DE69718750D1 - Carrier plate with a flexible membrane for a chemical mechanical polishing device - Google Patents

Carrier plate with a flexible membrane for a chemical mechanical polishing device

Info

Publication number
DE69718750D1
DE69718750D1 DE69718750T DE69718750T DE69718750D1 DE 69718750 D1 DE69718750 D1 DE 69718750D1 DE 69718750 T DE69718750 T DE 69718750T DE 69718750 T DE69718750 T DE 69718750T DE 69718750 D1 DE69718750 D1 DE 69718750D1
Authority
DE
Germany
Prior art keywords
mechanical polishing
carrier plate
chemical mechanical
flexible membrane
polishing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69718750T
Other languages
German (de)
Inventor
Steven M Zuniga
Birang Manoocher
Hung Chen
Sen-Hou Ko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/861,260 external-priority patent/US6183354B1/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of DE69718750D1 publication Critical patent/DE69718750D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B24B37/32—Retaining rings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
DE69718750T 1996-11-08 1997-11-05 Carrier plate with a flexible membrane for a chemical mechanical polishing device Expired - Lifetime DE69718750D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US74567996A 1996-11-08 1996-11-08
US08/861,260 US6183354B1 (en) 1996-11-08 1997-05-21 Carrier head with a flexible membrane for a chemical mechanical polishing system

Publications (1)

Publication Number Publication Date
DE69718750D1 true DE69718750D1 (en) 2003-03-06

Family

ID=27114506

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69718750T Expired - Lifetime DE69718750D1 (en) 1996-11-08 1997-11-05 Carrier plate with a flexible membrane for a chemical mechanical polishing device

Country Status (1)

Country Link
DE (1) DE69718750D1 (en)

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Legal Events

Date Code Title Description
8332 No legal effect for de