DE69714539D1 - Beleuchtungsvorrichtung mit einer Kurzbogen-Quecksilberlampe - Google Patents
Beleuchtungsvorrichtung mit einer Kurzbogen-QuecksilberlampeInfo
- Publication number
- DE69714539D1 DE69714539D1 DE69714539T DE69714539T DE69714539D1 DE 69714539 D1 DE69714539 D1 DE 69714539D1 DE 69714539 T DE69714539 T DE 69714539T DE 69714539 T DE69714539 T DE 69714539T DE 69714539 D1 DE69714539 D1 DE 69714539D1
- Authority
- DE
- Germany
- Prior art keywords
- short
- lighting device
- mercury lamp
- arc mercury
- arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
- H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
- H01J61/073—Main electrodes for high-pressure discharge lamps
- H01J61/0732—Main electrodes for high-pressure discharge lamps characterised by the construction of the electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- General Physics & Mathematics (AREA)
- Discharge Lamp (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8275282A JP2915362B2 (ja) | 1996-09-27 | 1996-09-27 | ショートアーク型水銀ランプ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69714539D1 true DE69714539D1 (de) | 2002-09-12 |
DE69714539T2 DE69714539T2 (de) | 2003-05-15 |
Family
ID=17553261
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69714539T Expired - Lifetime DE69714539T2 (de) | 1996-09-27 | 1997-09-24 | Beleuchtungsvorrichtung mit einer Kurzbogen-Quecksilberlampe |
Country Status (6)
Country | Link |
---|---|
US (1) | US5920152A (de) |
EP (1) | EP0833373B1 (de) |
JP (1) | JP2915362B2 (de) |
KR (1) | KR100456297B1 (de) |
DE (1) | DE69714539T2 (de) |
TW (1) | TW338171B (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6653801B1 (en) | 1979-11-06 | 2003-11-25 | Matsushita Electric Industrial Co., Ltd. | Mercury-free metal-halide lamp |
JPH1154091A (ja) * | 1997-07-31 | 1999-02-26 | Matsushita Electron Corp | マイクロ波放電ランプ |
KR20010024584A (ko) * | 1998-09-16 | 2001-03-26 | 모리시타 요이찌 | 무수은 메탈할라이드램프 |
JP2000188085A (ja) * | 1998-12-22 | 2000-07-04 | Ushio Inc | ショートアーク型水銀ランプおよび紫外線発光装置 |
EP1152453A4 (de) * | 1999-02-05 | 2003-03-19 | Matsushita Electric Ind Co Ltd | Hochdruckquecksilberdampfentladungslampe und lampeneinheit |
US6479946B2 (en) * | 1999-03-05 | 2002-11-12 | Matsushita Electric Industrial Co., Ltd. | Method and system for driving high pressure mercury discharge lamp, and image projector |
JP3596453B2 (ja) * | 2000-09-28 | 2004-12-02 | ウシオ電機株式会社 | ショートアーク放電ランプ |
JP2002251979A (ja) * | 2001-02-23 | 2002-09-06 | Orc Mfg Co Ltd | ショートアーク型放電灯 |
JP3669292B2 (ja) * | 2001-06-14 | 2005-07-06 | ウシオ電機株式会社 | ショートアーク型放電ランプ |
JP2003077416A (ja) * | 2001-08-30 | 2003-03-14 | Ushio Inc | ショートアーク型水銀放電ランプ |
DE10209424A1 (de) * | 2002-03-05 | 2003-09-18 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Quecksilber-Kurzbogenlampe |
DE10209426A1 (de) * | 2002-03-05 | 2003-09-18 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Kurzbogen-Hochdruckentladungslampe |
EP1779402A4 (de) * | 2004-07-13 | 2010-12-29 | Advanced Lighting Tech Inc | Hochintensitäts- entladungslampen: lichtbogenröhren und herstellungverfahren dafür |
JP2007095453A (ja) * | 2005-09-28 | 2007-04-12 | Hitachi Displays Ltd | カラー陰極線管の製造方法及びそれに用いる露光装置 |
JP2009034831A (ja) * | 2007-07-31 | 2009-02-19 | Ushio Inc | 光照射器及びこの光照射器を使用したプリンタ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5458979A (en) * | 1977-10-19 | 1979-05-12 | Toshiba Corp | Metal vapor discharge lamp |
JPS5486979A (en) * | 1977-12-23 | 1979-07-10 | Ushio Electric Inc | Discharge lamp |
JPS6120326A (ja) * | 1984-07-07 | 1986-01-29 | Ushio Inc | 水銀灯による半導体ウエハ−材料の露光方法 |
JPS622443A (ja) * | 1985-06-28 | 1987-01-08 | Ushio Inc | フオトリソグラフイ |
US4988918A (en) * | 1988-06-23 | 1991-01-29 | Toshiba Lighting And Technology Corporation | Short arc discharge lamp |
JP2732453B2 (ja) * | 1989-06-05 | 1998-03-30 | ウシオ電機株式会社 | 縮小ミラープロジェクション用水銀希ガス放電灯 |
JPH087835A (ja) * | 1994-06-21 | 1996-01-12 | Ushio Inc | 半導体露光用放電ランプ |
JP3156904B2 (ja) * | 1994-09-06 | 2001-04-16 | ウシオ電機株式会社 | 水銀放電ランプ |
EP0714118B1 (de) * | 1994-11-25 | 2002-07-24 | Ushiodenki Kabushiki Kaisha | Metallhalogenidlampe vom Kurz-Bogen Typ |
-
1996
- 1996-09-27 JP JP8275282A patent/JP2915362B2/ja not_active Expired - Lifetime
-
1997
- 1997-07-01 TW TW086109270A patent/TW338171B/zh not_active IP Right Cessation
- 1997-09-24 DE DE69714539T patent/DE69714539T2/de not_active Expired - Lifetime
- 1997-09-24 EP EP97116647A patent/EP0833373B1/de not_active Expired - Lifetime
- 1997-09-26 US US08/938,749 patent/US5920152A/en not_active Expired - Lifetime
- 1997-09-27 KR KR1019970049386A patent/KR100456297B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR19980025074A (ko) | 1998-07-06 |
EP0833373A3 (de) | 1998-06-10 |
JP2915362B2 (ja) | 1999-07-05 |
TW338171B (en) | 1998-08-11 |
DE69714539T2 (de) | 2003-05-15 |
EP0833373B1 (de) | 2002-08-07 |
KR100456297B1 (ko) | 2004-12-30 |
EP0833373A2 (de) | 1998-04-01 |
US5920152A (en) | 1999-07-06 |
JPH10112289A (ja) | 1998-04-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |