DE69635841D1 - Integriertes magnetisches schwebe- und drehsystem - Google Patents

Integriertes magnetisches schwebe- und drehsystem

Info

Publication number
DE69635841D1
DE69635841D1 DE69635841T DE69635841T DE69635841D1 DE 69635841 D1 DE69635841 D1 DE 69635841D1 DE 69635841 T DE69635841 T DE 69635841T DE 69635841 T DE69635841 T DE 69635841T DE 69635841 D1 DE69635841 D1 DE 69635841D1
Authority
DE
Germany
Prior art keywords
rotary system
integrated magnetic
magnetic tilt
tilt
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69635841T
Other languages
English (en)
Other versions
DE69635841T2 (de
Inventor
B Nichols
Shankar Jagannathan
Kevin Leary
David Eisenhaure
William Stanton
Richard Hockney
James Downer
Vijay Gondhalekar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SatCon Technology Corp
Original Assignee
SatCon Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SatCon Technology Corp filed Critical SatCon Technology Corp
Application granted granted Critical
Publication of DE69635841D1 publication Critical patent/DE69635841D1/de
Publication of DE69635841T2 publication Critical patent/DE69635841T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
    • F16C32/0448—Determination of the actual position of the moving member, e.g. details of sensors by using the electromagnet itself as sensor, e.g. sensorless magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/047—Details of housings; Mounting of active magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0493—Active magnetic bearings for rotary movement integrated in an electrodynamic machine, e.g. self-bearing motor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K19/00—Synchronous motors or generators
    • H02K19/02—Synchronous motors
    • H02K19/10—Synchronous motors for multi-phase current
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K21/00—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets
    • H02K21/38—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with rotating flux distributors, and armatures and magnets both stationary
    • H02K21/44—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with rotating flux distributors, and armatures and magnets both stationary with armature windings wound upon the magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2380/00—Electrical apparatus
    • F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K17/00—Asynchronous induction motors; Asynchronous induction generators
    • H02K17/02—Asynchronous induction motors
    • H02K17/12—Asynchronous induction motors for multi-phase current

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Induction Machinery (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • Synchronous Machinery (AREA)
DE69635841T 1995-10-26 1996-10-18 Integriertes magnetisches schwebe- und drehsystem Expired - Fee Related DE69635841T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US548692 1995-10-26
US08/548,692 US5818137A (en) 1995-10-26 1995-10-26 Integrated magnetic levitation and rotation system
PCT/US1996/016829 WO1997015978A1 (en) 1995-10-26 1996-10-18 Integrated magnetic levitation and rotation system

Publications (2)

Publication Number Publication Date
DE69635841D1 true DE69635841D1 (de) 2006-04-27
DE69635841T2 DE69635841T2 (de) 2006-09-28

Family

ID=24189988

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69635841T Expired - Fee Related DE69635841T2 (de) 1995-10-26 1996-10-18 Integriertes magnetisches schwebe- und drehsystem

Country Status (8)

Country Link
US (2) US5818137A (de)
EP (2) EP1655820A3 (de)
JP (1) JP4165903B2 (de)
KR (1) KR100423366B1 (de)
CA (1) CA2233707C (de)
DE (1) DE69635841T2 (de)
MX (1) MX9803156A (de)
WO (1) WO1997015978A1 (de)

Families Citing this family (110)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3696398B2 (ja) * 1997-04-28 2005-09-14 Ｎｔｎ株式会社 静圧磁気複合軸受およびスピンドル装置
US6157106A (en) * 1997-05-16 2000-12-05 Applied Materials, Inc. Magnetically-levitated rotor system for an RTP chamber
US5951770A (en) 1997-06-04 1999-09-14 Applied Materials, Inc. Carousel wafer transfer system
US6575737B1 (en) 1997-06-04 2003-06-10 Applied Materials, Inc. Method and apparatus for improved substrate handling
US6468353B1 (en) 1997-06-04 2002-10-22 Applied Materials, Inc. Method and apparatus for improved substrate handling
DE19726352A1 (de) * 1997-06-21 1999-01-07 Wolfgang Dr Amrhein Magnetgelagerter elektrischer Antrieb mit konzentrierten Wicklungen
JP3672416B2 (ja) * 1997-06-27 2005-07-20 株式会社荏原製作所 スピン処理装置
DE59712899D1 (de) 1997-08-25 2008-01-10 Lust Antriebstechnik Gmbh Magnetgelagerte Rotationsanordnung
EP0899855B1 (de) 1997-08-25 2006-03-08 Levitronix LLC Magnetgelagerte Rotationsanordnung
US6485531B1 (en) * 1998-09-15 2002-11-26 Levitronix Llc Process chamber
EP0989594B1 (de) * 1998-09-15 2019-06-19 Levitronix Technologies, LLC Prozesskammer
US6535628B2 (en) * 1998-10-15 2003-03-18 Applied Materials, Inc. Detection of wafer fragments in a wafer processing apparatus
JP2000145774A (ja) * 1998-11-17 2000-05-26 Koyo Seiko Co Ltd 制御型磁気軸受装置
US6131459A (en) * 1999-04-26 2000-10-17 P. D. Coop, Inc. Linearized ultrasound beam alignment servo
US6268673B1 (en) * 1999-05-05 2001-07-31 The United States Of America As Represented By The United States Department Of Energy Control coil arrangement for a rotating machine rotor
JP3923696B2 (ja) * 1999-07-19 2007-06-06 株式会社荏原製作所 基板回転装置
US6718198B2 (en) 1999-08-24 2004-04-06 Cardiac Pacemakers, Inc. Arrhythmia display
AU2001268687A1 (en) * 2000-06-21 2002-01-02 Trinity Flywheel Power Magnetic bearing having features for low power consumption, reduced weight, and fault-tolerant operation
WO2001099257A1 (en) * 2000-06-22 2001-12-27 Applied Materials, Inc. Gas bearing rotation assemblies for substrate processing systems
US6359357B1 (en) 2000-08-18 2002-03-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Combination radial and thrust magnetic bearing
JP2002093724A (ja) * 2000-09-18 2002-03-29 Tokyo Electron Ltd 熱処理装置
US7884522B1 (en) 2004-10-25 2011-02-08 Novatorque, Inc. Stator and rotor-stator structures for electrodynamic machines
US6665558B2 (en) 2000-12-15 2003-12-16 Cardiac Pacemakers, Inc. System and method for correlation of patient health information and implant device data
US6770146B2 (en) * 2001-02-02 2004-08-03 Mattson Technology, Inc. Method and system for rotating a semiconductor wafer in processing chambers
KR100434200B1 (ko) * 2001-02-19 2004-06-04 김대곤 셀프베어링 스텝모터 시스템 및 그 제어방법
US20050077793A1 (en) * 2001-10-05 2005-04-14 Seamus Garvey Electrical machine having capability to generate lateral forces
US6603230B1 (en) 2002-01-30 2003-08-05 Honeywell International, Inc. Active magnetic bearing assembly using permanent magnet biased homopolar and reluctance centering effects
US6800833B2 (en) * 2002-03-29 2004-10-05 Mariusch Gregor Electromagnetically levitated substrate support
US7205692B2 (en) * 2002-09-23 2007-04-17 Auburn University Ring-spinning system for making yarn having a magnetically-elevated ring
US7751892B2 (en) 2003-05-07 2010-07-06 Cardiac Pacemakers, Inc. Implantable medical device programming apparatus having a graphical user interface
JP2007518464A (ja) * 2003-10-03 2007-07-12 フォスター−ミラー・インコーポレイテッド 電磁石ｌｃｒベアリング付きロータリーポンプ
US7456537B1 (en) * 2004-12-17 2008-11-25 The University Of Toledo Control system for bearingless motor-generator
US20060238053A1 (en) * 2004-03-01 2006-10-26 The University Of Toledo Conical bearingless motor/generator
US20050264118A1 (en) * 2004-03-01 2005-12-01 Kascak Peter E Conical bearingless motor/generator
CN1667418B (zh) * 2004-03-10 2010-10-06 马杰 多功能测量、分析和诊断便携式装置
KR100574510B1 (ko) * 2004-05-11 2006-04-27 삼성전자주식회사 멤스 공정을 이용한 자기부상 구조물 및 그 제조방법
US7663281B1 (en) 2004-08-31 2010-02-16 Jeffrey J Nau Magnetic field generating device
US8543365B1 (en) 2004-10-25 2013-09-24 Novatorque, Inc. Computer-readable medium, a method and an apparatus for designing and simulating electrodynamic machines implementing conical and cylindrical magnets
US9093874B2 (en) 2004-10-25 2015-07-28 Novatorque, Inc. Sculpted field pole members and methods of forming the same for electrodynamic machines
US8471425B2 (en) 2011-03-09 2013-06-25 Novatorque, Inc. Rotor-stator structures including boost magnet structures for magnetic regions having angled confronting surfaces in rotor assemblies
US8283832B2 (en) * 2004-10-25 2012-10-09 Novatorque, Inc. Sculpted field pole members and methods of forming the same for electrodynamic machines
US8330316B2 (en) 2011-03-09 2012-12-11 Novatorque, Inc. Rotor-stator structures including boost magnet structures for magnetic regions in rotor assemblies disposed external to boundaries of conically-shaped spaces
US7982350B2 (en) 2004-10-25 2011-07-19 Novatorque, Inc. Conical magnets and rotor-stator structures for electrodynamic machines
US7294948B2 (en) * 2004-10-25 2007-11-13 Novatorque, Inc. Rotor-stator structure for electrodynamic machines
US7061152B2 (en) * 2004-10-25 2006-06-13 Novatorque, Inc. Rotor-stator structure for electrodynamic machines
US20070090706A1 (en) * 2005-10-20 2007-04-26 Davis Glenn R Frictionless suspension structure
FR2897911B1 (fr) * 2006-02-27 2009-03-27 Mecanique Magnetique Sa Soc D Palier magnetique actif chemise
WO2007101764A1 (en) 2006-03-08 2007-09-13 Sez Ag Device for fluid treating plate-like articles
US7378618B1 (en) 2006-12-14 2008-05-27 Applied Materials, Inc. Rapid conductive cooling using a secondary process plane
JP5453104B2 (ja) * 2006-12-18 2014-03-26 ケーエルエー−テンカー・コーポレーション 基板プロセス装置
US7633070B2 (en) 2006-12-18 2009-12-15 Kla-Tencor Technologies Corporation Substrate processing apparatus and method
DE102007028347A1 (de) 2006-12-19 2008-06-26 Robert Bosch Gmbh Elektrische Maschine
DE102007001201A1 (de) * 2007-01-05 2008-07-10 Oerlikon Leybold Vacuum Gmbh Verfahren zur Ermittlung von Resonanzfrequenzen eines magnetgelagerten Rotors
TW201107639A (en) * 2007-04-27 2011-03-01 Edwards Japan Ltd Plate rotating device, exhaust path opening degree changing device, exhausted device, transfer device, beam device, and gate valve
US8752449B2 (en) 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
JP4979472B2 (ja) * 2007-06-05 2012-07-18 東京エレクトロン株式会社 処理装置
DE102007029505A1 (de) * 2007-06-25 2009-01-08 Deutsche Institute für Textil- und Faserforschung Stuttgart Vorrichtung und Fadenführungsring für eine Ringspinn- oder Zwirnmaschine sowie Ringspinn- oder Zwirnmaschine
JP5421255B2 (ja) * 2007-06-27 2014-02-19 ブルックス オートメーション インコーポレイテッド 揚上機能および低コギングの特性を伴うモータ固定子
US8129984B2 (en) 2007-06-27 2012-03-06 Brooks Automation, Inc. Multiple dimension position sensor
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US7834618B2 (en) 2007-06-27 2010-11-16 Brooks Automation, Inc. Position sensor system
US8058628B2 (en) 2007-07-09 2011-11-15 Kla-Tencor Corporation Substrate processing apparatus and method
KR20100056468A (ko) 2007-07-17 2010-05-27 브룩스 오토메이션 인코퍼레이티드 챔버 벽들에 일체화된 모터들을 갖는 기판 처리 장치
FR2923877B1 (fr) * 2007-11-16 2010-04-09 Thales Sa Palier magnetique centreur a double etages
US7897942B1 (en) 2007-12-20 2011-03-01 Kla-Tencor Corporation Dynamic tracking of wafer motion and distortion during lithography
JP5199720B2 (ja) * 2008-04-15 2013-05-15 東京計器株式会社 静電浮上型ジャイロ装置
CN102395486B (zh) * 2009-03-26 2014-04-16 桑德尔·韦恩·夏佩瑞 使用磁性轴承结构的运输方法及系统
TWI538094B (zh) * 2009-03-31 2016-06-11 蘭研究公司 用以處理盤狀物品的裝置
JP5533335B2 (ja) * 2009-07-22 2014-06-25 東京エレクトロン株式会社 処理装置及びその動作方法
EP2357374B1 (de) * 2010-01-29 2016-02-17 Levitronix GmbH Magnetische Lagervorrichtung
BG110781A (bg) 2010-10-26 2012-04-30 Виктор БАЙЧЕВ Вибрационно възбудимо устройство за производство на електроенергия и регистриране на инерционни отмествания
US8853881B2 (en) * 2012-04-09 2014-10-07 Steven James Andrews Hoegg Split venturi ring maglev generator turbine
KR101501362B1 (ko) 2012-08-09 2015-03-10 가부시키가이샤 스크린 홀딩스 기판처리장치 및 기판처리방법
WO2014054034A2 (en) * 2012-10-05 2014-04-10 Koninklijke Philips N.V. Rotary positioning device
US9748120B2 (en) 2013-07-01 2017-08-29 Lam Research Ag Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
US20140125176A1 (en) * 2012-11-08 2014-05-08 Waukesha Bearings Corporation Hybrid Bearing
WO2014163678A2 (en) * 2013-03-12 2014-10-09 Dierksmeier Douglas D Gas turbine engine and active balancing system
WO2015047639A1 (en) * 2013-09-30 2015-04-02 Applied Materials, Inc. Support ring with encapsulated light barrier
EP2863079B1 (de) * 2013-10-17 2016-08-24 Skf Magnetic Mechatronics Radiales Magnetlager und Verfahren zur Herstellung
US10490426B2 (en) 2014-08-26 2019-11-26 Lam Research Ag Method and apparatus for processing wafer-shaped articles
WO2016127147A1 (en) 2015-02-06 2016-08-11 Regents Of University Of Minnesota Dual purpose no voltage winding design for bearingless ac homopolar and consequent pole motors and an ac homopolar flywheel energy storage system
JP6474268B2 (ja) * 2015-02-10 2019-02-27 日本電産テクノモータ株式会社 誘導同期電動機
FI127944B (en) * 2015-06-26 2019-05-31 Lappeenrannan Teknillinen Yliopisto Magnetic actuator for magnetic support system
EP3115103B1 (de) * 2015-07-06 2021-04-21 Levitronix GmbH Mischvorrichtung sowie einmalvorrichtung für eine mischvorrichtung
US10119985B2 (en) * 2015-10-22 2018-11-06 AISIN Technical Center of America, Inc. Multi-function speed sensor
DE102016103270B3 (de) * 2016-02-24 2017-05-11 Ev Group E. Thallner Gmbh Vorrichtung und Verfahren zur Halterung, Rotation sowie Heizung und/oder Kühlung eines Substrats
WO2018031957A1 (en) * 2016-08-11 2018-02-15 Ryan Mcalister Self-sustained frictionless near perpetual maglev generator and method for operating
US9787156B1 (en) 2016-08-18 2017-10-10 Rigel Scientific Research Inc. Energy storage apparatus for storing electrical energy generated by an energy source
US10277084B1 (en) 2016-10-19 2019-04-30 Waymo Llc Planar rotary transformer
US10530209B2 (en) 2016-10-28 2020-01-07 Waymo Llc Devices and methods for driving a rotary platform
TWI765936B (zh) 2016-11-29 2022-06-01 美商東京威力科創Ｆｓｉ股份有限公司 用以對處理腔室中之微電子基板進行處理的平移與旋轉夾頭
KR102493551B1 (ko) 2017-01-27 2023-01-30 티이엘 매뉴팩처링 앤드 엔지니어링 오브 아메리카, 인크. 프로세스 챔버에서 기판을 회전 및 병진시키기 위한 시스템 및 방법
US11510833B2 (en) 2018-04-05 2022-11-29 Taylor C. Kirkpatrick Human body positioning system
CN108809031B (zh) * 2018-06-30 2020-08-21 淮阴工学院 一种恒流源励磁的三自由度无轴承开关磁阻电机
US11545387B2 (en) * 2018-07-13 2023-01-03 Tel Manufacturing And Engineering Of America, Inc. Magnetic integrated lift pin system for a chemical processing chamber
US10931175B2 (en) 2018-10-31 2021-02-23 Waymo Llc Magnet ring with jittered poles
JP2020128745A (ja) 2019-02-01 2020-08-27 ホワイト ナイト フルイド ハンドリング インコーポレーテッドＷｈｉｔｅ Ｋｎｉｇｈｔ Ｆｌｕｉｄ Ｈａｎｄｌｉｎｇ Ｉｎｃ． ロータを支承し、当該ロータを磁気的に軸線方向に位置決めするための磁石を有するポンプ、及びこれに関連する方法
CN109921591B (zh) * 2019-03-29 2020-07-10 华中科技大学 一种双边永磁双机电端口电机
CN110185583A (zh) * 2019-04-22 2019-08-30 苏州容浦机电科技有限公司 一种混合式磁悬浮轴承的风力发电装置
JP7255348B2 (ja) * 2019-05-17 2023-04-11 日本電産株式会社 ステータ、モータおよび送風装置
CN112087067B (zh) * 2020-09-17 2021-06-22 淮阴工学院 三悬浮极磁悬浮薄片开关磁阻电机
US20220157643A1 (en) * 2020-11-19 2022-05-19 Applied Materials, Inc. Apparatus for rotating substrates
CN113745138B (zh) * 2021-09-03 2024-03-22 上海隐冠半导体技术有限公司 磁浮装置和微动台
KR20230091507A (ko) * 2021-12-16 2023-06-23 에이피시스템 주식회사 자기부상 회전 장치 및 자기부상 회전 방법
KR20230091506A (ko) * 2021-12-16 2023-06-23 에이피시스템 주식회사 자기부상 회전 장치 및 이를 이용하는 기판 처리 장치
KR102424176B1 (ko) * 2021-12-17 2022-07-25 김상조 자기부상 회전 장치 및 이를 포함하는 진공 처리 장치
KR102424177B1 (ko) * 2021-12-22 2022-07-25 김상조 자기부상 회전 장치 및 진공 처리 장치
CN117254714B (zh) * 2023-11-14 2024-03-19 苏州苏磁智能科技有限公司 应用于晶圆处理的磁悬浮装置及半导体加工设备

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4000929A (en) * 1975-07-03 1977-01-04 The United States Of America As Represented By The United States National Aeronautics And Space Administration Magnetic bearing system
US4043614A (en) * 1975-10-28 1977-08-23 Cambridge Thermionic Corporation Magnetic suspension apparatus
US4077678A (en) * 1976-07-30 1978-03-07 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Energy storage apparatus
FR2426830A1 (fr) * 1978-05-22 1979-12-21 Org Europeene De Rech Dispositif a moment d'inertie a suspension magnetique
FR2524090A1 (fr) * 1982-03-26 1983-09-30 Aerospatiale Dispositif de suspension magnetique pour roue d'inertie
FR2528923A1 (fr) * 1982-06-17 1983-12-23 Europ Propulsion Dispositif de suspension magnetique d'un rotor place dans une enceinte etanche
US4652820A (en) * 1983-03-23 1987-03-24 North American Philips Corporation Combined position sensor and magnetic motor or bearing
DE3480141D1 (en) * 1983-11-24 1989-11-16 Omron Tateisi Electronics Co Switch
US4732353A (en) * 1985-11-07 1988-03-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Three axis attitude control system
US4634191A (en) * 1985-11-21 1987-01-06 The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration Radial and torsionally controlled magnetic bearing
US4957613A (en) * 1987-02-02 1990-09-18 Life Technologies Inc. Adjustable-height vertical gel slab electrophoresis apparatus
US4831204A (en) * 1987-12-16 1989-05-16 Mobile Oil Corporation Production of gasoline from light olefins with FCC gas plant improvement by olefin upgrading
US5111102A (en) * 1989-05-25 1992-05-05 Meeks Crawford R Magnetic bearing structure
GB9206710D0 (en) * 1992-03-27 1992-05-13 Penny & Giles Position Sensors Transducers
JP3315428B2 (ja) * 1992-04-01 2002-08-19 株式会社荏原製作所 磁気軸受装置
US5237229A (en) * 1992-04-16 1993-08-17 Shinko Electric Co., Ltd. Magnetic bearing device with a rotating magnetic field
US5324540A (en) * 1992-08-17 1994-06-28 Tokyo Electron Limited System and method for supporting and rotating substrates in a process chamber
US5376862A (en) * 1993-01-28 1994-12-27 Applied Materials, Inc. Dual coaxial magnetic couplers for vacuum chamber robot assembly
US5424595A (en) * 1993-05-04 1995-06-13 General Electric Company Integrated magnetic bearing/switched reluctance machine
JP3319030B2 (ja) * 1993-05-18 2002-08-26 株式会社日立製作所 磁気軸受の制御装置およびそれを用いた回転機械
US5729066A (en) * 1995-09-22 1998-03-17 General Electric Company Combined radial and axial magnetic bearings

Also Published As

Publication number Publication date
CA2233707C (en) 2004-05-18
EP0876702B1 (de) 2006-02-22
KR19990067113A (ko) 1999-08-16
JPH11513880A (ja) 1999-11-24
EP1655820A2 (de) 2006-05-10
DE69635841T2 (de) 2006-09-28
EP0876702A1 (de) 1998-11-11
WO1997015978A1 (en) 1997-05-01
EP1655820A3 (de) 2006-07-05
US6049148A (en) 2000-04-11
MX9803156A (es) 1998-11-30
EP0876702A4 (de) 1999-04-14
US5818137A (en) 1998-10-06
KR100423366B1 (ko) 2004-06-30
JP4165903B2 (ja) 2008-10-15
CA2233707A1 (en) 1997-05-01

Similar Documents

Publication Publication Date Title
DE69635841D1 (de) Integriertes magnetisches schwebe- und drehsystem
DE69620390D1 (de) Rotierendes verbindungssystem
DE69625368D1 (de) Schweisshemmende deodorierende präparaten
DE69828963D1 (de) Wirstoffabgabe und gentherapiesystem
DE69823583D1 (de) Kassette und Kassetenliefersystem
DK0783302T3 (da) Lægemidler
DE69638204D1 (de) Magnetischer wegsensor
DE69432049D1 (de) Sicherheitssystem
DE69633356D1 (de) Magnetfelddetektor
NO950617D0 (no) Sikkerhetssystem
FI952553A0 (fi) Vuodejärjestelmä
NO960227L (no) Sikkerhetssystem
DE59707298D1 (de) Desodorierende zubereitungen
DK0826679T3 (da) Naphthylforbindelser og -præparater
FI960911A (fi) Magneettierotin
DE59705798D1 (de) Drehvorrichtung
DE69511299D1 (de) Sicherheitssystem
DE69721769D1 (de) Drehvorrichtung
DK0743082T3 (da) Vippe
NO982865D0 (no) Magnetiske materialer
KR960021387U (ko) 회전시트
DE69613023D1 (de) Magnetischer Aufstrich
BR9605565A (pt) Travesseiro
KR960033581U (ko) 자력구
NO973629D0 (no) Sikkerhetssystem

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee