DE69620577T2 - Chemische abscheidung von mullitschichten und mullitpulvern aus der gasphase - Google Patents

Chemische abscheidung von mullitschichten und mullitpulvern aus der gasphase

Info

Publication number
DE69620577T2
DE69620577T2 DE69620577T DE69620577T DE69620577T2 DE 69620577 T2 DE69620577 T2 DE 69620577T2 DE 69620577 T DE69620577 T DE 69620577T DE 69620577 T DE69620577 T DE 69620577T DE 69620577 T2 DE69620577 T2 DE 69620577T2
Authority
DE
Germany
Prior art keywords
mullite
gas phase
layers
chemical deposition
powders
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69620577T
Other languages
English (en)
Other versions
DE69620577D1 (de
Inventor
Vinod Sarin
Rao Mulpuri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boston University
Original Assignee
Boston University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boston University filed Critical Boston University
Publication of DE69620577D1 publication Critical patent/DE69620577D1/de
Application granted granted Critical
Publication of DE69620577T2 publication Critical patent/DE69620577T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
    • C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
    • C04B35/185—Mullite 3Al2O3-2SiO2
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62222—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic coatings
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C04B41/4529—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied from the gas phase
    • C04B41/4531—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied from the gas phase by C.V.D.
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Silicates, Zeolites, And Molecular Sieves (AREA)
  • Compositions Of Oxide Ceramics (AREA)
DE69620577T 1995-01-06 1996-01-05 Chemische abscheidung von mullitschichten und mullitpulvern aus der gasphase Expired - Fee Related DE69620577T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/368,814 US5763008A (en) 1995-01-06 1995-01-06 Chemical vapor deposition of mullite coatings
PCT/US1996/000482 WO1996020903A1 (en) 1995-01-06 1996-01-05 Chemical vapor deposition of mullite coatings and powders

Publications (2)

Publication Number Publication Date
DE69620577D1 DE69620577D1 (de) 2002-05-16
DE69620577T2 true DE69620577T2 (de) 2002-09-26

Family

ID=23452854

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69620577T Expired - Fee Related DE69620577T2 (de) 1995-01-06 1996-01-05 Chemische abscheidung von mullitschichten und mullitpulvern aus der gasphase

Country Status (7)

Country Link
US (1) US5763008A (de)
EP (1) EP0802892B1 (de)
AT (1) ATE215919T1 (de)
AU (1) AU4963496A (de)
CA (1) CA2209561A1 (de)
DE (1) DE69620577T2 (de)
WO (1) WO1996020903A1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5869146A (en) 1997-11-12 1999-02-09 United Technologies Corporation Plasma sprayed mullite coatings on silicon based ceramic materials
US6299988B1 (en) 1998-04-27 2001-10-09 General Electric Company Ceramic with preferential oxygen reactive layer
US6485848B1 (en) * 1998-04-27 2002-11-26 General Electric Company Coated article and method of making
US6517960B1 (en) 1999-04-26 2003-02-11 General Electric Company Ceramic with zircon coating
US6485791B1 (en) * 2000-04-06 2002-11-26 Bangalore A. Nagaraj Method for improving the performance of oxidizable ceramic materials in oxidizing environments
SE522735C2 (sv) 2001-05-30 2004-03-02 Sandvik Ab Aluminiumoxidbelagt skärverktyg
US6759151B1 (en) 2002-05-22 2004-07-06 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Multilayer article characterized by low coefficient of thermal expansion outer layer
US6733908B1 (en) 2002-07-08 2004-05-11 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Multilayer article having stabilized zirconia outer layer and chemical barrier layer
US7497895B2 (en) * 2005-11-18 2009-03-03 Exxonmobil Research And Engineering Company Membrane separation process
US9315905B2 (en) * 2010-03-04 2016-04-19 United Technologies Corporation Coated article and coating process therefor
US9581042B2 (en) 2012-10-30 2017-02-28 United Technologies Corporation Composite article having metal-containing layer with phase-specific seed particles and method therefor
CN113957439B (zh) * 2021-10-26 2024-01-23 西安热工研究院有限公司 一种钛合金用Al2O3_莫来石梯度防氧化涂层及其制备方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3306768A (en) * 1964-01-08 1967-02-28 Motorola Inc Method of forming thin oxide films
JPS61251588A (ja) * 1985-04-26 1986-11-08 株式会社豊田中央研究所 セラミツクス複合体の製造方法
DE3623786A1 (de) * 1985-11-13 1987-05-14 Man Technologie Gmbh Verfahren zur herstellung von russfiltern
JPS62238368A (ja) * 1986-04-08 1987-10-19 Toshiba Corp 薄膜形成装置
US5077243A (en) * 1988-07-02 1991-12-31 Noritake Co., Limited Fiber-reinforced and particle-dispersion reinforced mullite composite material and method of producing the same
US5015502A (en) * 1988-11-03 1991-05-14 Allied-Signal Inc. Ceramic thermal barrier coating with alumina interlayer
US4880614A (en) * 1988-11-03 1989-11-14 Allied-Signal Inc. Ceramic thermal barrier coating with alumina interlayer
JP2881847B2 (ja) * 1988-12-15 1999-04-12 日産化学工業株式会社 コーティング用組成物及びその製造法
US5322711A (en) * 1989-07-21 1994-06-21 Minnesota Mining And Manufacturing Company Continuous method of covering inorganic fibrous material with particulates
US5316797A (en) * 1990-07-13 1994-05-31 General Atomics Preparing refractory fiberreinforced ceramic composites
US5231061A (en) * 1991-06-10 1993-07-27 The Dow Chemical Company Process for making coated ceramic reinforcement whiskers
WO1993024672A1 (en) * 1992-05-29 1993-12-09 United Technologies Corporation Ceramic thermal barrier coating for rapid thermal cycling applications
DE4228711A1 (de) * 1992-08-28 1994-03-03 Degussa Silicium-Aluminium-Mischoxid
US5336453B1 (en) * 1993-06-11 1996-07-23 Connecticut Innovations Inc Method for producing ceramic-based electronic components

Also Published As

Publication number Publication date
EP0802892B1 (de) 2002-04-10
AU4963496A (en) 1996-07-24
ATE215919T1 (de) 2002-04-15
DE69620577D1 (de) 2002-05-16
US5763008A (en) 1998-06-09
WO1996020903A1 (en) 1996-07-11
EP0802892A1 (de) 1997-10-29
CA2209561A1 (en) 1996-07-11

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