DE69531424D1 - Verfahren zur Reinigung von Halosilanen - Google Patents

Verfahren zur Reinigung von Halosilanen

Info

Publication number
DE69531424D1
DE69531424D1 DE69531424T DE69531424T DE69531424D1 DE 69531424 D1 DE69531424 D1 DE 69531424D1 DE 69531424 T DE69531424 T DE 69531424T DE 69531424 T DE69531424 T DE 69531424T DE 69531424 D1 DE69531424 D1 DE 69531424D1
Authority
DE
Germany
Prior art keywords
halosilanes
purification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69531424T
Other languages
English (en)
Other versions
DE69531424T2 (de
Inventor
Catherine Lynn Bothe Almquist
Michael Anthony Diaz
Roland Lee Halm
Hasler, Jr
James Scott Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
Original Assignee
Dow Corning Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Corp filed Critical Dow Corning Corp
Publication of DE69531424D1 publication Critical patent/DE69531424D1/de
Application granted granted Critical
Publication of DE69531424T2 publication Critical patent/DE69531424T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification
    • C01B33/10784—Purification by adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/12—Organo silicon halides
    • C07F7/121—Preparation or treatment not provided for in C07F7/14, C07F7/16 or C07F7/20

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
DE69531424T 1994-05-23 1995-05-17 Verfahren zur Reinigung von Halosilanen Expired - Lifetime DE69531424T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/247,812 US5445742A (en) 1994-05-23 1994-05-23 Process for purifying halosilanes
US247812 1994-05-23

Publications (2)

Publication Number Publication Date
DE69531424D1 true DE69531424D1 (de) 2003-09-11
DE69531424T2 DE69531424T2 (de) 2004-07-01

Family

ID=22936479

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69531424T Expired - Lifetime DE69531424T2 (de) 1994-05-23 1995-05-17 Verfahren zur Reinigung von Halosilanen

Country Status (4)

Country Link
US (1) US5445742A (de)
EP (1) EP0684245B1 (de)
JP (1) JP3636390B2 (de)
DE (1) DE69531424T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6168652B1 (en) * 1995-10-23 2001-01-02 Dow Corning Corporation Process for purifying halosilanes
US5567836A (en) * 1995-11-29 1996-10-22 Dow Corning Corporation Process for separation of methyltrichlorosilane from dimethyldichlorosilane
US5569775A (en) 1995-11-29 1996-10-29 Dow Corning Corporation Process for separation of dimethyldichlorosilane from methyltrichlorosilane
US5777145A (en) * 1997-09-19 1998-07-07 Dow Corning Corporation Removal of chlorocarbons from organochlorosilanes
KR100228238B1 (ko) * 1997-12-31 1999-11-01 최수현 고순도 이소부탄의 흡착분리정제장치 및 공정
WO2005092790A2 (en) * 2004-03-19 2005-10-06 Entegris, Inc. Method and apparatus for purifying inorganic halides and oxyhalides using zeolites
DE102007048937A1 (de) 2007-10-12 2009-04-16 Evonik Degussa Gmbh Entfernung von polaren organischen Verbindungen und Fremdmetallen aus Organosilanen
DE102007050199A1 (de) 2007-10-20 2009-04-23 Evonik Degussa Gmbh Entfernung von Fremdmetallen aus anorganischen Silanen
DE102008054537A1 (de) 2008-12-11 2010-06-17 Evonik Degussa Gmbh Entfernung von Fremdmetallen aus Siliciumverbindungen durch Adsorption und/oder Filtration
US8168123B2 (en) * 2009-02-26 2012-05-01 Siliken Chemicals, S.L. Fluidized bed reactor for production of high purity silicon
TWI454309B (zh) * 2009-04-20 2014-10-01 Jiangsu Zhongneng Polysilicon Technology Dev Co Ltd 用於將反應排出氣體冷卻之方法及系統
US8425855B2 (en) 2009-04-20 2013-04-23 Robert Froehlich Reactor with silicide-coated metal surfaces
US8875728B2 (en) 2012-07-12 2014-11-04 Siliken Chemicals, S.L. Cooled gas distribution plate, thermal bridge breaking system, and related methods

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2380995A (en) * 1941-09-26 1945-08-07 Gen Electric Preparation of organosilicon halides
US3732326A (en) * 1970-05-19 1973-05-08 Mobil Oil Corp Selective sorption of less polar molecules with crystalline zeolites of high silica/alumina ratio
US4056369A (en) * 1975-11-25 1977-11-01 Henry Quackenbush Method of and apparatus for the recovery of a desired material from a carrier stream
US4066423A (en) * 1976-09-27 1978-01-03 Ht Management Company Adsorption-absorption vapor recovery system
GB1567096A (en) * 1977-02-22 1980-05-08 Gen Electric Process for removing biphenyls from
US4156689A (en) * 1978-02-13 1979-05-29 General Electric Company Purification of hydrosilanes and siloxanes
US4305734A (en) * 1979-09-19 1981-12-15 Mcgill Incorporated Recovery of hydrocarbon components from a hydrocarbon-carrier gas mixture
IT1062296B (it) * 1980-08-08 1984-06-26 Massimo Sacchetti Processo e apparecchiatura per eliminare e recuperare sostanze organiche volatili dai gas di scarico industriali
US4338101A (en) * 1981-08-03 1982-07-06 John Zink Company Process and apparatus for recovering hydrocarbons from inert gas-hydrocarbon vapor mixtures
SE8402393D0 (sv) * 1983-06-09 1984-05-03 Sten Andersson Sett att rena luft och vatten fran kolveten
US4462811A (en) * 1983-07-26 1984-07-31 John Zink Company Process and apparatus for removing hydrocarbons from air-hydrocarbon vapor mixtures
US4554141A (en) * 1984-05-14 1985-11-19 Ethyl Corporation Gas stream purification
US4784672A (en) * 1987-10-08 1988-11-15 Air Products And Chemicals, Inc. Regeneration of adsorbents
JP2790328B2 (ja) * 1988-09-07 1998-08-27 武田薬品工業株式会社 薬品賦活成型活性炭並びにその製造法及び用途
DE3843313A1 (de) * 1988-12-22 1990-06-28 Wacker Chemitronic Verfahren zur entfernung von gasfoermigen kontaminierenden, insbesondere dotierstoffverbindungen aus halogensilanverbindungen enthaltenden traegergasen
US5290342A (en) * 1990-12-05 1994-03-01 Ethyl Corporation Silane compositions and process
NZ244999A (en) * 1991-11-05 1995-04-27 Crosfield & Sons Ltd J Removal of organo-toxins from water; use of hydrotalcite type materials as absorbent

Also Published As

Publication number Publication date
EP0684245A3 (de) 1999-05-19
JP3636390B2 (ja) 2005-04-06
EP0684245B1 (de) 2003-08-06
US5445742A (en) 1995-08-29
EP0684245A2 (de) 1995-11-29
JPH0838804A (ja) 1996-02-13
DE69531424T2 (de) 2004-07-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: KROHER, STROBEL RECHTS- UND PATENTANWAELTE, 80336

8328 Change in the person/name/address of the agent

Representative=s name: DR. SCHOEN & PARTNER, 80336 MUENCHEN