DE69601746T2 - Heizungsaufbau für Getterpumpen und Gasreiniger - Google Patents

Heizungsaufbau für Getterpumpen und Gasreiniger

Info

Publication number
DE69601746T2
DE69601746T2 DE69601746T DE69601746T DE69601746T2 DE 69601746 T2 DE69601746 T2 DE 69601746T2 DE 69601746 T DE69601746 T DE 69601746T DE 69601746 T DE69601746 T DE 69601746T DE 69601746 T2 DE69601746 T2 DE 69601746T2
Authority
DE
Germany
Prior art keywords
heating structure
getter pumps
gas cleaners
cleaners
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69601746T
Other languages
English (en)
Other versions
DE69601746D1 (de
Inventor
Sergio Carella
Fortunato Belloni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Application granted granted Critical
Publication of DE69601746D1 publication Critical patent/DE69601746D1/de
Publication of DE69601746T2 publication Critical patent/DE69601746T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Resistance Heating (AREA)
DE69601746T 1995-05-11 1996-05-07 Heizungsaufbau für Getterpumpen und Gasreiniger Expired - Fee Related DE69601746T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITMI950954A IT1274478B (it) 1995-05-11 1995-05-11 Insieme di riscaldamento per pompe getter e purificatori di gas

Publications (2)

Publication Number Publication Date
DE69601746D1 DE69601746D1 (de) 1999-04-22
DE69601746T2 true DE69601746T2 (de) 1999-09-02

Family

ID=11371578

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69601746T Expired - Fee Related DE69601746T2 (de) 1995-05-11 1996-05-07 Heizungsaufbau für Getterpumpen und Gasreiniger

Country Status (4)

Country Link
EP (1) EP0742370B1 (de)
JP (1) JPH08315961A (de)
DE (1) DE69601746T2 (de)
IT (1) IT1274478B (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT237018Y1 (it) * 1995-07-10 2000-08-31 Getters Spa Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile
ITMI20121732A1 (it) 2012-10-15 2014-04-16 Getters Spa Pompa getter
TWI660125B (zh) 2014-04-03 2019-05-21 義大利商沙斯格特斯公司 吸氣泵
RU2663813C2 (ru) 2014-06-26 2018-08-10 Саес Геттерс С.П.А. Геттерная насосная система
CN112169528B (zh) * 2020-09-24 2022-07-12 有研工程技术研究院有限公司 一种内加热式吸气剂片及其制备方法
WO2024028240A1 (en) 2022-08-01 2024-02-08 Saes Getters S.P.A. Snap-on getter pump assembly and its use

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH597514A5 (de) * 1976-09-07 1978-04-14 Balzers Patent Beteilig Ag
US4137012A (en) * 1976-11-03 1979-01-30 S.A.E.S. Getters S.P.A. Modular getter pumps
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile

Also Published As

Publication number Publication date
EP0742370B1 (de) 1999-03-17
EP0742370A1 (de) 1996-11-13
ITMI950954A0 (it) 1995-05-11
JPH08315961A (ja) 1996-11-29
ITMI950954A1 (it) 1996-11-11
DE69601746D1 (de) 1999-04-22
IT1274478B (it) 1997-07-17

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee