DE69624977D1 - Drahtsägevorrichtung - Google Patents

Drahtsägevorrichtung

Info

Publication number
DE69624977D1
DE69624977D1 DE69624977T DE69624977T DE69624977D1 DE 69624977 D1 DE69624977 D1 DE 69624977D1 DE 69624977 T DE69624977 T DE 69624977T DE 69624977 T DE69624977 T DE 69624977T DE 69624977 D1 DE69624977 D1 DE 69624977D1
Authority
DE
Germany
Prior art keywords
wire sawing
sawing
wire
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69624977T
Other languages
English (en)
Other versions
DE69624977T2 (de
Inventor
Kouhei Toyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE69624977D1 publication Critical patent/DE69624977D1/de
Publication of DE69624977T2 publication Critical patent/DE69624977T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00—Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/003—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts
    • B23D57/0053—Sawing machines or sawing devices working with saw wires, characterised only by constructional features of particular parts of drives for saw wires; of wheel mountings; of wheels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0633—Grinders for cutting-off using a cutting wire
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
DE69624977T 1995-05-31 1996-05-30 Drahtsägevorrichtung Expired - Lifetime DE69624977T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7157004A JP2870452B2 (ja) 1995-05-31 1995-05-31 ワイヤソー

Publications (2)

Publication Number Publication Date
DE69624977D1 true DE69624977D1 (de) 2003-01-09
DE69624977T2 DE69624977T2 (de) 2003-04-24

Family

ID=15640081

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69624977T Expired - Lifetime DE69624977T2 (de) 1995-05-31 1996-05-30 Drahtsägevorrichtung

Country Status (5)

Country Link
US (1) US5699782A (de)
EP (1) EP0745447B1 (de)
JP (1) JP2870452B2 (de)
DE (1) DE69624977T2 (de)
MY (1) MY119503A (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ283541B6 (cs) * 1996-03-06 1998-04-15 Trimex Tesla, S.R.O. Způsob řezání ingotů z tvrdých materiálů na desky a pila k provádění tohoto způsobu
JPH09286021A (ja) * 1996-04-22 1997-11-04 Komatsu Electron Metals Co Ltd 半導体インゴットの切断方法
KR20010021539A (ko) * 1997-07-07 2001-03-15 존 비. 호드스덴 다이아몬드 함유 와이어를 이용하여 작업물을 얇게절단하기 위한 장치 및 방법
US6024080A (en) * 1997-07-07 2000-02-15 Laser Technology West Limited Apparatus and method for slicing a workpiece utilizing a diamond impregnated wire
US6279564B1 (en) 1997-07-07 2001-08-28 John B. Hodsden Rocking apparatus and method for slicing a workpiece utilizing a diamond impregnated wire
US5878737A (en) * 1997-07-07 1999-03-09 Laser Technology West Limited Apparatus and method for slicing a workpiece utilizing a diamond impregnated wire
JP4411062B2 (ja) * 2003-12-25 2010-02-10 株式会社アライドマテリアル 超砥粒ワイヤソー巻き付け構造、超砥粒ワイヤソー切断装置および超砥粒ワイヤソーの巻き付け方法
JP4525353B2 (ja) * 2005-01-07 2010-08-18 住友電気工業株式会社 Ｉｉｉ族窒化物基板の製造方法
DE102006004801B3 (de) * 2006-01-23 2007-08-09 Friedemann Seibert Sägevorrichtung, Sägewerkzeug und Verfahren zum Sägen eines Sägegutes
ITMO20080039A1 (it) * 2007-09-28 2009-03-29 Luigi Pedrini Dispositivo di supporto, guida e/o trasmissione del moto al filo diamantato di macchine per il taglio di pietre
DE102007051934A1 (de) 2007-10-29 2009-04-30 Mfg Metall- Und Ferrolegierungsgesellschaft Mbh Hafner, Blondin & Tidou Verfahren zur Aufbereitung von Abfall
US20090122637A1 (en) * 2007-11-14 2009-05-14 Jan Kruyer Sinusoidal mixing and shearing apparatus and associated methods
US20090139906A1 (en) * 2007-11-30 2009-06-04 Jan Kruyer Isoelectric separation of oil sands
US20090139905A1 (en) * 2007-11-30 2009-06-04 Jan Kruyer Endless cable system and associated methods
CN102039447A (zh) * 2009-10-13 2011-05-04 小松Ntc株式会社 线材线轴支撑装置以及线状锯的线材送出卷绕装置
WO2011070386A1 (en) * 2009-12-11 2011-06-16 Applied Materials, Inc. Monitoring device for the wire of a wire saw device and method for operating the same
CN102791426B (zh) * 2010-02-08 2014-12-10 东洋先进机床有限公司 用线锯切断工件的切断方法以及线锯
CN102791427B (zh) * 2010-02-08 2015-05-13 东洋先进机床有限公司 线锯
JP5494558B2 (ja) * 2011-04-20 2014-05-14 信越半導体株式会社 ワイヤソーの運転再開方法及びワイヤソー
CN102814875B (zh) * 2011-06-07 2015-01-07 有研新材料股份有限公司 一种在多线切割中切割超厚产品的导轮开槽方法
CN102284970B (zh) * 2011-08-02 2013-03-13 浙江大学 非金属材料多丝线切割用的旋转超声换能器
JP5185419B2 (ja) 2011-08-22 2013-04-17 コマツＮｔｃ株式会社 ワイヤソー
US20130144421A1 (en) * 2011-12-01 2013-06-06 Memc Electronic Materials, Spa Systems For Controlling Temperature Of Bearings In A Wire Saw
CN102528954B (zh) * 2012-02-10 2014-11-26 长沙岱勒新材料科技有限公司 用金刚石线切割磁性材料的方法
CN104603916B (zh) * 2012-09-03 2018-04-17 日立金属株式会社 利用多线切割机对高硬度材料进行切断的切断方法
JP6919852B2 (ja) * 2016-09-27 2021-08-18 株式会社テック技販 インゴットの切断装置、および、インゴットの切断装置に使用される荷重検出装置
CN113829530A (zh) * 2021-08-24 2021-12-24 隆基绿能科技股份有限公司 一种切割方法及硅片

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3841297A (en) * 1971-12-01 1974-10-15 Motorola Inc Machine for cutting brittle materials
GB1415240A (en) * 1973-11-27 1975-11-26 Motorola Inc Machine for cutting brittle materials
US4160439A (en) * 1975-11-07 1979-07-10 Sotarem S.A. Cutting-off machine for hard bodies
US4134384A (en) * 1977-09-16 1979-01-16 Motorola, Inc. Wire saw with rotatable guide sleeve
US4191159A (en) * 1978-10-16 1980-03-04 Nasa System for slicing silicon wafers
US4494523A (en) * 1983-08-05 1985-01-22 Motorola, Inc. Wire saw
US4574769A (en) * 1984-02-18 1986-03-11 Ishikawa Ken Ichi Multi-wire vibratory cutting method and apparatus
JP2617714B2 (ja) * 1987-04-16 1997-06-04 株式会社 日平トヤマ ワイヤソー装置の駆動モータ制御方法
JPH0635107B2 (ja) * 1987-12-26 1994-05-11 株式会社タカトリハイテック ワイヤソー
JPH01216260A (ja) * 1988-02-24 1989-08-30 Matsushita Electric Works Ltd 電気化学式センサ
JPH0811128A (ja) * 1994-07-04 1996-01-16 Tokyo Seimitsu Co Ltd ワイヤーリールの回転振動防止構造

Also Published As

Publication number Publication date
MY119503A (en) 2005-06-30
EP0745447B1 (de) 2002-11-27
US5699782A (en) 1997-12-23
DE69624977T2 (de) 2003-04-24
JP2870452B2 (ja) 1999-03-17
JPH08323611A (ja) 1996-12-10
EP0745447A1 (de) 1996-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition