DE69611159D1 - Chemische mischvorrichtung mit titriersteuerung - Google Patents

Chemische mischvorrichtung mit titriersteuerung

Info

Publication number
DE69611159D1
DE69611159D1 DE69611159T DE69611159T DE69611159D1 DE 69611159 D1 DE69611159 D1 DE 69611159D1 DE 69611159 T DE69611159 T DE 69611159T DE 69611159 T DE69611159 T DE 69611159T DE 69611159 D1 DE69611159 D1 DE 69611159D1
Authority
DE
Germany
Prior art keywords
titring
control
mixing device
chemical mixing
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69611159T
Other languages
English (en)
Other versions
DE69611159T2 (de
Inventor
T O'dougherty
A Lemke
C Grant
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Vacuum LLC
Original Assignee
FSI International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FSI International Inc filed Critical FSI International Inc
Application granted granted Critical
Publication of DE69611159D1 publication Critical patent/DE69611159D1/de
Publication of DE69611159T2 publication Critical patent/DE69611159T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/135—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture
    • G05D11/138—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by sensing at least one property of the mixture by sensing the concentration of the mixture, e.g. measuring pH value
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/20—Measuring; Control or regulation
    • B01F35/21—Measuring
    • B01F35/2133—Electrical conductivity or dielectric constant of the mixture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/82—Forming a predetermined ratio of the substances to be mixed by adding a material to be mixed to a mixture in response to a detected feature, e.g. density, radioactivity, consumed power or colour
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2499—Mixture condition maintaining or sensing
    • Y10T137/2509—By optical or chemical property

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Accessories For Mixers (AREA)
  • Control Of Non-Electrical Variables (AREA)
DE1996611159 1995-02-21 1996-02-20 Chemische mischvorrichtung mit titriersteuerung Expired - Fee Related DE69611159T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/395,374 US5924794A (en) 1995-02-21 1995-02-21 Chemical blending system with titrator control
PCT/US1996/002218 WO1996026474A1 (en) 1995-02-21 1996-02-20 Chemical blending system with titrator control

Publications (2)

Publication Number Publication Date
DE69611159D1 true DE69611159D1 (de) 2001-01-11
DE69611159T2 DE69611159T2 (de) 2001-06-07

Family

ID=23562776

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1996611159 Expired - Fee Related DE69611159T2 (de) 1995-02-21 1996-02-20 Chemische mischvorrichtung mit titriersteuerung

Country Status (6)

Country Link
US (1) US5924794A (de)
EP (1) EP0809823B1 (de)
JP (1) JP4021936B2 (de)
KR (1) KR100376106B1 (de)
DE (1) DE69611159T2 (de)
WO (1) WO1996026474A1 (de)

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EP1393063A1 (de) * 2001-02-05 2004-03-03 UNIVERSITY OF WYOMING RESEARCH CORPORATION, doing business as, WESTERN RESEARCH INSTITUTE Automatisches flockungstitrimeter-system
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US6766818B2 (en) * 2001-04-06 2004-07-27 Akrion, Llc Chemical concentration control device
US6572255B2 (en) * 2001-04-24 2003-06-03 Coulter International Corp. Apparatus for controllably mixing and delivering diluted solution
JP4456308B2 (ja) * 2001-12-05 2010-04-28 富士通マイクロエレクトロニクス株式会社 薬液供給装置
JP2003185537A (ja) * 2001-12-20 2003-07-03 Fujitsu Ltd 薬液の特性測定装置、薬液供給装置及び薬液の濃度測定方法
JP3869730B2 (ja) * 2002-01-16 2007-01-17 株式会社平間理化研究所 処理液調製供給方法及び装置
JP2005533639A (ja) * 2002-07-19 2005-11-10 キネティック システムズ，インコーポレーテッド プロセス材料を配合するための方法および装置
US20050013740A1 (en) * 2003-06-24 2005-01-20 Mason Thomas G. Computer-controlled automated titration apparatus for optically determining incompatibility of petroleum oils
US7072742B1 (en) 2003-10-17 2006-07-04 Technikrom, Inc. Accurate blending module and method
US7515994B2 (en) * 2003-10-17 2009-04-07 Technikrom, Inc. Accurate blending module and method
US8271139B2 (en) * 2003-10-17 2012-09-18 Asahi Kasei Bioprocess, Inc. Multi-stage accurate blending system and method
US7281840B2 (en) * 2004-07-09 2007-10-16 Tres-Ark, Inc. Chemical mixing apparatus
JP2008505752A (ja) * 2004-07-08 2008-02-28 トレス−アーク，インコーポレイテッド 化学薬品の混合装置、システム及び方法
US20060080041A1 (en) * 2004-07-08 2006-04-13 Anderson Gary R Chemical mixing apparatus, system and method
US7614410B2 (en) * 2005-03-01 2009-11-10 Hydrite Chemical Co. Chemical concentration controller and recorder
US20060196541A1 (en) * 2005-03-04 2006-09-07 David Gerken Control of fluid conditions in bulk fluid distribution systems
US7810516B2 (en) * 2005-03-04 2010-10-12 Air Liquide Electronics U.S. Lp Control of fluid conditions in bulk fluid distribution systems
EP1714695B9 (de) * 2005-04-18 2010-09-22 Asahi Kasei Bioprocess, Inc. Automatisierte Syntheseeinrichtung und Verfahren
US20070202603A1 (en) * 2006-02-27 2007-08-30 Steven Wayne Counts Apparatus and method for sampling and correcting fluids
US7743783B2 (en) * 2006-04-04 2010-06-29 Air Liquide Electronics U.S. Lp Method and apparatus for recycling process fluids
US20070251585A1 (en) * 2006-04-28 2007-11-01 David Paul Edwards Fluid distribution system
DE102006026254A1 (de) * 2006-06-02 2007-12-06 Schmidt & Heinzmann Gmbh & Co. Kg Vorrichtung zum Erzeugen einer Komponentenmischung aus mindestens zwei Komponenten und Verfahren hierzu
US8545636B2 (en) * 2006-07-27 2013-10-01 Atmel Corporation Conductivity control of water content in solvent strip baths
US8235580B2 (en) 2006-10-12 2012-08-07 Air Liquide Electronics U.S. Lp Reclaim function for semiconductor processing systems
US20080201053A1 (en) * 2007-02-20 2008-08-21 Esco Technologies (Asia) Pte Ltd System and method for mixed gas chamber with automatic recovery
JP5161703B2 (ja) * 2008-08-26 2013-03-13 シスメックス株式会社 試薬調製装置、検体処理装置および試薬調製方法
EP2389581B1 (de) * 2009-01-26 2016-07-06 M-I L.L.C. Titrierungseinheit mit kationenaustauschmöglichkeit
JP5571397B2 (ja) * 2010-01-26 2014-08-13 シスメックス株式会社 試薬調製装置
US20110197920A1 (en) * 2010-02-16 2011-08-18 Andy Kenowski Monitoring and Recording Device for Clean-In-Place System
BR102012014252B1 (pt) * 2012-06-13 2024-02-27 Profilática Produtos Odonto Médico Hospitalares S.A. Dosador automático de alta precisão para diluição de líquidos, processo e sistema de funcionamento
KR102013906B1 (ko) 2014-10-08 2019-08-23 버슘머트리얼즈 유에스, 엘엘씨 저압 요동 유동 제어 장치 및 방법
WO2016134279A1 (en) * 2015-02-19 2016-08-25 Asahi Kasei Bioprocess, Inc. System and method for compensating binary inlet buffers during inline buffer diluation
US20160296902A1 (en) 2016-06-17 2016-10-13 Air Liquide Electronics U.S. Lp Deterministic feedback blender
CN107665839B (zh) * 2016-07-29 2021-08-10 芝浦机械电子装置股份有限公司 处理液生成装置和使用该处理液生成装置的基板处理装置
JP6918600B2 (ja) * 2016-07-29 2021-08-11 芝浦メカトロニクス株式会社 処理液生成装置及びそれを用いた基板処理装置
US12017194B2 (en) 2016-11-01 2024-06-25 CMS Technology, LLC Systems and methods for improved blending of agents in chemical applications
DE102017104492A1 (de) * 2017-03-03 2018-09-06 Wiesheu Gmbh Vorrichtung und Verfahren zur Bereitstellung von Reinigungsfluid
MY191385A (en) * 2017-08-14 2022-06-22 Mplex Tech Sdn Bhd A chemical mixing system
CA3017667A1 (en) 2017-09-18 2019-03-18 Ecolab Usa Inc. Adaptive range titration systems and methods
BR112020020717B1 (pt) 2018-04-09 2023-10-24 Ecolab Usa Inc Sistema de titulação automatizado, e, método para quantificar uma concentração de analito alvo em uma corrente de amostra
US11397170B2 (en) 2018-04-16 2022-07-26 Ecolab Usa Inc. Repetition time interval adjustment in adaptive range titration systems and methods
CN113053781A (zh) * 2019-12-27 2021-06-29 台湾积体电路制造股份有限公司 半导体制程的系统和方法
US11586230B2 (en) * 2019-12-27 2023-02-21 Taiwan Semiconductor Manufacturing Co., Ltd. Systems and methods for automatic concentration control

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Also Published As

Publication number Publication date
EP0809823B1 (de) 2000-12-06
US5924794A (en) 1999-07-20
KR19980702397A (ko) 1998-07-15
EP0809823A1 (de) 1997-12-03
DE69611159T2 (de) 2001-06-07
WO1996026474A1 (en) 1996-08-29
KR100376106B1 (ko) 2003-06-11
JPH11500846A (ja) 1999-01-19
JP4021936B2 (ja) 2007-12-12
EP0809823A4 (de) 1998-06-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: THE BOC GROUP,INC.(N.D.GES.D.STAATES DELAWARE), MU

8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS VACCUM.INC. (N. D. GES. D. STAATES DEL, US

8328 Change in the person/name/address of the agent

Representative=s name: FLEUCHAUS & GALLO, PATENTANWALT WOLFGANG GALLO, 86

8339 Ceased/non-payment of the annual fee