DE69625436T2 - Sekundär-Pumpenaggregat - Google Patents

Sekundär-Pumpenaggregat

Info

Publication number
DE69625436T2
DE69625436T2 DE69625436T DE69625436T DE69625436T2 DE 69625436 T2 DE69625436 T2 DE 69625436T2 DE 69625436 T DE69625436 T DE 69625436T DE 69625436 T DE69625436 T DE 69625436T DE 69625436 T2 DE69625436 T2 DE 69625436T2
Authority
DE
Germany
Prior art keywords
pump unit
secondary pump
unit
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69625436T
Other languages
English (en)
Other versions
DE69625436D1 (de
Inventor
Guy Gorinas
Rainer Mathes
Alain Ravex
Jean-Marc Poncet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel SA filed Critical Alcatel SA
Application granted granted Critical
Publication of DE69625436D1 publication Critical patent/DE69625436D1/de
Publication of DE69625436T2 publication Critical patent/DE69625436T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE69625436T 1995-10-04 1996-10-01 Sekundär-Pumpenaggregat Expired - Fee Related DE69625436T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9511660A FR2739574B1 (fr) 1995-10-04 1995-10-04 Groupe de pompage secondaire

Publications (2)

Publication Number Publication Date
DE69625436D1 DE69625436D1 (de) 2003-01-30
DE69625436T2 true DE69625436T2 (de) 2003-10-09

Family

ID=9483227

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69625436T Expired - Fee Related DE69625436T2 (de) 1995-10-04 1996-10-01 Sekundär-Pumpenaggregat

Country Status (5)

Country Link
US (1) US5720174A (de)
EP (1) EP0767307B1 (de)
JP (1) JP2763524B2 (de)
DE (1) DE69625436T2 (de)
FR (1) FR2739574B1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3623659B2 (ja) * 1998-06-12 2005-02-23 エア・ウォーター株式会社 クライオポンプ
JP2001194018A (ja) * 1999-10-19 2001-07-17 Aisin Seiki Co Ltd 極低温冷凍装置
US6560969B1 (en) * 2002-04-05 2003-05-13 Ge Medical Systems Global Technology, Co., Llc Pulse tube refrigeration system having ride-through
DE10305038A1 (de) * 2003-02-07 2004-08-19 Pfeiffer Vacuum Gmbh Vakuumpumpanordnung
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
JP6124776B2 (ja) * 2013-12-02 2017-05-10 住友重機械工業株式会社 コールドトラップ
US11319098B2 (en) * 2017-03-31 2022-05-03 The Boeing Company Vacuum volume reduction system and method with fluid fill assembly for a vacuum tube vehicle station
US10220972B2 (en) * 2017-03-31 2019-03-05 The Boeing Company Vacuum volume reduction system and method for a vacuum tube vehicle station

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4815303A (en) * 1988-03-21 1989-03-28 Duza Peter J Vacuum cryopump with improved first stage
JP2538796B2 (ja) * 1989-05-09 1996-10-02 株式会社東芝 真空排気装置および真空排気方法
US5335505A (en) * 1992-05-25 1994-08-09 Kabushiki Kaisha Toshiba Pulse tube refrigerator
JP3155366B2 (ja) * 1992-08-03 2001-04-09 日本真空技術株式会社 ターボ分子ポンプ用クライオトラップ
DE69409555T2 (de) * 1993-01-11 1998-12-03 Applied Materials Inc Turbomolekularpumpe
US5483803A (en) * 1993-06-16 1996-01-16 Helix Technology Corporation High conductance water pump
JP2719298B2 (ja) * 1993-07-29 1998-02-25 アプライド マテリアルズ インコーポレイテッド 真空装置の冷却構造

Also Published As

Publication number Publication date
EP0767307A1 (de) 1997-04-09
US5720174A (en) 1998-02-24
FR2739574A1 (fr) 1997-04-11
EP0767307B1 (de) 2002-12-18
FR2739574B1 (fr) 1997-11-14
DE69625436D1 (de) 2003-01-30
JPH09126126A (ja) 1997-05-13
JP2763524B2 (ja) 1998-06-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ALCATEL LUCENT, PARIS, FR

8339 Ceased/non-payment of the annual fee