DE69621452T2 - Elektromagnetischer beschleunigungssensor - Google Patents

Elektromagnetischer beschleunigungssensor

Info

Publication number
DE69621452T2
DE69621452T2 DE69621452T DE69621452T DE69621452T2 DE 69621452 T2 DE69621452 T2 DE 69621452T2 DE 69621452 T DE69621452 T DE 69621452T DE 69621452 T DE69621452 T DE 69621452T DE 69621452 T2 DE69621452 T2 DE 69621452T2
Authority
DE
Germany
Prior art keywords
acceleration sensor
electromagnetic acceleration
electromagnetic
sensor
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69621452T
Other languages
English (en)
Other versions
DE69621452D1 (de
Inventor
Pierre Giroud
Pierre Guillemin
Andre Migeon
Sylvie Pedraza-Ramos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Avionics SAS
Original Assignee
Thales Avionics SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Avionics SAS filed Critical Thales Avionics SAS
Application granted granted Critical
Publication of DE69621452D1 publication Critical patent/DE69621452D1/de
Publication of DE69621452T2 publication Critical patent/DE69621452T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Pressure Sensors (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
DE69621452T 1995-12-12 1996-12-10 Elektromagnetischer beschleunigungssensor Expired - Fee Related DE69621452T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9514687A FR2742231B1 (fr) 1995-12-12 1995-12-12 Accelerometre electromagnetique
PCT/FR1996/001969 WO1997022011A1 (fr) 1995-12-12 1996-12-10 Accelerometre electromagnetique

Publications (2)

Publication Number Publication Date
DE69621452D1 DE69621452D1 (de) 2002-07-04
DE69621452T2 true DE69621452T2 (de) 2002-11-07

Family

ID=9485397

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69621452T Expired - Fee Related DE69621452T2 (de) 1995-12-12 1996-12-10 Elektromagnetischer beschleunigungssensor

Country Status (12)

Country Link
US (1) US6076403A (de)
EP (1) EP0866973B1 (de)
JP (1) JP2000502442A (de)
AU (1) AU707264B2 (de)
BR (1) BR9612775A (de)
CA (1) CA2239107A1 (de)
DE (1) DE69621452T2 (de)
DK (1) DK0866973T3 (de)
FR (1) FR2742231B1 (de)
MX (1) MX9804822A (de)
NO (1) NO982668L (de)
WO (1) WO1997022011A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2788163B1 (fr) 1998-12-30 2001-03-16 Sextant Avionique Actionneur electromagnetique equipe de moyens d'ajustement de la position de son element polaire mobile
US6318176B1 (en) * 1999-03-26 2001-11-20 Seagate Technology Llc Rotational inductive accelerometer
US6701788B2 (en) * 2001-07-31 2004-03-09 Kelsey-Hayes Company Multiple output inertial sensing device
EP1491901A1 (de) 2003-06-25 2004-12-29 Matsushita Electric Works, Ltd. Halbleiter-Beschleunigungsaufnehmer und Verfahren zu seiner Herstellung
JP2006242692A (ja) * 2005-03-02 2006-09-14 Oki Electric Ind Co Ltd 加速度センサチップ
CN112696454B (zh) * 2020-12-28 2021-10-08 哈尔滨工程大学 一种具有主动负刚度的磁悬浮式准零刚度电磁隔振器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6046551B2 (ja) * 1978-08-07 1985-10-16 株式会社日立製作所 半導体スイツチング素子およびその製法
US4446741A (en) * 1981-06-01 1984-05-08 Prvni Brnenska Strojirna, Narodni Podnik Vibration transducer
US4473768A (en) * 1983-09-30 1984-09-25 Teledyne Industries, Inc. Piezoelectric force-balance accelerometer system
US4854169A (en) * 1987-06-15 1989-08-08 Japan Aviation Electronics Industry Ltd. Accelerometer
DE3740688A1 (de) * 1987-12-01 1989-06-15 Messerschmitt Boelkow Blohm Mikromechanischer beschleunigungssensor mit hoher achsenselektivitaet
US5121633A (en) * 1987-12-18 1992-06-16 Nissan Motor Co., Ltd. Semiconductor accelerometer
US4944184A (en) * 1989-04-14 1990-07-31 Sundstrand Data Control, Inc. Asymmetric flexure for pendulous accelerometer
DE4027046A1 (de) * 1989-09-29 1991-04-11 Siemens Ag Vorrichtung zum pruefen der funktionsfaehigkeit und/oder eichen eines beschleunigungs-sensors, insbesondere eines aufprall-sensors fuer ein kraftfahrzeug, und verfahren zum betrieb der vorrichtung
JPH05322926A (ja) * 1992-05-26 1993-12-07 Matsushita Electric Works Ltd 自己診断用駆動部を有する半導体加速度センサー
FR2734641B1 (fr) * 1995-05-24 1997-08-14 Sextant Avionique Accelerometre electromagnetique

Also Published As

Publication number Publication date
NO982668D0 (no) 1998-06-10
FR2742231B1 (fr) 1998-01-02
EP0866973B1 (de) 2002-05-29
JP2000502442A (ja) 2000-02-29
AU1101697A (en) 1997-07-03
MX9804822A (es) 1998-10-31
FR2742231A1 (fr) 1997-06-13
US6076403A (en) 2000-06-20
EP0866973A1 (de) 1998-09-30
NO982668L (no) 1998-08-11
AU707264B2 (en) 1999-07-08
BR9612775A (pt) 2000-10-24
DE69621452D1 (de) 2002-07-04
CA2239107A1 (fr) 1997-06-19
WO1997022011A1 (fr) 1997-06-19
DK0866973T3 (da) 2002-09-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee