DE69714539D1 - Beleuchtungsvorrichtung mit einer Kurzbogen-Quecksilberlampe - Google Patents

Beleuchtungsvorrichtung mit einer Kurzbogen-Quecksilberlampe

Info

Publication number
DE69714539D1
DE69714539D1 DE69714539T DE69714539T DE69714539D1 DE 69714539 D1 DE69714539 D1 DE 69714539D1 DE 69714539 T DE69714539 T DE 69714539T DE 69714539 T DE69714539 T DE 69714539T DE 69714539 D1 DE69714539 D1 DE 69714539D1
Authority
DE
Germany
Prior art keywords
short
lighting device
mercury lamp
arc mercury
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69714539T
Other languages
English (en)
Other versions
DE69714539T2 (de
Inventor
Yukio Yasuda
Masanori Sugihara
Shouichi Mayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Application granted granted Critical
Publication of DE69714539D1 publication Critical patent/DE69714539D1/de
Publication of DE69714539T2 publication Critical patent/DE69714539T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps
    • H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/84—Lamps with discharge constricted by high pressure
    • H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamp (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69714539T 1996-09-27 1997-09-24 Beleuchtungsvorrichtung mit einer Kurzbogen-Quecksilberlampe Expired - Lifetime DE69714539T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8275282A JP2915362B2 (ja) 1996-09-27 1996-09-27 ショートアーク型水銀ランプ

Publications (2)

Publication Number Publication Date
DE69714539D1 true DE69714539D1 (de) 2002-09-12
DE69714539T2 DE69714539T2 (de) 2003-05-15

Family

ID=17553261

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69714539T Expired - Lifetime DE69714539T2 (de) 1996-09-27 1997-09-24 Beleuchtungsvorrichtung mit einer Kurzbogen-Quecksilberlampe

Country Status (6)

Country Link
US (1) US5920152A (de)
EP (1) EP0833373B1 (de)
JP (1) JP2915362B2 (de)
KR (1) KR100456297B1 (de)
DE (1) DE69714539T2 (de)
TW (1) TW338171B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6653801B1 (en) 1979-11-06 2003-11-25 Matsushita Electric Industrial Co., Ltd. Mercury-free metal-halide lamp
JPH1154091A (ja) * 1997-07-31 1999-02-26 Matsushita Electron Corp マイクロ波放電ランプ
KR20010024584A (ko) * 1998-09-16 2001-03-26 모리시타 요이찌 무수은 메탈할라이드램프
JP2000188085A (ja) * 1998-12-22 2000-07-04 Ushio Inc ショートアーク型水銀ランプおよび紫外線発光装置
EP1152453A4 (de) * 1999-02-05 2003-03-19 Matsushita Electric Ind Co Ltd Hochdruckquecksilberdampfentladungslampe und lampeneinheit
US6479946B2 (en) * 1999-03-05 2002-11-12 Matsushita Electric Industrial Co., Ltd. Method and system for driving high pressure mercury discharge lamp, and image projector
JP3596453B2 (ja) * 2000-09-28 2004-12-02 ウシオ電機株式会社 ショートアーク放電ランプ
JP2002251979A (ja) * 2001-02-23 2002-09-06 Orc Mfg Co Ltd ショートアーク型放電灯
JP3669292B2 (ja) * 2001-06-14 2005-07-06 ウシオ電機株式会社 ショートアーク型放電ランプ
JP2003077416A (ja) * 2001-08-30 2003-03-14 Ushio Inc ショートアーク型水銀放電ランプ
DE10209424A1 (de) * 2002-03-05 2003-09-18 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Quecksilber-Kurzbogenlampe
DE10209426A1 (de) * 2002-03-05 2003-09-18 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Kurzbogen-Hochdruckentladungslampe
EP1779402A4 (de) * 2004-07-13 2010-12-29 Advanced Lighting Tech Inc Hochintensitäts- entladungslampen: lichtbogenröhren und herstellungverfahren dafür
JP2007095453A (ja) * 2005-09-28 2007-04-12 Hitachi Displays Ltd カラー陰極線管の製造方法及びそれに用いる露光装置
JP2009034831A (ja) * 2007-07-31 2009-02-19 Ushio Inc 光照射器及びこの光照射器を使用したプリンタ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5458979A (en) * 1977-10-19 1979-05-12 Toshiba Corp Metal vapor discharge lamp
JPS5486979A (en) * 1977-12-23 1979-07-10 Ushio Electric Inc Discharge lamp
JPS6120326A (ja) * 1984-07-07 1986-01-29 Ushio Inc 水銀灯による半導体ウエハ−材料の露光方法
JPS622443A (ja) * 1985-06-28 1987-01-08 Ushio Inc フオトリソグラフイ
US4988918A (en) * 1988-06-23 1991-01-29 Toshiba Lighting And Technology Corporation Short arc discharge lamp
JP2732453B2 (ja) * 1989-06-05 1998-03-30 ウシオ電機株式会社 縮小ミラープロジェクション用水銀希ガス放電灯
JPH087835A (ja) * 1994-06-21 1996-01-12 Ushio Inc 半導体露光用放電ランプ
JP3156904B2 (ja) * 1994-09-06 2001-04-16 ウシオ電機株式会社 水銀放電ランプ
EP0714118B1 (de) * 1994-11-25 2002-07-24 Ushiodenki Kabushiki Kaisha Metallhalogenidlampe vom Kurz-Bogen Typ

Also Published As

Publication number Publication date
KR19980025074A (ko) 1998-07-06
EP0833373A3 (de) 1998-06-10
JP2915362B2 (ja) 1999-07-05
TW338171B (en) 1998-08-11
DE69714539T2 (de) 2003-05-15
EP0833373B1 (de) 2002-08-07
KR100456297B1 (ko) 2004-12-30
EP0833373A2 (de) 1998-04-01
US5920152A (en) 1999-07-06
JPH10112289A (ja) 1998-04-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition