DE69703264D1 - Laminat aus einem Fotoresistschichtträger und einem Fotoresist - Google Patents

Laminat aus einem Fotoresistschichtträger und einem Fotoresist

Info

Publication number
DE69703264D1
DE69703264D1 DE69703264T DE69703264T DE69703264D1 DE 69703264 D1 DE69703264 D1 DE 69703264D1 DE 69703264 T DE69703264 T DE 69703264T DE 69703264 T DE69703264 T DE 69703264T DE 69703264 D1 DE69703264 D1 DE 69703264D1
Authority
DE
Germany
Prior art keywords
photoresist
laminate
base
photoresist base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69703264T
Other languages
English (en)
Other versions
DE69703264T2 (de
Inventor
Takafumi Kudo
Tetsuo Yoshida
Yukihiko Minamihira
Kazutaka Masaoka
Youji Tanaka
Noriyo Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teijin Ltd
Original Assignee
Teijin Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP12457796A external-priority patent/JP3364380B2/ja
Priority claimed from JP12457696A external-priority patent/JP3150902B2/ja
Application filed by Teijin Ltd filed Critical Teijin Ltd
Publication of DE69703264D1 publication Critical patent/DE69703264D1/de
Application granted granted Critical
Publication of DE69703264T2 publication Critical patent/DE69703264T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
    • C08G63/02—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds
    • C08G63/12—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds derived from polycarboxylic acids and polyhydroxy compounds
    • C08G63/16—Dicarboxylic acids and dihydroxy compounds
    • C08G63/18—Dicarboxylic acids and dihydroxy compounds the acids or hydroxy compounds containing carbocyclic rings
    • C08G63/181—Acids containing aromatic rings
    • C08G63/183—Terephthalic acids
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2367/00—Characterised by the use of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Derivatives of such polymers
    • C08J2367/02—Polyesters derived from dicarboxylic acids and dihydroxy compounds
    • C08J2367/03—Polyesters derived from dicarboxylic acids and dihydroxy compounds the dicarboxylic acids and dihydroxy compounds having the hydroxy and the carboxyl groups directly linked to aromatic rings
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K2201/00—Specific properties of additives
    • C08K2201/002—Physical properties
    • C08K2201/005—Additives being defined by their particle size in general
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L67/00—Compositions of polyesters obtained by reactions forming a carboxylic ester link in the main chain; Compositions of derivatives of such polymers
    • C08L67/02—Polyesters derived from dicarboxylic acids and dihydroxy compounds
    • C08L67/03—Polyesters derived from dicarboxylic acids and dihydroxy compounds the dicarboxylic acids and dihydroxy compounds having the carboxyl- and the hydroxy groups directly linked to aromatic rings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Architecture (AREA)
  • Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Materials Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
DE69703264T 1996-05-20 1997-05-12 Laminat aus einem Fotoresistschichtträger und einem Fotoresist Expired - Fee Related DE69703264T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12457796A JP3364380B2 (ja) 1996-05-20 1996-05-20 ポリエステルフイルム
JP12457696A JP3150902B2 (ja) 1996-05-20 1996-05-20 ポリエステルフイルム

Publications (2)

Publication Number Publication Date
DE69703264D1 true DE69703264D1 (de) 2000-11-16
DE69703264T2 DE69703264T2 (de) 2001-05-17

Family

ID=26461248

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69703264T Expired - Fee Related DE69703264T2 (de) 1996-05-20 1997-05-12 Laminat aus einem Fotoresistschichtträger und einem Fotoresist
DE69715676T Expired - Fee Related DE69715676T2 (de) 1996-05-20 1997-05-12 Fotoresistschichttragender Film

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69715676T Expired - Fee Related DE69715676T2 (de) 1996-05-20 1997-05-12 Fotoresistschichttragender Film

Country Status (5)

Country Link
US (2) US5994027A (de)
EP (2) EP0961173B1 (de)
KR (1) KR100287237B1 (de)
DE (2) DE69703264T2 (de)
TW (1) TW477916B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0961173B1 (de) * 1996-05-20 2002-09-18 Teijin Limited Fotoresistschichttragender Film
KR100370557B1 (ko) * 1998-10-27 2003-03-17 에스케이씨 주식회사 포토레지스트 필름의 베이스 필름용 폴리에스테르 필름
TW403952B (en) * 1998-11-26 2000-09-01 United Microelectronics Corp The method of removing the photoresist
US6896941B1 (en) * 1999-06-01 2005-05-24 Teijin Limited Polyester film for use as an ink image receiving base film and ink
KR100687984B1 (ko) 2003-09-05 2007-02-27 주식회사 코오롱 저휘발성 방향족 폴리에스테르 수지조성물

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS566498A (en) * 1979-06-26 1981-01-23 Hitachi Chemical Co Ltd Method of manufacturing flexible printed circuit board
JPH07106394B2 (ja) * 1989-05-17 1995-11-15 東洋製罐株式会社 絞りしごき缶の製造方法
JP3016943B2 (ja) * 1992-02-12 2000-03-06 帝人株式会社 金属板貼合せ加工用ポリエステルフイルム
EP0576682B1 (de) * 1992-01-16 1998-09-02 Teijin Limited Polyesterfilm zur metallfolienlaminierung sowie anwendung derselben
EP0798112B1 (de) * 1992-07-22 2003-09-17 Teijin Limited Biaxial orientierter mehrschichtiger Polyesterfilm, geeignet zum Kleben auf Metallblech
WO1995015993A1 (fr) * 1993-12-10 1995-06-15 Teijin Limited Film transparent permettant de former une couche de revetement sur une boite metallique
JPH0996907A (ja) * 1995-10-02 1997-04-08 Tamapori Kk 感光性フィルム
EP0961173B1 (de) * 1996-05-20 2002-09-18 Teijin Limited Fotoresistschichttragender Film

Also Published As

Publication number Publication date
DE69715676T2 (de) 2003-05-22
DE69715676D1 (de) 2002-10-24
TW477916B (en) 2002-03-01
EP0809151A1 (de) 1997-11-26
EP0961173A1 (de) 1999-12-01
KR970074833A (ko) 1997-12-10
US5994027A (en) 1999-11-30
EP0961173B1 (de) 2002-09-18
EP0809151B1 (de) 2000-10-11
US6140013A (en) 2000-10-31
KR100287237B1 (ko) 2001-04-16
DE69703264T2 (de) 2001-05-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee