DE69528208T2 - Optischer Verschiebungssensor - Google Patents

Optischer Verschiebungssensor

Info

Publication number
DE69528208T2
DE69528208T2 DE1995628208 DE69528208T DE69528208T2 DE 69528208 T2 DE69528208 T2 DE 69528208T2 DE 1995628208 DE1995628208 DE 1995628208 DE 69528208 T DE69528208 T DE 69528208T DE 69528208 T2 DE69528208 T2 DE 69528208T2
Authority
DE
Germany
Prior art keywords
displacement sensor
optical displacement
optical
sensor
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE1995628208
Other languages
English (en)
Other versions
DE69528208D1 (de
DE69528208T3 (de
Inventor
Yasushi Kaneda
Koh Ishizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26411178&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69528208(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69528208D1 publication Critical patent/DE69528208D1/de
Publication of DE69528208T2 publication Critical patent/DE69528208T2/de
Application granted granted Critical
Publication of DE69528208T3 publication Critical patent/DE69528208T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
DE69528208T 1994-03-14 1995-03-13 Optischer Verschiebungssensor Expired - Lifetime DE69528208T3 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP7000494 1994-03-14
JP7000494 1994-03-14
JP7462095 1995-03-07
JP07462095A JP3513251B2 (ja) 1994-03-14 1995-03-07 光学式変位センサ

Publications (3)

Publication Number Publication Date
DE69528208D1 DE69528208D1 (de) 2002-10-24
DE69528208T2 true DE69528208T2 (de) 2003-02-20
DE69528208T3 DE69528208T3 (de) 2005-12-15

Family

ID=26411178

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69528208T Expired - Lifetime DE69528208T3 (de) 1994-03-14 1995-03-13 Optischer Verschiebungssensor

Country Status (3)

Country Link
EP (1) EP0672891B2 (de)
JP (1) JP3513251B2 (de)
DE (1) DE69528208T3 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3631551B2 (ja) * 1996-01-23 2005-03-23 株式会社ミツトヨ 光学式エンコーダ
EP0932819B1 (de) * 1996-10-16 2002-01-30 Dr. Johannes Heidenhain GmbH Optische positionsmesseinrichtung
IL141536A (en) 1998-08-21 2005-07-25 Olivier M Parriaux Device for measuring translation, rotation or velocity via light beam interference
JP4381671B2 (ja) * 2002-10-23 2009-12-09 ソニーマニュファクチュアリングシステムズ株式会社 変位検出装置
JP2005147828A (ja) * 2003-11-14 2005-06-09 Mitsutoyo Corp 変位検出装置
JP4803641B2 (ja) * 2005-05-12 2011-10-26 オリンパス株式会社 光学式エンコーダ
JP4791811B2 (ja) † 2005-12-06 2011-10-12 株式会社ミツトヨ 光電式ロータリエンコーダ
TWI675187B (zh) * 2017-12-19 2019-10-21 財團法人工業技術研究院 光學編碼器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6023282B2 (ja) * 1974-03-15 1985-06-06 ナシヨナル・リサーチ・デイベロツプメント・コーポレイシヨン 相対変位測定装置
US4436424A (en) * 1981-07-27 1984-03-13 Gca Corporation Interferometer using transverse deviation of test beam
GB2216257B (en) * 1988-02-26 1992-06-24 Okuma Machinery Works Ltd Optical linear encoder
DE8816647U1 (de) † 1988-03-25 1990-02-15 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
DE4132941C2 (de) * 1990-10-20 1994-02-24 Heidenhain Gmbh Dr Johannes Interferentielle Meßeinrichtung für wenigstens eine Meßrichtung
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics
DE9218399U1 (de) † 1992-12-24 1994-01-27 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmeßsystem
JP3068408B2 (ja) 1994-06-16 2000-07-24 株式会社ミツトヨ 格子干渉型変位検出装置

Also Published As

Publication number Publication date
EP0672891B2 (de) 2005-05-18
DE69528208D1 (de) 2002-10-24
JPH07306011A (ja) 1995-11-21
EP0672891B1 (de) 2002-09-18
DE69528208T3 (de) 2005-12-15
EP0672891A1 (de) 1995-09-20
JP3513251B2 (ja) 2004-03-31

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings