DE69617450T2 - Verfahren und vorrichtung zum messen von beschleunigung oder mechanischer kraft - Google Patents

Verfahren und vorrichtung zum messen von beschleunigung oder mechanischer kraft

Info

Publication number
DE69617450T2
DE69617450T2 DE69617450T DE69617450T DE69617450T2 DE 69617450 T2 DE69617450 T2 DE 69617450T2 DE 69617450 T DE69617450 T DE 69617450T DE 69617450 T DE69617450 T DE 69617450T DE 69617450 T2 DE69617450 T2 DE 69617450T2
Authority
DE
Germany
Prior art keywords
mechanical force
measuring acceleration
acceleration
measuring
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69617450T
Other languages
English (en)
Other versions
DE69617450D1 (de
Inventor
Styhr Hansen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hottinger Bruel and Kjaer AS
Original Assignee
Bruel and Kjaer AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bruel and Kjaer AS filed Critical Bruel and Kjaer AS
Publication of DE69617450D1 publication Critical patent/DE69617450D1/de
Application granted granted Critical
Publication of DE69617450T2 publication Critical patent/DE69617450T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/167—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using piezoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0915—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the shear mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Gyroscopes (AREA)
DE69617450T 1995-10-13 1996-09-24 Verfahren und vorrichtung zum messen von beschleunigung oder mechanischer kraft Expired - Lifetime DE69617450T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DK115995 1995-10-13
PCT/DK1996/000405 WO1997014969A1 (en) 1995-10-13 1996-09-24 Method and apparatus for measuring acceleration or mechanical forces

Publications (2)

Publication Number Publication Date
DE69617450D1 DE69617450D1 (de) 2002-01-10
DE69617450T2 true DE69617450T2 (de) 2002-04-04

Family

ID=8101668

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69617450T Expired - Lifetime DE69617450T2 (de) 1995-10-13 1996-09-24 Verfahren und vorrichtung zum messen von beschleunigung oder mechanischer kraft

Country Status (7)

Country Link
US (2) US5677487A (de)
EP (1) EP0855034B1 (de)
JP (1) JP2000514176A (de)
CN (1) CN1084877C (de)
AU (1) AU7278996A (de)
DE (1) DE69617450T2 (de)
WO (1) WO1997014969A1 (de)

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US7992431B2 (en) * 2006-11-28 2011-08-09 Drexel University Piezoelectric microcantilevers and uses in atomic force microscopy
JP2010518380A (ja) 2007-02-01 2010-05-27 ドレクセル・ユニバーシティー センサー用途向けハンドヘルド型位相シフト検出器
US8241569B2 (en) 2007-11-23 2012-08-14 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
US8741663B2 (en) 2008-03-11 2014-06-03 Drexel University Enhanced detection sensitivity with piezoelectric sensors
AU2009246115A1 (en) 2008-05-16 2009-11-19 Drexel University System and method for evaluating tissue
US8722427B2 (en) * 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
US20110086368A1 (en) * 2009-10-08 2011-04-14 Drexel University Method for immune response detection
US20130247662A1 (en) * 2010-12-08 2013-09-26 Microfine Materials Technologies Pte Ltd High-performance bending accelerometer
US9841434B2 (en) * 2013-02-07 2017-12-12 Kistler Holding Ag Method for producing an acceleration sensor
US9381647B2 (en) * 2013-02-19 2016-07-05 Seiko Epson Corporation Force detection device, robot, and moving object
US9360495B1 (en) 2013-03-14 2016-06-07 Lockheed Martin Corporation Low density underwater accelerometer
DE102014211054A1 (de) * 2014-06-10 2015-12-17 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor
EP3189377B1 (de) * 2014-09-02 2018-05-16 ASML Netherlands B.V. Sensor, objektpositionierungssystem, lithografische vorrichtung und verfahren zur herstellung eines artikels
JP6476730B2 (ja) * 2014-10-21 2019-03-06 セイコーエプソン株式会社 力検出装置及びロボット
CN107110886A (zh) * 2014-12-11 2017-08-29 布鲁尔及凯尔声音及振动测量公司 用于剪切模式加速计的压电传感器元件
JP6697072B2 (ja) * 2015-09-04 2020-05-20 キストラー ホールディング アクチエンゲゼルシャフト 力及びトルクを検出する装置
AU2016344004A1 (en) 2015-10-30 2018-06-14 Ion Geophysical Corporation Multi-axis, single mass accelerometer
JP6571873B2 (ja) * 2015-12-04 2019-09-04 キストラー ホールディング アクチエンゲゼルシャフト 加速度測定装置及び加速度測定装置を製造するための方法
CN108008148A (zh) * 2017-11-08 2018-05-08 中国航空工业集团公司金城南京机电液压工程研究中心 一种压电式无源加速度传感器
AT520901B1 (de) 2018-01-24 2019-11-15 Avl List Gmbh Messvorrichtung und Verfahren zur Bestimmung einer Kraft und/oder eines Drehmoments an einer drehmomentübertragenden Welle
CN108955985B (zh) * 2018-06-06 2019-07-30 成都科锐传感技术有限公司 一种可以测试多轴向力学物理量的传感器结构
EP3850373A1 (de) 2018-09-13 2021-07-21 ION Geophysical Corporation Mehrachsiger einzelmassenbeschleunigungsmesser
RU2702401C1 (ru) * 2019-03-01 2019-10-08 Российская Федерация, от имени которой выступает ФОНД ПЕРСПЕКТИВНЫХ ИССЛЕДОВАНИЙ Способ реализации и устройство чувствительного элемента для контроля параметров движения в составе многоуровневого многокристального модуля
WO2021074024A1 (de) * 2019-10-14 2021-04-22 Kistler Holding Ag Beschleunigungsaufnehmer
CN111351615B (zh) * 2020-03-25 2021-07-20 东南大学 空间站机械臂六维力传感器高精度小型化在轨标定装置及标定方法
EP4220189A1 (de) * 2020-11-02 2023-08-02 Kistler Holding AG Beschleunigungsaufnehmer
JP7244604B2 (ja) * 2020-11-02 2023-03-22 キストラー ホールディング アクチエンゲゼルシャフト 加速度変換器
EP4220190A3 (de) * 2020-11-02 2023-11-01 Kistler Holding AG Beschleunigungsaufnehmer

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Also Published As

Publication number Publication date
EP0855034B1 (de) 2001-11-28
WO1997014969A1 (en) 1997-04-24
US5677487A (en) 1997-10-14
CN1203665A (zh) 1998-12-30
US5996412A (en) 1999-12-07
AU7278996A (en) 1997-05-07
JP2000514176A (ja) 2000-10-24
DE69617450D1 (de) 2002-01-10
EP0855034A1 (de) 1998-07-29
CN1084877C (zh) 2002-05-15

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