DE69609434D1 - Kompensationsvorrichtung für mikromechanische Sensoren - Google Patents

Kompensationsvorrichtung für mikromechanische Sensoren

Info

Publication number
DE69609434D1
DE69609434D1 DE69609434T DE69609434T DE69609434D1 DE 69609434 D1 DE69609434 D1 DE 69609434D1 DE 69609434 T DE69609434 T DE 69609434T DE 69609434 T DE69609434 T DE 69609434T DE 69609434 D1 DE69609434 D1 DE 69609434D1
Authority
DE
Germany
Prior art keywords
compensation device
micromechanical sensors
micromechanical
sensors
compensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69609434T
Other languages
English (en)
Other versions
DE69609434T2 (de
Inventor
Jack Daniel Johnson
Fie An Liem
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Delphi Technologies Inc
Original Assignee
Delco Electronics LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Delco Electronics LLC filed Critical Delco Electronics LLC
Publication of DE69609434D1 publication Critical patent/DE69609434D1/de
Application granted granted Critical
Publication of DE69609434T2 publication Critical patent/DE69609434T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
DE69609434T 1995-02-22 1996-01-15 Kompensationsvorrichtung für mikromechanische Sensoren Expired - Fee Related DE69609434T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/391,854 US5616864A (en) 1995-02-22 1995-02-22 Method and apparatus for compensation of micromachined sensors

Publications (2)

Publication Number Publication Date
DE69609434D1 true DE69609434D1 (de) 2000-08-31
DE69609434T2 DE69609434T2 (de) 2001-01-18

Family

ID=23548203

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69609434T Expired - Fee Related DE69609434T2 (de) 1995-02-22 1996-01-15 Kompensationsvorrichtung für mikromechanische Sensoren

Country Status (4)

Country Link
US (1) US5616864A (de)
EP (1) EP0729010B1 (de)
JP (1) JP2667970B2 (de)
DE (1) DE69609434T2 (de)

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US5831162A (en) * 1997-01-21 1998-11-03 Delco Electronics Corporation Silicon micromachined motion sensor and method of making
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US6396620B1 (en) 2000-10-30 2002-05-28 Mcnc Electrostatically actuated electromagnetic radiation shutter
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KR100642373B1 (ko) * 2003-06-30 2006-11-10 지멘스 악티엔게젤샤프트 진동 자이로스코프를 포함하는 회전 속도 센서 및 그 회전 속도 센서를 이퀄라이징하는 방법
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US7448412B2 (en) * 2004-07-23 2008-11-11 Afa Controls Llc Microvalve assemblies and related structures and related methods
US7294552B2 (en) * 2005-08-29 2007-11-13 Delphi Technologies, Inc. Electrical contact for a MEMS device and method of making
ITTO20060861A1 (it) * 2006-12-04 2008-06-05 St Microelectronics Srl Dispositivo sensore dotato di un circuito di rilevamento di eventi singoli o multipli per la generazione di corrispondenti segnali di interruzione
WO2008072008A1 (en) * 2006-12-15 2008-06-19 Atlantic Inertial Systems Limited Improvements in or relating to a gyroscope
US7493814B2 (en) * 2006-12-22 2009-02-24 The Boeing Company Vibratory gyroscope with parasitic mode damping
FR2920224B1 (fr) * 2007-08-23 2009-10-02 Sagem Defense Securite Procede de determination d'une vitesse de rotation d'un capteur vibrant axisymetrique, et dispositif inertiel mettant en oeuvre le procede
US8186219B2 (en) * 2007-08-23 2012-05-29 Sagem Defense Securite Method of determining a speed of rotation of an axially symmetrical vibrating sensor, and a corresponding inertial device
EP2239541B1 (de) * 2008-01-29 2013-10-23 Sumitomo Precision Products Co., Ltd. Einen piezoelektrischen film verwendender schwingkreisel
US20100058861A1 (en) * 2008-09-11 2010-03-11 Analog Devices, Inc. Piezoelectric Transducers and Inertial Sensors using Piezoelectric Transducers
JP5523755B2 (ja) * 2009-02-11 2014-06-18 住友精密工業株式会社 圧電体膜を用いた振動ジャイロ及びその製造方法
FR2958029B1 (fr) * 2010-03-23 2012-04-20 Sagem Defense Securite Procede de mesure angulaire au moyen d'un capteur vibrant auquel sont appliquees des commandes modulees
JP5652112B2 (ja) * 2010-10-18 2015-01-14 セイコーエプソン株式会社 物理量センサーおよび電子機器
US8616056B2 (en) 2010-11-05 2013-12-31 Analog Devices, Inc. BAW gyroscope with bottom electrode
US9091544B2 (en) 2010-11-05 2015-07-28 Analog Devices, Inc. XY-axis shell-type gyroscopes with reduced cross-talk sensitivity and/or mode matching
US8631700B2 (en) 2010-11-05 2014-01-21 Analog Devices, Inc. Resonating sensor with mechanical constraints
US8919199B2 (en) 2010-12-01 2014-12-30 Analog Devices, Inc. Apparatus and method for anchoring electrodes in MEMS devices
GB201204355D0 (en) * 2012-03-13 2012-04-25 Atlantic Inertial Systems Ltd Vibratory ring structure
CN102693865B (zh) * 2012-06-15 2014-08-20 南京理工大学 一种微机械万向碰撞开关
US20140260611A1 (en) * 2013-03-15 2014-09-18 Analog Devices, Inc. XY-Axis Gyroscopes with Electrode Configuration for Detecting Quadrature Errors and Out-of-Plane Sense Modes
US9599471B2 (en) 2013-11-14 2017-03-21 Analog Devices, Inc. Dual use of a ring structure as gyroscope and accelerometer
US9709595B2 (en) 2013-11-14 2017-07-18 Analog Devices, Inc. Method and apparatus for detecting linear and rotational movement
FI126070B (en) * 2014-01-28 2016-06-15 Murata Manufacturing Co Improved ring gyroscope structure and gyroscope
CN104165624B (zh) * 2014-07-25 2017-01-11 中国人民解放军国防科学技术大学 一种基于侧壁压电驱动的环形振动陀螺及其驱动和检测方法
US10247554B2 (en) * 2014-09-24 2019-04-02 The Regents Of The University Of California Fully balanced micro-machined inertial sensor
US9917243B2 (en) 2014-10-16 2018-03-13 Analog Devices, Inc. Method of fabricating piezoelectric MEMS devices
US10746548B2 (en) 2014-11-04 2020-08-18 Analog Devices, Inc. Ring gyroscope structural features
US9709399B2 (en) * 2015-01-12 2017-07-18 The Boeing Company Approach for control redistribution of coriolis vibratory gyroscope (CVG) for performance improvement
US9869552B2 (en) * 2015-03-20 2018-01-16 Analog Devices, Inc. Gyroscope that compensates for fluctuations in sensitivity
GB2547415A (en) 2016-02-09 2017-08-23 Atlantic Inertial Systems Ltd Inertial sensors
GB2562450A (en) * 2017-01-30 2018-11-21 Cambridge Entpr Ltd A method of optimising the performance of a MEMS rate gyroscope
US11656077B2 (en) 2019-01-31 2023-05-23 Analog Devices, Inc. Pseudo-extensional mode MEMS ring gyroscope

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Also Published As

Publication number Publication date
US5616864A (en) 1997-04-01
DE69609434T2 (de) 2001-01-18
EP0729010B1 (de) 2000-07-26
EP0729010A1 (de) 1996-08-28
JPH08247772A (ja) 1996-09-27
JP2667970B2 (ja) 1997-10-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: DELPHI TECHNOLOGIES, INC., TROY, MICH., US

8339 Ceased/non-payment of the annual fee