Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applied Materials Inc
Original Assignee
Applied Materials Inc
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Filing date
Publication date
Priority claimed from US08/861,260external-prioritypatent/US6183354B1/en
Application filed by Applied Materials IncfiledCriticalApplied Materials Inc
Application grantedgrantedCritical
Publication of DE69718750D1publicationCriticalpatent/DE69718750D1/de
B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
B24B37/00—Lapping machines or devices; Accessories
B24B37/27—Work carriers
B24B37/30—Work carriers for single side lapping of plane surfaces
B24B37/32—Retaining rings
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Engineering & Computer Science
(AREA)
Mechanical Engineering
(AREA)
DE69718750T1996-11-081997-11-05Trägerplatte mit einer flexiblen Membran für eine chemisch-mechanische Poliervorrichtung
Expired - LifetimeDE69718750D1
(de)