DE69622300D1 - Diffusionspumpe - Google Patents

Diffusionspumpe

Info

Publication number
DE69622300D1
DE69622300D1 DE69622300T DE69622300T DE69622300D1 DE 69622300 D1 DE69622300 D1 DE 69622300D1 DE 69622300 T DE69622300 T DE 69622300T DE 69622300 T DE69622300 T DE 69622300T DE 69622300 D1 DE69622300 D1 DE 69622300D1
Authority
DE
Germany
Prior art keywords
diffusion pump
diffusion
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69622300T
Other languages
English (en)
Other versions
DE69622300T2 (de
Inventor
Graeme Huntley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Publication of DE69622300D1 publication Critical patent/DE69622300D1/de
Application granted granted Critical
Publication of DE69622300T2 publication Critical patent/DE69622300T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F04F9/06—Arrangement of vapour traps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE69622300T 1995-03-03 1996-02-29 Diffusionspumpe Expired - Fee Related DE69622300T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9504260.2A GB9504260D0 (en) 1995-03-03 1995-03-03 Improvements in diffusion pumps

Publications (2)

Publication Number Publication Date
DE69622300D1 true DE69622300D1 (de) 2002-08-22
DE69622300T2 DE69622300T2 (de) 2002-11-14

Family

ID=10770565

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69622300T Expired - Fee Related DE69622300T2 (de) 1995-03-03 1996-02-29 Diffusionspumpe

Country Status (5)

Country Link
US (1) US5700134A (de)
EP (1) EP0730096B1 (de)
JP (1) JPH08320000A (de)
DE (1) DE69622300T2 (de)
GB (1) GB9504260D0 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6093001A (en) * 1997-05-02 2000-07-25 University Of Pittsburgh Rotary pump having a bearing which dissipates heat
WO2009109995A2 (en) * 2008-02-11 2009-09-11 Yadapalli Kondala Rao A vaccum pump suction filter meant for collecting impurities from function
CN105298943B (zh) * 2015-11-27 2017-06-06 辽宁真龙真空设备制造有限公司 大抽速卧式油增压泵

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2078788A (en) * 1934-11-09 1937-04-27 Vickers Electrical Co Ltd Diffusion vacuum pump
GB526507A (en) * 1939-03-18 1940-09-19 Frank Edmund Bancroft Improvements in condensation vacuum pumps
US2855140A (en) * 1956-04-24 1958-10-07 Jr John Sedlacsik High vacuum pump
DE1273740B (de) * 1961-05-10 1968-07-25 Jewgenij Andrejewitsch Kolenko Dampffaenger fuer Diffusionspumpen
GB1066971A (en) * 1963-05-30 1967-04-26 Edwards High Vacuum Int Ltd Improvements in or relating to vacuum pumps
FR2163945A5 (de) * 1971-12-07 1973-07-27 Cit Alcatel
GB1339121A (en) * 1972-04-26 1973-11-28 British Oxygen Co Ltd Vapour vacuum pumps
US3801225A (en) * 1972-05-12 1974-04-02 British Oxygen Co Ltd Vacuum pumps
GB1448752A (en) * 1973-03-08 1976-09-08 Boc International Ltd Vacuum pumping assembly
US4108576A (en) * 1976-07-06 1978-08-22 Varian Associates, Inc. Low cost, thermally efficient diffusion pump
US4845360A (en) * 1987-12-10 1989-07-04 Varian Associates, Inc. Counterflow leak detector with high and low sensitivity operating modes
US5137429A (en) * 1991-04-15 1992-08-11 Spectrameasure Inc. Diffusion pump

Also Published As

Publication number Publication date
JPH08320000A (ja) 1996-12-03
EP0730096A1 (de) 1996-09-04
EP0730096B1 (de) 2002-07-17
GB9504260D0 (en) 1995-04-19
DE69622300T2 (de) 2002-11-14
US5700134A (en) 1997-12-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee