DE69710021T2 - Verfahren zum Herstellen eines Keramik-Metall-Verbundsubstrat und Hartlotwerkstoff zur Verwendung in diesem Verfahren - Google Patents

Verfahren zum Herstellen eines Keramik-Metall-Verbundsubstrat und Hartlotwerkstoff zur Verwendung in diesem Verfahren

Info

Publication number
DE69710021T2
DE69710021T2 DE69710021T DE69710021T DE69710021T2 DE 69710021 T2 DE69710021 T2 DE 69710021T2 DE 69710021 T DE69710021 T DE 69710021T DE 69710021 T DE69710021 T DE 69710021T DE 69710021 T2 DE69710021 T2 DE 69710021T2
Authority
DE
Germany
Prior art keywords
ceramic
manufacturing
brazing material
metal composite
composite substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69710021T
Other languages
English (en)
Other versions
DE69710021D1 (de
Inventor
Masami Sakuraba
Masami Kimura
Junji Nakamura
Takashi Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dowa Holdings Co Ltd
Original Assignee
Dowa Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP30385496A external-priority patent/JP3896432B2/ja
Application filed by Dowa Mining Co Ltd filed Critical Dowa Mining Co Ltd
Application granted granted Critical
Publication of DE69710021D1 publication Critical patent/DE69710021D1/de
Publication of DE69710021T2 publication Critical patent/DE69710021T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/3006—Ag as the principal constituent
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24—Selection of soldering or welding materials proper
    • B23K35/32—Selection of soldering or welding materials proper with the principal constituent melting at more than 1550 degrees C
    • B23K35/327—Selection of soldering or welding materials proper with the principal constituent melting at more than 1550 degrees C comprising refractory compounds, e.g. carbides
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/125—Metallic interlayers based on noble metals, e.g. silver
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/126—Metallic interlayers wherein the active component for bonding is not the largest fraction of the interlayer
    • C04B2237/127—The active component for bonding being a refractory metal
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/407—Copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/706—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the metallic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/86—Joining of two substrates at their largest surfaces, one surface being complete joined and covered, the other surface not, e.g. a small plate joined at it's largest surface on top of a larger plate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Products (AREA)
DE69710021T 1996-10-30 1997-05-05 Verfahren zum Herstellen eines Keramik-Metall-Verbundsubstrat und Hartlotwerkstoff zur Verwendung in diesem Verfahren Expired - Lifetime DE69710021T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30385496A JP3896432B2 (ja) 1995-11-08 1996-10-30 金属−セラミックス複合基板の製造方法並びにそれに用いるろう材

Publications (2)

Publication Number Publication Date
DE69710021D1 DE69710021D1 (de) 2002-03-14
DE69710021T2 true DE69710021T2 (de) 2002-10-02

Family

ID=17926102

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69710021T Expired - Lifetime DE69710021T2 (de) 1996-10-30 1997-05-05 Verfahren zum Herstellen eines Keramik-Metall-Verbundsubstrat und Hartlotwerkstoff zur Verwendung in diesem Verfahren

Country Status (3)

Country Link
US (1) US5955686A (de)
EP (1) EP0839598B1 (de)
DE (1) DE69710021T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016062501A1 (de) * 2014-10-21 2016-04-28 Robert Bosch Gmbh Schaltungsträger und schaltungsmodul

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3670416B2 (ja) 1995-11-01 2005-07-13 日本碍子株式会社 金属包含材および静電チャック
JP3682552B2 (ja) * 1997-03-12 2005-08-10 同和鉱業株式会社 金属−セラミックス複合基板の製造方法
DE19842276A1 (de) * 1998-09-16 2000-03-30 Bosch Gmbh Robert Paste zum Verschweißen von Keramiken mit Metallen und Verfahren zur Herstellung einer Schweißverbindung
AT408345B (de) 1999-11-17 2001-10-25 Electrovac Verfahren zur festlegung eines aus metall-matrix- composite-(mmc-) materiales gebildeten körpers auf einem keramischen körper
US6485816B2 (en) * 2000-01-31 2002-11-26 Ngk Insulators, Ltd. Laminated radiation member, power semiconductor apparatus, and method for producing the same
JP5128829B2 (ja) * 2007-02-28 2013-01-23 Ｄｏｗａメタルテック株式会社 金属−セラミックス接合基板およびそれに用いるろう材
US7691488B2 (en) * 2007-06-11 2010-04-06 Battelle Memorial Institute Diffusion barriers in modified air brazes
EP2416356A1 (de) 2009-03-30 2012-02-08 Tokuyama Corporation Verfahren zur herstellung eines metallisierten substrats und metallisiertes substrat
US9374893B2 (en) * 2010-03-02 2016-06-21 Tokuyama Corporation Production method of metallized substrate
US8757471B2 (en) 2012-08-27 2014-06-24 General Electric Company Active braze techniques on beta-alumina
JP6079505B2 (ja) 2013-08-26 2017-02-15 三菱マテリアル株式会社 接合体及びパワーモジュール用基板
CN110524079A (zh) * 2019-07-31 2019-12-03 常熟市银洋陶瓷器件有限公司 用于金属化陶瓷和金属零件钎焊的银铜焊料层制备方法
JP2021159926A (ja) * 2020-03-31 2021-10-11 Ｄｏｗａメタルテック株式会社 ろう材およびその製造方法並びに金属−セラミックス接合基板の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3570110A (en) * 1966-03-24 1971-03-16 Mallory & Co Inc P R Method of brazing
US3970590A (en) * 1975-06-23 1976-07-20 E. I. Du Pont De Nemours And Company Gold conductor compositions
DE3014645C2 (de) * 1980-04-16 1982-12-02 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Metall-Keramik-Bauteil und Verfahren zu seiner Herstellung
ATE36131T1 (de) * 1983-09-26 1988-08-15 Gte Prod Corp Duktile niedrigschmelzende hartloetlegierung.
US4591535A (en) * 1984-06-20 1986-05-27 Gte Products Corporation Method of brazing ceramics using active brazing alloys
US4735866A (en) * 1985-12-30 1988-04-05 The United States Of America As Represented By The United States Department Of Energy Copper-silver-titanium-tin filler metal for direct brazing of structural ceramics
JPH0829990B2 (ja) * 1988-09-21 1996-03-27 日本特殊陶業株式会社 セラミックスと金属との接合体
JPH0346705A (ja) * 1989-07-14 1991-02-28 Showa Denko Kk 銅ペースト
JPH0346706A (ja) * 1989-07-14 1991-02-28 Showa Denko Kk 銅ペースト
JPH0714015B2 (ja) * 1989-09-13 1995-02-15 電気化学工業株式会社 銅回路を有する窒化アルミニウム基板の製法
US5186380A (en) * 1991-08-15 1993-02-16 Handy & Harman Titanium hydride coated brazing product
JPH0897554A (ja) * 1994-09-22 1996-04-12 Dowa Mining Co Ltd セラミックス配線基板の製造法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016062501A1 (de) * 2014-10-21 2016-04-28 Robert Bosch Gmbh Schaltungsträger und schaltungsmodul

Also Published As

Publication number Publication date
EP0839598A3 (de) 1998-09-09
EP0839598B1 (de) 2002-01-23
US5955686A (en) 1999-09-21
EP0839598A2 (de) 1998-05-06
DE69710021D1 (de) 2002-03-14

Similar Documents

Publication Publication Date Title
DE69817648D1 (de) Verfahren zum Herstellen eines Keramik-Metall-Verbundsubstrats und Hartlotwerkstoff zum Verwenden in diesem Verfahren
DE69503285D1 (de) Diamantwafer und Verfahren zur Herstellung eines Diamantwafers
DE69738870D1 (de) Verbundbahn aus vliesstoff und zugehöriges verfahren zum herstellen
DE69724632D1 (de) Zusammensetzung und methode zum polieren eines komposits
DE69943235D1 (de) Verfahren zur herstellung eines hydriertes und oxydiertes silziumkarbidschicht
DE69524134D1 (de) Vorrichtung und Verfahren zum Auftrag eines aus Partikeln bestehenden Materials in ein Verbundsubstrat
DE69710021D1 (de) Verfahren zum Herstellen eines Keramik-Metall-Verbundsubstrat und Hartlotwerkstoff zur Verwendung in diesem Verfahren
DE59709577D1 (de) Schichtmaterial sowie vorrichtung und verfahren zum herstellen von schichtmaterial
DE69530161D1 (de) Diamant-Einkristall mit niedriger Fehlerdichte und Verfahren zu dessen Herstellung
DE69912920D1 (de) Poröse keramikschicht, verfahren zum herstellen derselben, und unterlage zur verwendung in dem verfahren
DE59604921D1 (de) Schichtartig aufgebaute bleche mit aufgewalztem lotmaterial und verfahren zum herstellen eines wabenkörpers daraus
DE69527697T2 (de) Form zum Herstellen mehrschichtiger Gegenstände und Verfahren zum Herstellen mehrschichtiger Gegenstände
DE69528854T2 (de) Beschichtetes Aluminium-enthaltendes Material und Verfahren zur dessen Herstellung
DE69509564T2 (de) Verfahren zur Herstellung und Polierung eines flaches Diamantfilmes
DE69622839T2 (de) Verfahren zur verbesserung der retention in der papierherstellung und verwendung eines dafür geeigneten retentionsmittels
DE19781637T1 (de) Verfahren zum Herstellen eines laminierten Holzstrukturbauteils und Holzstrukturbauteil
DE69830790D1 (de) Verfahren und vorrichtung zur herstellung eines schaltungsbildenden substrats und schaltungsbildendes substratmaterial
DE69702727D1 (de) Fluorsiliconkautschukzusammensetzung und Verfahren zum Verkleben mit einem Substrat
DE59806064D1 (de) Verfahren zur aufbringung eines schützenden und dekorativen schichtenverbundes
DE69707402D1 (de) Verfahren zur Herstellung eines laminierten Gegenstandes und Vorrichtung zur Herstellung desselben
DE69706457T2 (de) Ein verbundener Gegenstand, und ein Verfahren zur Herstellung eines verbundenen Gegenstandes unter Verwendung eines Hartlotes
DE69526423D1 (de) Verfahren zur beschichtung eines lumineszenten materials
DE69902105D1 (de) Biozides material und verfahren zur dessen herstellung
ATA71598A (de) Verfahren zur verbesserung der kontur gewalzten materials und zur erhöhung der gewalzten materiallänge
DE69715589T2 (de) Verfahren zur herstellung und zum transferieren metallischer tropfen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition