1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006034478A1 (en) 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Method for determining a statement about a state of a turbomolecular pump and a turbomolecular pump
EP2314877B1 (en) * 2008-07-14 2018-08-22 Edwards Japan Limited Vacuum pump
CN102425563B (en) * 2011-12-08 2014-03-12 北京中科科仪股份有限公司 Method and system for synchronously inhibiting subcritical vibration of rotor of magnetic suspension molecular pump
GB2507500B (en) * 2012-10-30 2015-06-17 Edwards Ltd Vacuum pump
GB2528765A (en) * 2012-10-30 2016-02-03 Edwards Ltd Vacuum pump
DE102013223020A1 (en) * 2013-11-12 2015-05-13 Oerlikon Leybold Vacuum Gmbh Method for operating a vacuum pump
KR101766017B1 (en) * 2015-07-01 2017-08-08 현대자동차주식회사 Method for diagnosis abrasion of electric oil pump rotor
US9828992B2 (en) 2015-07-09 2017-11-28 Hamilton Sundstrand Corporation Vane pumps with vane wear detection
GB2551337A (en) * 2016-06-13 2017-12-20 Edwards Ltd Pump assembly, method and computer program
JP7006520B2 (en) * 2018-06-14 2022-01-24 株式会社島津製作所 Vacuum pump and diagnostic system
EP3557072B1 (en) * 2019-02-27 2021-02-24 Pfeiffer Vacuum Gmbh Monitoring the bearing assembly of a vacuum pump
EP3933355A1 (en) 2020-06-30 2022-01-05 Alfa Laval Corporate AB A method for monitoring operating condition of a rotating equipment
FR3117435B1 (en) 2020-12-16 2022-10-28 Psa Automobiles Sa METHOD FOR DIAGNOSING A VACUUM GENERATION FAILURE IN A BRAKING AMPLIFIER

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1241431B (en) * 1990-03-09 1994-01-17 Varian Spa PERFECTED TURBOMOLECULAR PUMP.
KR100304466B1 (en) * 1992-08-10 2001-11-22 스티븐에스. 그레이스 Processes and devices for monitoring the vibrations of axial compressors
DE19511430A1 (en) * 1995-03-29 1996-10-02 Leybold Ag Circulation blower, vacuum pump or the like

Also Published As

Publication number Publication date
DE69718889T2 (en) 2003-10-30
IT1289811B1 (en) 1998-10-16
EP0851127A3 (en) 1999-06-16
ITTO961091A1 (en) 1998-06-27
EP0851127B1 (en) 2003-02-05
EP0851127A2 (en) 1998-07-01

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Legal Events

Date Code Title Description
8363 Opposition against the patent