DE69600677D1 - Vorrichtung zur Erzeugung zwei oder mehrere Entladungen in einem Gleichwellenleiternrohr - Google Patents
Vorrichtung zur Erzeugung zwei oder mehrere Entladungen in einem GleichwellenleiternrohrInfo
- Publication number
- DE69600677D1 DE69600677D1 DE69600677T DE69600677T DE69600677D1 DE 69600677 D1 DE69600677 D1 DE 69600677D1 DE 69600677 T DE69600677 T DE 69600677T DE 69600677 T DE69600677 T DE 69600677T DE 69600677 D1 DE69600677 D1 DE 69600677D1
- Authority
- DE
- Germany
- Prior art keywords
- tube
- axis
- those
- plasma chamber
- discharges
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 230000035515 penetration Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/32229—Waveguides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Control Of Motors That Do Not Use Commutators (AREA)
- Lasers (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9504802A FR2733384B1 (fr) | 1995-04-21 | 1995-04-21 | Dispositif pour creer deux ou plusieurs decharges plasma dans un meme tube guide d'onde |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69600677D1 true DE69600677D1 (de) | 1998-10-29 |
Family
ID=9478341
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69600677T Expired - Lifetime DE69600677D1 (de) | 1995-04-21 | 1996-04-18 | Vorrichtung zur Erzeugung zwei oder mehrere Entladungen in einem Gleichwellenleiternrohr |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0739155B1 (de) |
AT (1) | ATE171587T1 (de) |
DE (1) | DE69600677D1 (de) |
FR (1) | FR2733384B1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2762748B1 (fr) * | 1997-04-25 | 1999-06-11 | Air Liquide | Dispositif d'excitation d'un gaz par plasma d'onde de surface |
FR2766321B1 (fr) * | 1997-07-16 | 1999-09-03 | Air Liquide | Dispositif d'excitation d'un gaz par plasma d'onde de surface |
JP4173679B2 (ja) * | 2002-04-09 | 2008-10-29 | エム・イー・エス・アフティ株式会社 | Ecrプラズマ源およびecrプラズマ装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59189130A (ja) * | 1983-04-13 | 1984-10-26 | Toyota Motor Corp | プラズマ処理方法 |
FR2579855A1 (fr) * | 1985-03-28 | 1986-10-03 | Centre Nat Rech Scient | Dispositif pour l'excitation par ondes hyperfrequences d'un plasma dans une colonne de gaz, permettant notamment la realisation d'un laser ionique |
JPH01184921A (ja) * | 1988-01-20 | 1989-07-24 | Canon Inc | エッチング、アッシング及び成膜等に有用なプラズマ処理装置 |
US5037666A (en) * | 1989-08-03 | 1991-08-06 | Uha Mikakuto Precision Engineering Research Institute Co., Ltd. | High-speed film forming method by microwave plasma chemical vapor deposition (CVD) under high pressure |
US5049843A (en) * | 1990-04-12 | 1991-09-17 | Barnes Ramon M | Strip-line for propagating microwave energy |
US5389153A (en) * | 1993-02-19 | 1995-02-14 | Texas Instruments Incorporated | Plasma processing system using surface wave plasma generating apparatus and method |
-
1995
- 1995-04-21 FR FR9504802A patent/FR2733384B1/fr not_active Expired - Fee Related
-
1996
- 1996-04-18 EP EP96400832A patent/EP0739155B1/de not_active Expired - Lifetime
- 1996-04-18 DE DE69600677T patent/DE69600677D1/de not_active Expired - Lifetime
- 1996-04-18 AT AT96400832T patent/ATE171587T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
FR2733384A1 (fr) | 1996-10-25 |
EP0739155A1 (de) | 1996-10-23 |
ATE171587T1 (de) | 1998-10-15 |
FR2733384B1 (fr) | 1997-07-04 |
EP0739155B1 (de) | 1998-09-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |