DE69717072T2 - Planheitsmessv0rrichtung für oberflächen mittels moirestreifentechnologie - Google Patents

Planheitsmessv0rrichtung für oberflächen mittels moirestreifentechnologie

Info

Publication number
DE69717072T2
DE69717072T2 DE69717072T DE69717072T DE69717072T2 DE 69717072 T2 DE69717072 T2 DE 69717072T2 DE 69717072 T DE69717072 T DE 69717072T DE 69717072 T DE69717072 T DE 69717072T DE 69717072 T2 DE69717072 T2 DE 69717072T2
Authority
DE
Germany
Prior art keywords
planness
measuring device
strip technology
moire
moire strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69717072T
Other languages
English (en)
Other versions
DE69717072D1 (de
Inventor
A Zwemer
B Hassell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AkroMetrix LLC
Original Assignee
AkroMetrix LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AkroMetrix LLC filed Critical AkroMetrix LLC
Application granted granted Critical
Publication of DE69717072D1 publication Critical patent/DE69717072D1/de
Publication of DE69717072T2 publication Critical patent/DE69717072T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69717072T 1996-01-05 1997-01-02 Planheitsmessv0rrichtung für oberflächen mittels moirestreifentechnologie Expired - Lifetime DE69717072T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US963796P 1996-01-05 1996-01-05
PCT/US1997/000247 WO1997025590A1 (en) 1996-01-05 1997-01-02 System for measuring surface flatness using shadow moire technology

Publications (2)

Publication Number Publication Date
DE69717072D1 DE69717072D1 (de) 2002-12-19
DE69717072T2 true DE69717072T2 (de) 2003-07-17

Family

ID=21738863

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69717072T Expired - Lifetime DE69717072T2 (de) 1996-01-05 1997-01-02 Planheitsmessv0rrichtung für oberflächen mittels moirestreifentechnologie

Country Status (6)

Country Link
US (1) US5835223A (de)
EP (1) EP0876584B1 (de)
CN (1) CN1093254C (de)
AU (1) AU2111497A (de)
DE (1) DE69717072T2 (de)
WO (1) WO1997025590A1 (de)

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EP1857811A3 (de) * 1999-03-18 2008-06-25 JFE Steel Corporation Verfahren und Vorrichtung zur Fehlermarkierung
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FR2817042B1 (fr) * 2000-11-22 2003-06-20 Saint Gobain Procede et dispositif d'analyse de la surface d'un substrat
US6804388B2 (en) * 2001-03-14 2004-10-12 Maniabarco, Inc. Method and apparatus of registering a printed circuit board
KR100479903B1 (ko) * 2002-05-01 2005-03-30 삼성테크윈 주식회사 부품 검사 장치 및 방법
US7341348B2 (en) 2003-03-25 2008-03-11 Bausch & Lomb Incorporated Moiré aberrometer
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FR2870935A1 (fr) 2004-05-25 2005-12-02 Insidix Sarl Dispositif de mesure de deformations de surface
US7289216B2 (en) * 2004-07-19 2007-10-30 Compagnie Plastic Omnium Station for inspecting the painting of motor vehicle parts
CN101287960A (zh) * 2004-10-13 2008-10-15 阿克罗米特里克斯有限责任公司 测量连续移动样品的样品表面平整度的系统与方法
JP4654022B2 (ja) * 2004-12-24 2011-03-16 株式会社サキコーポレーション 基板の外観検査装置
EP2023812B1 (de) 2006-05-19 2016-01-27 The Queen's Medical Center Bewegungsverfolgungssystem für adaptive echtzeitabbildung und -spektroskopie
EP2252856B1 (de) * 2008-02-15 2017-11-01 Pilkington Group Limited Verfahren zur bestimmung der glasoberflächenform und optischen verzerrung durch reflektierte optische bildgebung
US8139231B2 (en) * 2008-05-01 2012-03-20 Cognex Corporation Machine vision technique for manufacturing semiconductor wafers
US8570516B2 (en) * 2008-09-12 2013-10-29 Cognex Corporation Infrared direct illumination machine vision technique for semiconductor processing equipment
US8189194B2 (en) * 2008-09-12 2012-05-29 Cognex Corporation Direct illumination machine vision technique for processing semiconductor wafers
FR2951544A1 (fr) * 2009-10-21 2011-04-22 Saint Gobain Procede d'analyse de la qualite d'un vitrage
US8643678B1 (en) * 2010-12-22 2014-02-04 Google Inc. Shadow generation
EP2747641A4 (de) 2011-08-26 2015-04-01 Kineticor Inc Verfahren, systeme und vorrichtungen zur scan-internen bewegungskorrektur
US8884614B2 (en) 2011-10-31 2014-11-11 General Electric Company Eddy current array probe
CN103134438A (zh) * 2011-12-02 2013-06-05 宁波中嘉科贸有限公司 复合式量测治具
US10327708B2 (en) 2013-01-24 2019-06-25 Kineticor, Inc. Systems, devices, and methods for tracking and compensating for patient motion during a medical imaging scan
US9305365B2 (en) 2013-01-24 2016-04-05 Kineticor, Inc. Systems, devices, and methods for tracking moving targets
US9717461B2 (en) 2013-01-24 2017-08-01 Kineticor, Inc. Systems, devices, and methods for tracking and compensating for patient motion during a medical imaging scan
CN109008972A (zh) 2013-02-01 2018-12-18 凯内蒂科尔股份有限公司 生物医学成像中的实时适应性运动补偿的运动追踪系统
KR20150023205A (ko) * 2013-08-23 2015-03-05 주식회사 고영테크놀러지 기판 검사방법 및 이를 이용한 기판 검사시스템
EP3157422A4 (de) 2014-03-24 2018-01-24 The University of Hawaii Systeme, verfahren und vorrichtungen zur entfernung von prospektiver bewegungskorrektur von medizinischen bildgebungsscans
EP3188660A4 (de) 2014-07-23 2018-05-16 Kineticor, Inc. Systeme, vorrichtungen und verfahren zum verfolgen und kompensieren der bewegung von patienten während einer bildgebenden medizinischen abtastung
US9943247B2 (en) 2015-07-28 2018-04-17 The University Of Hawai'i Systems, devices, and methods for detecting false movements for motion correction during a medical imaging scan
JP6741409B2 (ja) * 2015-09-16 2020-08-19 スリーエム イノベイティブ プロパティズ カンパニー 変形量測定方法、プログラム、サーバ装置、およびシステム
US10716515B2 (en) 2015-11-23 2020-07-21 Kineticor, Inc. Systems, devices, and methods for tracking and compensating for patient motion during a medical imaging scan
CN105716546B (zh) * 2016-02-25 2018-05-18 华中科技大学 一种基于超声光栅的共面度测量系统
CN105841641A (zh) * 2016-06-07 2016-08-10 东莞市三瑞自动化科技有限公司 一种基于激光三角法3d测量仪及平整度检测方法
CN106197361B (zh) * 2016-08-31 2019-07-02 广东宁源科技园发展有限公司 一种不锈钢板表面光洁度在线检测装置
CN108225191A (zh) * 2017-12-29 2018-06-29 中车石家庄车辆有限公司 交叉支撑装置测量控制方法及装置
KR102099011B1 (ko) * 2018-07-10 2020-04-08 문병훈 히터블록을 구비한 리플로우 오븐을 이용한 고온 워페이지 측정장치
KR102099010B1 (ko) * 2018-07-10 2020-04-08 문병훈 리플로우 오븐을 이용한 고온 워페이지 측정장치
KR102099009B1 (ko) * 2018-08-06 2020-04-08 문병훈 다중셀 리플로우 오븐을 이용한 워페이지 측정장치
CN113068326B (zh) * 2021-03-29 2022-09-30 北京小米移动软件有限公司 一种焊接质量处理方法及装置、电路板

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US5307152A (en) * 1992-09-29 1994-04-26 Industrial Technology Institute Moire inspection system
US5367378A (en) * 1993-06-01 1994-11-22 Industrial Technology Institute Highlighted panel inspection
US5581632A (en) * 1994-05-02 1996-12-03 Cognex Corporation Method and apparatus for ball bond inspection system
US5601364A (en) * 1994-06-14 1997-02-11 Georgia Tech Research Corporation Method and apparatus for measuring thermal warpage
JP3404134B2 (ja) * 1994-06-21 2003-05-06 株式会社ニュークリエイション 検査装置

Also Published As

Publication number Publication date
CN1210585A (zh) 1999-03-10
US5835223A (en) 1998-11-10
EP0876584A4 (de) 2000-05-31
CN1093254C (zh) 2002-10-23
EP0876584A1 (de) 1998-11-11
DE69717072D1 (de) 2002-12-19
EP0876584B1 (de) 2002-11-13
WO1997025590A1 (en) 1997-07-17
AU2111497A (en) 1997-08-01

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Legal Events

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8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: PUSCHMANN & BORCHERT, 82041 OBERHACHING