DE69523291T2 - Diodenanordnung zum schutz von metall-oxyd-metall-kondensatoren - Google Patents
Diodenanordnung zum schutz von metall-oxyd-metall-kondensatorenInfo
- Publication number
- DE69523291T2 DE69523291T2 DE69523291T DE69523291T DE69523291T2 DE 69523291 T2 DE69523291 T2 DE 69523291T2 DE 69523291 T DE69523291 T DE 69523291T DE 69523291 T DE69523291 T DE 69523291T DE 69523291 T2 DE69523291 T2 DE 69523291T2
- Authority
- DE
- Germany
- Prior art keywords
- metal
- oxyd
- diode arrangement
- capacitors
- protecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000003990 capacitor Substances 0.000 title 1
- 239000002184 metal Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0255—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using diodes as protective elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/8611—Planar PN junction diodes
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US19885694A | 1994-02-18 | 1994-02-18 | |
PCT/US1995/002103 WO1995022842A1 (en) | 1994-02-18 | 1995-02-17 | Diode device to protect metal-oxide-metal capacitors |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69523291D1 DE69523291D1 (de) | 2001-11-22 |
DE69523291T2 true DE69523291T2 (de) | 2002-04-18 |
Family
ID=22735142
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69523291T Expired - Lifetime DE69523291T2 (de) | 1994-02-18 | 1995-02-17 | Diodenanordnung zum schutz von metall-oxyd-metall-kondensatoren |
Country Status (5)
Country | Link |
---|---|
US (2) | US5477078A (de) |
EP (1) | EP0745275B1 (de) |
JP (1) | JPH09509532A (de) |
DE (1) | DE69523291T2 (de) |
WO (1) | WO1995022842A1 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5477078A (en) * | 1994-02-18 | 1995-12-19 | Analog Devices, Incorporated | Integrated circuit (IC) with a two-terminal diode device to protect metal-oxide-metal capacitors from ESD damage |
US5656510A (en) * | 1994-11-22 | 1997-08-12 | Lucent Technologies Inc. | Method for manufacturing gate oxide capacitors including wafer backside dielectric and implantation electron flood gun current control |
US5780897A (en) * | 1995-11-13 | 1998-07-14 | Digital Equipment Corporation | ESD protection clamp for mixed voltage I/O stages using NMOS transistors |
JP3602242B2 (ja) * | 1996-02-14 | 2004-12-15 | 株式会社ルネサステクノロジ | 半導体装置 |
US5966517A (en) | 1996-11-01 | 1999-10-12 | Motorola, Inc. | Semiconductor device using diode place-holders and method of manufacture thereof |
US5786722A (en) * | 1996-11-12 | 1998-07-28 | Xerox Corporation | Integrated RF switching cell built in CMOS technology and utilizing a high voltage integrated circuit diode with a charge injecting node |
DE19746620A1 (de) * | 1997-10-22 | 1999-05-06 | Siemens Ag | Halbleiterdiode |
US6479872B1 (en) | 1998-12-28 | 2002-11-12 | Taiwan Semiconductor Manufacturing Company | Dynamic substrate-coupled electrostatic discharging protection circuit |
KR100290916B1 (ko) * | 1999-03-18 | 2001-05-15 | 김영환 | 이에스디(esd) 보호회로 및 그의 제조 방법 |
JP4597284B2 (ja) * | 1999-04-12 | 2010-12-15 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US6365932B1 (en) | 1999-08-20 | 2002-04-02 | Denso Corporation | Power MOS transistor |
DE19944487B4 (de) * | 1999-09-16 | 2005-04-28 | Infineon Technologies Ag | ESD-Schutzanordnung für eine Halbleitervorrichtung |
US6396107B1 (en) | 2000-11-20 | 2002-05-28 | International Business Machines Corporation | Trench-defined silicon germanium ESD diode network |
US7098509B2 (en) * | 2004-01-02 | 2006-08-29 | Semiconductor Components Industries, L.L.C. | High energy ESD structure and method |
DE102004008803B3 (de) * | 2004-02-20 | 2005-10-27 | Zentrum Mikroelektronik Dresden Ag | Schutzdiode zum Schutz von Halbleiterschaltkreisen gegen elektrostatische Entladungen |
DE102004026100B4 (de) | 2004-05-25 | 2007-10-25 | Infineon Technologies Ag | ESD-Schutzstrukturen für Halbleiterbauelemente |
JP4791015B2 (ja) * | 2004-09-29 | 2011-10-12 | ルネサスエレクトロニクス株式会社 | 縦型mosfet |
US20090115018A1 (en) * | 2007-11-01 | 2009-05-07 | Alpha & Omega Semiconductor, Ltd | Transient voltage suppressor manufactured in silicon on oxide (SOI) layer |
US7999357B1 (en) | 2008-05-12 | 2011-08-16 | Semiconductor Components Industries, Llc | Electrostatic discharge circuit using forward biased circular-arc shaped steering diodes |
US8003478B2 (en) * | 2008-06-06 | 2011-08-23 | Semiconductor Components Industries, Llc | Method of forming a bi-directional diode and structure therefor |
JP5448584B2 (ja) * | 2008-06-25 | 2014-03-19 | 株式会社半導体エネルギー研究所 | 半導体装置 |
DE102009032486A1 (de) | 2009-07-09 | 2011-01-13 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement |
US9520486B2 (en) | 2009-11-04 | 2016-12-13 | Analog Devices, Inc. | Electrostatic protection device |
DE102010027679A1 (de) * | 2010-07-20 | 2012-01-26 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement |
US10199482B2 (en) | 2010-11-29 | 2019-02-05 | Analog Devices, Inc. | Apparatus for electrostatic discharge protection |
US8816389B2 (en) | 2011-10-21 | 2014-08-26 | Analog Devices, Inc. | Overvoltage and/or electrostatic discharge protection device |
US8742455B2 (en) | 2011-05-11 | 2014-06-03 | Analog Devices, Inc. | Apparatus for electrostatic discharge protection |
US8421189B2 (en) * | 2011-05-11 | 2013-04-16 | Analog Devices, Inc. | Apparatus for electrostatic discharge protection |
US8803193B2 (en) | 2011-05-11 | 2014-08-12 | Analog Devices, Inc. | Overvoltage and/or electrostatic discharge protection device |
TWI506798B (zh) * | 2011-06-16 | 2015-11-01 | Macronix Int Co Ltd | 高壓電阻半導體裝置與製造高壓電阻半導體裝置的方法 |
US9484739B2 (en) | 2014-09-25 | 2016-11-01 | Analog Devices Global | Overvoltage protection device and method |
US10181719B2 (en) | 2015-03-16 | 2019-01-15 | Analog Devices Global | Overvoltage blocking protection device |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5988871A (ja) * | 1982-11-12 | 1984-05-22 | バ−・ブラウン・コ−ポレ−ション | 高安定低電圧集積回路表面下降状ダイオ−ド構造体及びその製造方法 |
JPH0732237B2 (ja) * | 1985-04-08 | 1995-04-10 | エスジ−エス−トムソン マイクロエレクトロニクス インコーポレイテッド | 静電放電入力保護回路 |
US5276350A (en) * | 1991-02-07 | 1994-01-04 | National Semiconductor Corporation | Low reverse junction breakdown voltage zener diode for electrostatic discharge protection of integrated circuits |
FR2678430B1 (fr) * | 1991-06-28 | 1993-10-29 | Sgs Thomson Microelectronics Sa | Diode a avalanche dans un circuit integre bipolaire. |
FR2693032B1 (fr) * | 1992-06-25 | 1994-09-30 | Sgs Thomson Microelectronics | Structure de diodes de protection de plot. |
FR2702308B1 (fr) * | 1993-03-01 | 1995-05-24 | Sgs Thomson Microelectronics | Diode à avalanche dans un circuit intégré bipolaire. |
US5446302A (en) * | 1993-12-14 | 1995-08-29 | Analog Devices, Incorporated | Integrated circuit with diode-connected transistor for reducing ESD damage |
US5477078A (en) * | 1994-02-18 | 1995-12-19 | Analog Devices, Incorporated | Integrated circuit (IC) with a two-terminal diode device to protect metal-oxide-metal capacitors from ESD damage |
-
1994
- 1994-12-23 US US08/363,384 patent/US5477078A/en not_active Expired - Lifetime
-
1995
- 1995-02-17 JP JP7521963A patent/JPH09509532A/ja active Pending
- 1995-02-17 WO PCT/US1995/002103 patent/WO1995022842A1/en active IP Right Grant
- 1995-02-17 DE DE69523291T patent/DE69523291T2/de not_active Expired - Lifetime
- 1995-02-17 EP EP95910306A patent/EP0745275B1/de not_active Expired - Lifetime
- 1995-10-20 US US08/546,188 patent/US5594266A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH09509532A (ja) | 1997-09-22 |
US5477078A (en) | 1995-12-19 |
DE69523291D1 (de) | 2001-11-22 |
EP0745275A1 (de) | 1996-12-04 |
EP0745275B1 (de) | 2001-10-17 |
EP0745275A4 (de) | 1997-05-21 |
WO1995022842A1 (en) | 1995-08-24 |
US5594266A (en) | 1997-01-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |