DE69634233D1 - Serienherstellung von Chips mit beschichteten selektiven Elektroden - Google Patents

Serienherstellung von Chips mit beschichteten selektiven Elektroden

Info

Publication number
DE69634233D1
DE69634233D1 DE69634233T DE69634233T DE69634233D1 DE 69634233 D1 DE69634233 D1 DE 69634233D1 DE 69634233 T DE69634233 T DE 69634233T DE 69634233 T DE69634233 T DE 69634233T DE 69634233 D1 DE69634233 D1 DE 69634233D1
Authority
DE
Germany
Prior art keywords
chips
selective electrodes
serial production
coated selective
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69634233T
Other languages
English (en)
Other versions
DE69634233T2 (de
Inventor
Patrice Caillat
Gerard Nicolas
Robert Teoule
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69634233D1 publication Critical patent/DE69634233D1/de
Application granted granted Critical
Publication of DE69634233T2 publication Critical patent/DE69634233T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0046—Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00585—Parallel processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00596—Solid-phase processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00605—Making arrays on substantially continuous surfaces the compounds being directly bound or immobilised to solid supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00605—Making arrays on substantially continuous surfaces the compounds being directly bound or immobilised to solid supports
    • B01J2219/00632—Introduction of reactive groups to the surface
    • B01J2219/00637—Introduction of reactive groups to the surface by coating it with another layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00653—Making arrays on substantially continuous surfaces the compounds being bound to electrodes embedded in or on the solid supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00583—Features relative to the processes being carried out
    • B01J2219/00603—Making arrays on substantially continuous surfaces
    • B01J2219/00659—Two-dimensional arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00709—Type of synthesis
    • B01J2219/00713—Electrochemical synthesis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718—Type of compounds synthesised
    • B01J2219/0072—Organic compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718—Type of compounds synthesised
    • B01J2219/0072—Organic compounds
    • B01J2219/00722—Nucleotides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00274—Sequential or parallel reactions; Apparatus and devices for combinatorial chemistry or for making arrays; Chemical library technology
    • B01J2219/00718—Type of compounds synthesised
    • B01J2219/0072—Organic compounds
    • B01J2219/00725—Peptides
    • C—CHEMISTRY; METALLURGY
    • C40—COMBINATORIAL TECHNOLOGY
    • C40B—COMBINATORIAL CHEMISTRY; LIBRARIES, e.g. CHEMICAL LIBRARIES
    • C40B40/00—Libraries per se, e.g. arrays, mixtures
    • C40B40/04—Libraries containing only organic compounds
    • C40B40/06—Libraries containing nucleotides or polynucleotides, or derivatives thereof
    • C—CHEMISTRY; METALLURGY
    • C40—COMBINATORIAL TECHNOLOGY
    • C40B—COMBINATORIAL CHEMISTRY; LIBRARIES, e.g. CHEMICAL LIBRARIES
    • C40B40/00—Libraries per se, e.g. arrays, mixtures
    • C40B40/04—Libraries containing only organic compounds
    • C40B40/10—Libraries containing peptides or polypeptides, or derivatives thereof
DE69634233T 1995-11-17 1996-11-14 Serienherstellung von Chips mit beschichteten selektiven Elektroden Expired - Lifetime DE69634233T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9513659A FR2741476B1 (fr) 1995-11-17 1995-11-17 Procede de realisation collective de puces avec des electrodes selectivement recouvertes par un depot
FR9513659 1995-11-17

Publications (2)

Publication Number Publication Date
DE69634233D1 true DE69634233D1 (de) 2005-03-03
DE69634233T2 DE69634233T2 (de) 2006-01-05

Family

ID=9484674

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69634233T Expired - Lifetime DE69634233T2 (de) 1995-11-17 1996-11-14 Serienherstellung von Chips mit beschichteten selektiven Elektroden

Country Status (5)

Country Link
US (1) US5776791A (de)
EP (1) EP0774662B1 (de)
JP (1) JP3961055B2 (de)
DE (1) DE69634233T2 (de)
FR (1) FR2741476B1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2754276B1 (fr) * 1996-10-03 1998-10-30 Commissariat Energie Atomique Procede et dispositifs pour la formation electrolytique d'un depot sur un ensemble selectionne d'electrodes
US6495892B2 (en) 1997-08-08 2002-12-17 California Institute Of Technology Techniques and systems for analyte detection
EA002902B1 (ru) * 1997-08-08 2002-10-31 Калифорниа Институт Оф Текнолоджи Способ и система для обнаружения аналита
US6054334A (en) * 1997-09-12 2000-04-25 Micron Technology, Inc. Methods and structures for pad reconfiguration to allow intermediate testing during manufacture of an integrated circuit
JP4250779B2 (ja) * 1998-01-12 2009-04-08 パナソニック株式会社 密閉型電池
AU747878B2 (en) 1998-04-09 2002-05-30 California Institute Of Technology Electronic techniques for analyte detection
FR2781886B1 (fr) * 1998-07-31 2001-02-16 Commissariat Energie Atomique Micro-systeme a multiple points d'analyse chimique ou biologique
FR2784466B1 (fr) * 1998-10-13 2002-10-18 Commissariat Energie Atomique Micro-systeme a multiple points d'analyse chimique ou biologique mettant en oeuvre un couplage entre les sondes et un substrat
FR2794572B1 (fr) 1999-06-02 2003-06-13 Commissariat Energie Atomique Puce et procede de garniture d'une puce comprenant une pluralite d'electrodes
FR2821575B1 (fr) * 2001-03-02 2003-10-24 Commissariat Energie Atomique Procede de greffage organique localise sans masque sur des protions conductrices ou semiconductrices de surfaces composites
FR2834383B1 (fr) * 2001-12-27 2004-02-13 Commissariat Energie Atomique Procede de depot selectif de matiere sur des electrodes de biocapteurs ou de puces realises a partir d'un meme substrat
FR2834299B1 (fr) * 2001-12-27 2004-05-21 Commissariat Energie Atomique Procede de fixation par electrodeposition de reactifs sur une face plane d'un substrat
US6626323B2 (en) * 2002-02-21 2003-09-30 Energy Conversion Devices, Inc. Vane heat transfer structure
FR2843829A1 (fr) * 2002-08-26 2004-02-27 Commissariat Energie Atomique Support de garniture par voie electrochimique, systeme d'adressage d'un tel support, et procede pour un depot selectif
FR2917837B1 (fr) * 2007-06-21 2009-08-28 Commissariat Energie Atomique Procede de detection d'electrodes defectueuses dans une matrice de micro-electrodes

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2554622B1 (fr) * 1983-11-03 1988-01-15 Commissariat Energie Atomique Procede de fabrication d'une matrice de composants electroniques
JPH01179995A (ja) * 1988-01-11 1989-07-18 Fujitsu Ltd マトリクス型液晶表示装置とその欠陥検出方法
US5103557A (en) * 1988-05-16 1992-04-14 Leedy Glenn J Making and testing an integrated circuit using high density probe points
US5008617A (en) * 1989-06-20 1991-04-16 Energy Conversion Devices, Inc. Functional testing of ultra large area, ultra large scale integrated circuits
US5120421A (en) * 1990-08-31 1992-06-09 The United States Of America As Represented By The United States Department Of Energy Electrochemical sensor/detector system and method
US5256578A (en) * 1991-12-23 1993-10-26 Motorola, Inc. Integral semiconductor wafer map recording
US5389556A (en) * 1992-07-02 1995-02-14 Lsi Logic Corporation Individually powering-up unsingulated dies on a wafer
US5422498A (en) * 1993-04-13 1995-06-06 Nec Corporation Apparatus for diagnosing interconnections of semiconductor integrated circuits
US5467013A (en) * 1993-12-07 1995-11-14 Sematech, Inc. Radio frequency monitor for semiconductor process control
JP3274924B2 (ja) * 1993-12-15 2002-04-15 株式会社東芝 半導体装置のスクリーニング方法

Also Published As

Publication number Publication date
EP0774662A1 (de) 1997-05-21
FR2741476B1 (fr) 1998-01-02
US5776791A (en) 1998-07-07
JPH09199664A (ja) 1997-07-31
JP3961055B2 (ja) 2007-08-15
EP0774662B1 (de) 2005-01-26
DE69634233T2 (de) 2006-01-05
FR2741476A1 (fr) 1997-05-23

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