DE69632674D1 - Verfahren und System zur hochempfindlichen Detektion von molekularen Spezien unter Vakuum mittels Oberschwingungsspektroskopie - Google Patents

Verfahren und System zur hochempfindlichen Detektion von molekularen Spezien unter Vakuum mittels Oberschwingungsspektroskopie

Info

Publication number
DE69632674D1
DE69632674D1 DE69632674T DE69632674T DE69632674D1 DE 69632674 D1 DE69632674 D1 DE 69632674D1 DE 69632674 T DE69632674 T DE 69632674T DE 69632674 T DE69632674 T DE 69632674T DE 69632674 D1 DE69632674 D1 DE 69632674D1
Authority
DE
Germany
Prior art keywords
under vacuum
highly sensitive
molecular species
sensitive detection
species under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69632674T
Other languages
English (en)
Other versions
DE69632674T2 (de
Inventor
James Mcandrew
Ronald S Inman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA a Directoire et Conseil de Surveillance pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of DE69632674D1 publication Critical patent/DE69632674D1/de
Application granted granted Critical
Publication of DE69632674T2 publication Critical patent/DE69632674T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/433—Modulation spectrometry; Derivative spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/433—Modulation spectrometry; Derivative spectrometry
    • G01J3/4338—Frequency modulated spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/031—Multipass arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69632674T 1995-10-10 1996-10-07 Verfahren und System zur hochempfindlichen Detektion von molekularen Spezien unter Vakuum mittels Oberschwingungsspektroskopie Expired - Lifetime DE69632674T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US711646 1985-03-14
US501395P 1995-10-10 1995-10-10
US5013 1995-10-10
US63443996A 1996-04-18 1996-04-18
US71164696A 1996-09-10 1996-09-10
US634439 2000-08-08

Publications (2)

Publication Number Publication Date
DE69632674D1 true DE69632674D1 (de) 2004-07-15
DE69632674T2 DE69632674T2 (de) 2006-01-26

Family

ID=27357773

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69632674T Expired - Lifetime DE69632674T2 (de) 1995-10-10 1996-10-07 Verfahren und System zur hochempfindlichen Detektion von molekularen Spezien unter Vakuum mittels Oberschwingungsspektroskopie

Country Status (5)

Country Link
EP (1) EP0768523B1 (de)
JP (1) JPH09222394A (de)
KR (1) KR970023954A (de)
CN (2) CN1176382A (de)
DE (1) DE69632674T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19717145C2 (de) 1997-04-23 1999-06-02 Siemens Ag Verfahren zur selektiven Detektion von Gasen und Gassensor zu dessen Durchführung
JP3459564B2 (ja) 1998-03-11 2003-10-20 日本酸素株式会社 ガスの分光分析装置および分光分析方法
US6317212B1 (en) * 1999-09-17 2001-11-13 Li-Cor, Inc. Gas analyzer
DE102004028023B4 (de) * 2004-06-09 2006-07-06 Perkinelmer Optoelectronics Gmbh & Co.Kg Sensoreinheit zur Erfassung eines Fluids, insbesondere zur Erfassung von Erdgas, Kohlenwasserstoffen, Kohlendioxid oder dgl. in Umgebungsluft
US7612871B2 (en) * 2004-09-01 2009-11-03 Honeywell International Inc Frequency-multiplexed detection of multiple wavelength light for flow cytometry
NO322957B1 (no) * 2005-05-31 2006-12-18 Norsk Elektro Optikk As Apparat og metode for å redusere interferenssignaler fra atmosfæregasser ved optisk måling av gass i forseglede prosesser og beholdere.
US7508521B2 (en) * 2007-03-14 2009-03-24 Spectrasensors, Inc. Pressure-invariant trace gas detection
JP5532608B2 (ja) * 2009-01-16 2014-06-25 横河電機株式会社 レーザガス分析方法
JP5359831B2 (ja) * 2009-12-04 2013-12-04 株式会社島津製作所 ガス中の水分測定装置
US10643008B2 (en) 2014-11-11 2020-05-05 Spectrasensors, Inc. Target analyte detection and quantification in sample gases with complex background compositions
US10724945B2 (en) 2016-04-19 2020-07-28 Cascade Technologies Holdings Limited Laser detection system and method
US10180393B2 (en) 2016-04-20 2019-01-15 Cascade Technologies Holdings Limited Sample cell
GB201700905D0 (en) 2017-01-19 2017-03-08 Cascade Tech Holdings Ltd Close-Coupled Analyser
JP7119092B2 (ja) * 2017-12-15 2022-08-16 ネオ モニターズ アクティーゼルスカブ 水素ガスセンサ並びに周囲圧力下及び高い圧力下における水素の測定方法
CN110504195B (zh) * 2019-08-22 2022-03-18 上海华力集成电路制造有限公司 反应腔体的水气监测方法
CN110849769B (zh) * 2019-10-28 2022-07-29 北京空间机电研究所 一种基于可调谐激光的掩星大气密度廓线测量系统及方法
DE102022208770A1 (de) 2022-08-24 2024-02-29 Hochschule Reutlingen, Körperschaft des öffentlichen Rechts Vorrichtung zum Erfassen von mindestens einer gasförmigen Komponente in einem Gas

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5448071A (en) * 1993-04-16 1995-09-05 Bruce W. McCaul Gas spectroscopy

Also Published As

Publication number Publication date
EP0768523A3 (de) 1997-10-08
EP0768523B1 (de) 2004-06-09
JPH09222394A (ja) 1997-08-26
EP0768523A2 (de) 1997-04-16
KR970023954A (ko) 1997-05-30
CN1176382A (zh) 1998-03-18
DE69632674T2 (de) 2006-01-26
CN1283788A (zh) 2001-02-14

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