DE69615720D1 - Piezoresistive Wandler mit überlappenden Kontakten - Google Patents
Piezoresistive Wandler mit überlappenden KontaktenInfo
- Publication number
- DE69615720D1 DE69615720D1 DE69615720T DE69615720T DE69615720D1 DE 69615720 D1 DE69615720 D1 DE 69615720D1 DE 69615720 T DE69615720 T DE 69615720T DE 69615720 T DE69615720 T DE 69615720T DE 69615720 D1 DE69615720 D1 DE 69615720D1
- Authority
- DE
- Germany
- Prior art keywords
- overlapping contacts
- piezoresistive transducers
- piezoresistive
- transducers
- overlapping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49101—Applying terminal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49103—Strain gauge making
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/395,228 US6150917A (en) | 1995-02-27 | 1995-02-27 | Piezoresistive sensor bridge having overlapping diffused regions to accommodate mask misalignment and method |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69615720D1 true DE69615720D1 (de) | 2001-11-15 |
DE69615720T2 DE69615720T2 (de) | 2002-06-20 |
Family
ID=23562184
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69615720T Expired - Lifetime DE69615720T2 (de) | 1995-02-27 | 1996-02-22 | Piezoresistive Wandler mit überlappenden Kontakten |
Country Status (5)
Country | Link |
---|---|
US (1) | US6150917A (de) |
EP (1) | EP0729019B1 (de) |
JP (1) | JP3282090B2 (de) |
KR (1) | KR100393699B1 (de) |
DE (1) | DE69615720T2 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6276050B1 (en) * | 1998-07-20 | 2001-08-21 | Emhart Inc. | Riveting system and process for forming a riveted joint |
US9015920B2 (en) | 1997-07-21 | 2015-04-28 | Newfrey Llc | Riveting system and process for forming a riveted joint |
US6308575B1 (en) * | 1999-05-14 | 2001-10-30 | Yih-Min Chang | Manufacturing method for the miniaturization of silicon bulk-machined pressure sensors |
US6581468B2 (en) | 2001-03-22 | 2003-06-24 | Kavlico Corporation | Independent-excitation cross-coupled differential-pressure transducer |
US6732422B1 (en) * | 2002-01-04 | 2004-05-11 | Taiwan Semiconductor Manufacturing Company | Method of forming resistors |
US7423511B2 (en) * | 2004-07-14 | 2008-09-09 | Nagano Keiki Co., Ltd. | Load sensor |
JP4710779B2 (ja) * | 2006-09-28 | 2011-06-29 | 株式会社日立製作所 | 力学量計測装置 |
CN103943289B (zh) * | 2008-11-06 | 2017-09-19 | 韦沙戴尔电子公司 | 四端子电阻器 |
JP5281658B2 (ja) * | 2009-01-06 | 2013-09-04 | アルプス電気株式会社 | ピエゾ抵抗型圧力センサ |
JP2011220686A (ja) * | 2010-04-02 | 2011-11-04 | Dainippon Printing Co Ltd | 半導体加速度センサ |
US9246486B2 (en) * | 2011-12-16 | 2016-01-26 | Apple Inc. | Electronic device with noise-cancelling force sensor |
US9027220B2 (en) | 2012-08-07 | 2015-05-12 | Newfrey Llc | Rivet setting machine |
CN106461474B (zh) * | 2014-06-27 | 2019-04-30 | 北陆电气工业株式会社 | 力检测器 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3270554A (en) * | 1961-01-04 | 1966-09-06 | Bell Telephone Labor Inc | Diffused layer transducers |
US3701056A (en) * | 1969-08-25 | 1972-10-24 | Iwatsu Electric Co Ltd | Resistive film bleeder resistor for use in an branch circuit |
US3916365A (en) * | 1972-01-31 | 1975-10-28 | Bailey Motor Company | Integrated single crystal pressure transducer |
GB1463087A (en) * | 1974-09-17 | 1977-02-02 | Welwyn Electric Ltd | Transducers |
DE2724817A1 (de) * | 1977-06-02 | 1978-12-07 | Philips Patentverwaltung | Verfahren zum abgleichen einer dehnungsmesstreifenvollbruecke |
JPS5595373A (en) * | 1979-01-11 | 1980-07-19 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
JPS5758367A (en) * | 1980-09-24 | 1982-04-08 | Matsushita Electric Ind Co Ltd | Manufacture of pressure sensor |
DE3113745A1 (de) * | 1981-04-04 | 1982-10-21 | Robert Bosch Gmbh, 7000 Stuttgart | Duennschicht-dehnungsmessstreifen und verfahren zu seiner herstellung |
US4442717A (en) * | 1982-09-20 | 1984-04-17 | Kulite Semiconductor Products, Inc. | Compensation and normalization apparatus for shear piezoresistive gage sensors |
JPS60128673A (ja) * | 1983-12-16 | 1985-07-09 | Hitachi Ltd | 半導体感圧装置 |
US4861420A (en) * | 1984-06-04 | 1989-08-29 | Tactile Perceptions, Inc. | Method of making a semiconductor transducer |
US4606781A (en) * | 1984-10-18 | 1986-08-19 | Motorola, Inc. | Method for resistor trimming by metal migration |
EP0195232B1 (de) * | 1985-03-20 | 1991-12-11 | Hitachi, Ltd. | Piezoresistiver Belastungsfühler |
JPS6340379A (ja) * | 1986-08-05 | 1988-02-20 | Fujitsu Ltd | 加速度センサ |
JPS6341080A (ja) * | 1986-08-06 | 1988-02-22 | Nissan Motor Co Ltd | 半導体加速度センサ |
JPH01211986A (ja) * | 1988-02-19 | 1989-08-25 | Matsushita Electric Ind Co Ltd | 半導体圧力センサ |
JPH03190281A (ja) * | 1989-12-18 | 1991-08-20 | Honeywell Inc | 半導体デバイス及びピエゾ抵抗型トランスデューサとその形成方法 |
US5198794A (en) * | 1990-03-26 | 1993-03-30 | Matsushita Electric Industrial Co., Ltd. | Trimmed resistor |
JP2940293B2 (ja) * | 1992-03-31 | 1999-08-25 | 日産自動車株式会社 | 半導体加速度センサの製造方法 |
US5432372A (en) * | 1993-01-14 | 1995-07-11 | Yamatake-Honeywell Co., Ltd. | Semiconductor pressure sensor |
-
1995
- 1995-02-27 US US08/395,228 patent/US6150917A/en not_active Expired - Lifetime
-
1996
- 1996-02-21 JP JP05840996A patent/JP3282090B2/ja not_active Expired - Fee Related
- 1996-02-22 DE DE69615720T patent/DE69615720T2/de not_active Expired - Lifetime
- 1996-02-22 EP EP96102659A patent/EP0729019B1/de not_active Expired - Lifetime
- 1996-02-23 KR KR1019960005182A patent/KR100393699B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP3282090B2 (ja) | 2002-05-13 |
KR100393699B1 (ko) | 2003-10-22 |
US6150917A (en) | 2000-11-21 |
EP0729019A2 (de) | 1996-08-28 |
EP0729019B1 (de) | 2001-10-10 |
EP0729019A3 (de) | 1996-12-11 |
JPH08261855A (ja) | 1996-10-11 |
KR970063802A (ko) | 1997-09-12 |
DE69615720T2 (de) | 2002-06-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8328 | Change in the person/name/address of the agent |
Free format text: SCHUMACHER & WILLSAU, PATENTANWALTSSOZIETAET, 80335 MUENCHEN |
|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: FREESCALE SEMICONDUCTOR, INC., AUSTIN, TEX., US |